Acceleration sensor with limited movability in the vertical direction
First Claim
Patent Images
1. An acceleration sensor, comprising:
- a moveable, oscillating structure suspended on a substrate and which is deflectable in response to acceleration, a plane structure of oscillation of the oscillating structure being essentially parallel to a substrate plane;
an evaluation arrangement for measuring a deflection of the oscillating structure due to acceleration;
a stop arrangement for limiting a deflection movement of the oscillating structure, wherein the stop arrangement is essentially perpendicular to the plane of oscillation of the oscillating structure, and wherein the stop arrangement is situated between the oscillating structure and the substrate, and wherein the stop arrangement is connected to the oscillating structure in a force-locked manner; and
an element connected to the substrate in a force-locked manner forming a counter-stop.
1 Assignment
0 Petitions
Accused Products
Abstract
The present invention relates to an acceleration sensor including an oscillating structure which is movably suspended on a substrate and deflectable in response to the action of an acceleration, a plane of oscillation of the oscillating structure being essentially parallel to a substrate plane, and further including evaluation arrangements for measuring a deflection of the oscillating structure due to acceleration. In this context, provision is made for stop arrangements which limit a deflection movement of the oscillating structure in a direction essentially perpendicular to the plane of oscillation (x-, y-plane) of the oscillating structure.
-
Citations
7 Claims
-
1. An acceleration sensor, comprising:
-
a moveable, oscillating structure suspended on a substrate and which is deflectable in response to acceleration, a plane structure of oscillation of the oscillating structure being essentially parallel to a substrate plane;
an evaluation arrangement for measuring a deflection of the oscillating structure due to acceleration;
a stop arrangement for limiting a deflection movement of the oscillating structure, wherein the stop arrangement is essentially perpendicular to the plane of oscillation of the oscillating structure, and wherein the stop arrangement is situated between the oscillating structure and the substrate, and wherein the stop arrangement is connected to the oscillating structure in a force-locked manner; and
an element connected to the substrate in a force-locked manner forming a counter-stop. - View Dependent Claims (2, 3, 4, 5, 6, 7)
-
Specification