Atomic layer deposition method and semiconductor device fabricating apparatus having rotatable gas injectors

• US 6,634,314 B2
• Filed: 08/08/2001
• Issued: 10/21/2003
• Est. Priority Date: 08/09/2000
• Status: Active Grant

• Current Assignee: Jusung Engineering Company Limited
• Original Assignee: Jusung Engineering Company Limited
• Inventors: Shim, Kyung-Sik, Hwang, Chul-Ju
• Primary Examiner(s): LUND, JEFFRIE ROBERT
• Application Number:
  US09/927,004
• Publication Number:
  US 20020043216A1
• Time in Patent Office: 804 Days
• Field of Search: 118/715, 118/725, 118/728-730, 118/719, 118/723.R, 118/723.E
• US Class Current: 118/723.00R
• CPC Class Codes: C23C 16/45525 Atomic layer deposition [ALD]
• CPC Class Codes: C23C 16/45536 Use of plasma, radiation or electromagnetic fields
• CPC Class Codes: C23C 16/45551 for relative movement of the substrate and the gas injectors or half-reaction reactor compartments
• CPC Class Codes: C23C 16/45578 Elongated nozzles, tubes with holes
• CPC Class Codes: C23C 16/45589 Movable means, e.g. fans

Abstract

The present invention discloses an ALD method including: respectively loading a plurality of substrates into a plurality of reaction cells, the plurality of reaction cells being disposed in a reaction chamber isolated from an exterior condition; alternately and repeatedly applying various vapor substances onto each substrate such that a thin film is formed on each substrate, wherein a plurality of vapor injection pipes each injecting one of the vapor substances periodically scans over each substrate to apply the various vapor substances alternately and repeatedly onto each substrate.

In another aspect, the present invention discloses a semiconductor device fabricating apparatus including: a plurality of susceptors on which the same number of substrates are respectively mounted; a reaction chamber isolating all the substrates on the plurality of susceptors from an exterior condition; a plurality of vapor injection pipes disposed over the substrates, each vapor injection pipe relatively rotating with respect to the substrates and periodically applying a vapor substance onto each substrate; a plurality of exhausting portion each disposed near a corresponding susceptor to exhaust a remaining vapor substance out of the reaction chamber.

Claims

1. A semiconductor device fabricating apparatus comprising:

a plurality of suseptors on which the same number of substrates are respectively mounted;

a reaction chamber isolating all the substrates on the plurality of suseptors from an exterior condition;

a plurality of vapor injection pipes disposed over the substrates, each vapor injection pipe relatively rotating with respect to the substrates and periodically applying a vapor substance onto each substrate; and

a plurality of exhausting portions, each disposed on a surface of the reaction chamber on which a corresponding suseptor resides, near the corresponding suseptor, to exhaust a remaining vapor substance out of the reaction chamber.

2. The apparatus of claim 1, wherein a vertical distance between the susceptors and the vapor injection pipes is variable.

3. The apparatus of claim 1, further comprising a ring-shaped heater disposed under the plurality of susceptors to heat the substrates.

4. The apparatus of claim 1, further comprising a partition wall separating each substrate from the others such that the vapor substance applied onto the substrate reacts with the same substrate only.

5. The apparatus of claim 1, wherein the plurality of susceptors are fixed and the plurality of vapor injection pipes rotate.

6. The apparatus of claim 5, further comprising a position controller controlling the rotation speed of the plurality of vapor injection pipes.

7. The apparatus of claim 1, wherein the plurality of vapor injection pipes are fixed and the plurality of susceptors rotate.

8. The apparatus of claim 7, further comprising a position controller controlling the rotation speed of the plurality of susceptors.

9. The apparatus of claim 7, wherein RF power is applied to the plurality of vapor injection pipes to activate the vapor substance such that plasma is generated in the reaction chamber.

10. The apparatus of claim 1 further comprising a vapor supply pipe having a plurality of substantially concentric pipes positioned therein, each one of the plurality of substantially concentric pipes being in communication with a corresponding one of the plurality of vapor injection pipes.

11. The apparatus of claim 1 wherein each one of the plurality of vapor injection pipes includes a plurality of holes formed in a portion of the pipe residing nearest the substrate.