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Acceleration sensor with limited movability in the vertical direction

  • US 6,634,232 B1
  • Filed: 09/19/2002
  • Issued: 10/21/2003
  • Est. Priority Date: 10/15/1999
  • Status: Expired due to Term
First Claim
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1. An acceleration sensor, comprising:

  • a moveable, oscillating structure suspended on a substrate and which is deflectable in response to acceleration, a plane structure of oscillation of the oscillating structure being essentially parallel to a substrate plane;

    an evaluation arrangement for measuring a deflection of the oscillating structure due to acceleration;

    a stop arrangement for limiting a deflection movement of the oscillating structure, wherein the stop arrangement is essentially perpendicular to the plane of oscillation of the oscillating structure, and wherein the stop arrangement is situated between the oscillating structure and the substrate, and wherein the stop arrangement is connected to the oscillating structure in a force-locked manner; and

    an element connected to the substrate in a force-locked manner forming a counter-stop.

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