Formation of insulating aluminum oxide in semiconductor substrates

• US 6,635,559 B2
• Filed: 09/06/2001
• Issued: 10/21/2003
• Est. Priority Date: 09/06/2001
• Status: Active Grant

• Current Assignee: Masimo Semiconductor Inc. (Masimo Corporation)
• Original Assignee: Spire Corporation
• Inventors: Kalkhoran, Nader Montazernezam, Greenwald, Anton C.
• Primary Examiner(s): Nhu, David
• Application Number:
  US09/949,030
• Publication Number:
  US 20030042501A1
• Time in Patent Office: 775 Days
• Field of Search: 438/506, 438/502, 438/513, 438/514, 438/603, 438/604, 438/584, 438/606, 438/663, 438/712, 438/722, 438/800, 438/930, 438/933, 438/681
• US Class Current: 438/604
• CPC Class Codes: H01L 21/02178 the material containing aluminium, e.g. Al2O3
• CPC Class Codes: H01L 21/28158 Making the insulator
• CPC Class Codes: H01L 21/31616 Deposition of Al2O3
• CPC Class Codes: H01L 21/76243 using silicon implanted buried insulating layers, e.g. oxide layers, i.e. SIMOX techniques
• CPC Class Codes: H01L 29/517 the insulating material comprising a metallic compound, e.g. metal oxide, metal silicate H01L29/518 takes precedence
• CPC Class Codes: H01L 31/0304 including, apart from doping materials or other impurities, only AIIIBV compounds
• CPC Class Codes: H01L 33/145 with a current-blocking structure
• CPC Class Codes: H01S 5/18311 using selective oxidation
• CPC Class Codes: Y02E 10/544 Solar cells from Group III-V materials

Abstract

The present invention provides methods and apparatus for creating insulating layers in Group III-V compound semiconductor structures having aluminum oxide with a substantially stoichiometric compositions. Such insulating layers find applications in a variety of semiconductor devices. For example, in one aspect, the invention provides vertical insulating layers separating two devices, such as photodiodes, formed on a semiconductor substrate from one another. In another aspect, the invention can provide such insulating layers as buried horizontal insulating layers of semiconductor devices.

Claims

1. A method of producing an electrically insulating layer in a semiconductor substrate, the method comprising the steps of:

implanting a selected dose of aluminum ions in a selected portion of said substrate,

implanting a selected dose of oxygen ions in said portion, and

annealing said substrate to cause formation of an insulating layer having aluminum oxide in said portion,

wherein said doses of said oxygen and aluminum ions are selected such that aluminum-oxygen ratio in said insulating layer is substantially stoichiometric.

2. The method of claim 1, wherein said annealing step is performed at a temperature in a range of about 600°

C. to about 1000°

C.

3. The method of claim 1, wherein said step of implanting aluminum ions further includes exposing said substrate to a beam of aluminum ions having a selected energy.

4. The method of claim 3, further comprising the step of selecting the energy of the beam of aluminum ions to be a range of about 0.5 keV to about 2000 keV.

5. The method of claim 1, further comprising the step of placing a mask over said semiconductor substrate so as to expose said selected portion of the substrate to said beam of ions.

6. The method of claim 5, further comprising the step of selecting said mask to be formed of any of silicon oxide, silicon nitride and silica.

7. The method of claim 1, wherein said step of implanting oxygen ions further includes exposing said substrate to a beam of oxygen ions.

8. The method of claim 7, further comprising the step of selecting energy of said beam of oxygen ions to be in a range of about 0.5 keV to about 2000 keV.

9. A method of producing a buried insulating layer in a semiconductor substrate having aluminum as one constituent, comprising the steps of:

implanting a selected dose of oxygen ions at in a region at a selected depth of the substrate,

annealing the substrate to form a layer containing aluminum oxide at said depth,

wherein said dose of oxygen ions is selected such that the aluminum oxide has a substantially stoichiometric composition.

10. A method of producing an electrically insulating layer in a semiconductor substrate, the method comprising the steps of:

implanting a selected dose of aluminum ions in a selected vertical portion of said substrate,

implanting a selected dose of oxygen ions in said portion, and

annealing said substrate to cause formation of an insulating layer having aluminum oxide in said portion,

wherein said doses of said oxygen and aluminum ions are selected such that aluminum-oxygen ratio in said insulating layer is substantially stoichiometric, and

wherein the step of implanting aluminum ions comprises exposing the substrate to a plurality of aluminum ion beams having selected ion densities and different energies, and wherein the step of implanting a selected dose of oxygen ions further comprises exposing the substrate to a plurality of oxygen ion beams having selected ion densities and energies such that the implanted oxygen ions are distributed substantially uniformly over the region in which the aluminum ions are implanted with a substantially stoichiometric ratio of aluminum and oxygen ions.

11. The method of claim 10, wherein the energies of the aluminum beams are in a range of about 0.5 to about 2000 keV.

12. The method of claim 10, further comprising selecting the energies of oxygen beams to be in a range of about 0.5 keV to about 2000 keV.