Actively-cooled distribution plate for reducing reactive gas temperature in a plasma processing system

• US 6,635,117 B1
• Filed: 04/26/2000
• Issued: 10/21/2003
• Est. Priority Date: 04/26/2000
• Status: Expired due to Term

• Current Assignee: Lam Research Corporation
• Original Assignee: Axcelis Technologies Incorporated
• Inventors: Richardson, Daniel B., Kinnard, David W.
• Primary Examiner(s): Hassanzadeh, Parviz
• Application Number:
  US09/560,538
• Time in Patent Office: 1,273 Days
• Field of Search: 118/724, 118/723.E, 118/723.MW, 156/345.34, 156/345.47, 156/345.33, 156/345.37
• US Class Current: 118/723.00R
• CPC Class Codes: C23C 16/4411 Cooling of the reaction chamber walls C23C16/45572 takes precedence
• CPC Class Codes: C23C 16/452 by activating reactive gas streams before their introduction into the reaction chamber, e.g. by ionisation or addition of reactive species
• CPC Class Codes: C23C 16/45561 Gas plumbing upstream of the reaction chamber
• CPC Class Codes: C23C 16/45565 Shower nozzles
• CPC Class Codes: C23C 16/45572 Cooled nozzles
• CPC Class Codes: H01J 37/3244 Gas supply means
• CPC Class Codes: H01J 37/32522 Temperature

Abstract

A plasma processing system is provided, having processor integral cooling passages for reducing an operating temperature thereof during processing of a wafer by the system. Cooling medium inlets and outlets are connected to the cooling passages to permit circulation of a cooling medium through the cooling passages. The baffle plate comprises a generally planar, apertured, gas distribution central portion surrounded by a flange into both of which the cooling passages may extend. Further, the baffle plate may have a non-apertured plate overlying and covering apertures in a central portion of the baffle plate.

Claims

1. A gas distribution plate for a plasma processing system, comprising:

(i) a generally planar central portion having apertures therein for permitting gas to pass therethrough;

(ii) cooling passages for accepting a flow of cooling medium to reduce an operating temperature of said gas distribution plate, said cooling passages disposed within said generally planar central portion of the gas distribution plate and extending between and substantially perpendicularly to said apertures;

(iii) a cooling medium inlet and a cooling medium outlet connected to said cooling passages to permit circulation of a cooling medium therethrough;

(iv) a generally planar upper baffle plate attached to said gas distribution plate and separated by a distance therefrom, said upper baffle plate provided with apertures; and

(v) a non-apertured plate overlying and covering apertures in a central portion of the upper baffle plate.

2. The gas distribution plate of claim 1, wherein said central portion is surrounded by a flange, said cooling passages extending from said flange into said apertured central portion.

3. The gas distribution plate of claim 1, wherein said plate is comprised of low-alloy anodized aluminum and said cooling passages are machined therein.

4. The gas distribution plate of claim 1, wherein said cooling medium is a liquid.

5. The gas distribution plate of claim 4, wherein said cooling medium is water.

6. The gas distribution plate of claim 1, wherein said cooling medium is a gas.

7. The gas distribution plate of claim 6, wherein said cooling medium is helium or nitrogen.

8. The gas distribution plate of claim 1, wherein said apertures in the upper baffle plate are slightly larger than said apertures in the gas distribution plate.

9. The gas distribution plate of claim 1, wherein said upper baffle plate is comprised of quartz.