Method of detecting an endpoint during etching of a material within a recess

• US 6,635,573 B2
• Filed: 10/29/2001
• Issued: 10/21/2003
• Est. Priority Date: 10/29/2001
• Status: Expired due to Fees

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Pau, Wilfred, Chinn, Jeffrey D., Shen, Meihua
• Primary Examiner(s): Ho, Hoai
• Assistant Examiner(s): HOANG, QUOC DINH
• Application Number:
  US10/040,109
• Publication Number:
  US 20030082919A1
• Time in Patent Office: 722 Days
• Field of Search: 438/709, 438/714, 438/9, 438/183, 438/689
• US Class Current: 438/689
• CPC Class Codes: H01L 21/32137 of silicon-containing layers
• CPC Class Codes: H01L 22/26 Acting in response to an ongoing measurement without interruption of processing, e.g. endpoint detection, in-situ thickness measurement endpoint detection arrangements in CMP apparatus B24B37/013, in discharge apparatus H01J37/32

Abstract

We have discovered a method of detecting the approach of an endpoint during the etching of a material within a recess such as a trench or a contact via. The method provides a clear and distinct inflection endpoint signal, even for areas of a substrate containing isolated features. The method includes etching the material in the recess and using thin film interferometric endpoint detection to detect an endpoint of the etch process, where the interferometric incident light beam wavelength is tailored to the material being etched; the spot size of the substrate illuminated by the light beam is sufficient to provide adequate signal intensity from the material being etched; and the refractive index of the material being etched is sufficiently different from the refractive index of other materials contributing to reflected light from the substrate, that the combination of the light beam wavelength, the spot size, and the difference in refractive index provides a clear and distinct endpoint signal.

Claims

1. A method of etching a first material within a recess formed in a substrate of a second, different material, said method comprising the steps of:

a) etching a first portion of said first material using a plasma generated from a first plasma source gas;

b) detecting an endpoint for etching said first portion of said first material relative to an underlying layer of a third material which is different from said first material, wherein said endpoint is detected using thin film interferometric endpoint detection, wherein an interferometric incident light beam wavelength is tailored to said first material being etched, a spot size of a surface of said substrate illuminated by said incident light beam is sufficient to provide adequate signal intensity from said first material being etched, and a refractive index of said first material being etched is sufficiently different from a refractive index of other materials contributing to reflected light from said substrate that the combination of said light beam wavelength, said spot size, and said difference in refractive index provides a clear and distinct endpoint signal; and

c) removing a remaining portion of said first material by etching using a plasma generated from a second plasma source gas, wherein said second plasma source gas provides a selectivity for etching said first material relative to said underlying layer of said third different material, where said selectivity is at least 100;

1.

2. The method of claim 1, wherein said first material etching endpoint is detected by the steps of:

b-1) directing an incident light beam onto a surface of said substrate;

b-2) measuring the intensity of reflected light over time to obtain a measured waveform pattern; and

b-3) comparing said measured waveform pattern to a predetermined waveform pattern to determine said etching endpoint.

3. The method of claim 1, wherein said first material etching endpoint is detected by the steps of:

b-1) directing said incident light beam onto a surface of said substrate containing said first material;

b-2) measuring the intensity of reflected light over time to obtain a measured waveform pattern; and

b-3) comparing said measured waveform pattern to a predetermined waveform pattern to determine said etching endpoint.

4. The method of claim 3, wherein said characteristic feature is a waveform shape.

5. The method of claim 4, wherein said waveform shape is independent of the number of maxima or minima in a waveform pattern.

6. The method of claim 3, wherein said method comprises monitoring the intensity of light having substantially a single wavelength.

7. The method of claim 3, wherein said light is substantially non-polarized light.

8. The method of claim 7, wherein a thickness of about 100 Å

to about 200 Å

of polysilicon remains at the bottom of said recess when said endpoint is detected.

9. A method of etching polysilicon within a recess formed in a substrate of a first material different from polysilicon, comprising the steps of:

a) etching a first portion of said polysilicon using a plasma generated from a first plasma source gas;

b) detecting an endpoint for etching of said first portion of said polysilicon relative to an underlying layer of a second material different from polysilicon, wherein said endpoint is detected using a thin film interferometry endpoint detection technique; and

c) removing the remaining portion of said polysilicon by etching with a plasma generated from a second plasma source gas, wherein said second plasma source gas provides a selectivity for etching said polysilicon relative to said underlying layer of at least 100;

1, whereby an upper surface of said underlying layer is exposed.

10. The method of claim 9, wherein said underlying layer is a gate dielectric layer.

11. The method of claim 10, wherein said gate dielectric layer comprises a material selected from the group consisting of silicon oxide and tantalum pentoxide.

12. The method of claim 11, wherein a second plasma source gas comprises HBr, O₂, and He.

13. The method of claim 11, wherein said gate dielectric layer comprises a layer of silicon oxide having a thickness within the range of about 15 Å

to about 100 Å

.

14. The method of claim 9, wherein greater than 50 area % of surfaces surrounding said recess comprise a dielectric material.

15. The method of claim 14, wherein said dielectric material is selected from the group consisting of silicon oxide, silicon nitride, and silicon oxynitride.

16. The method of claim 9, or claim 10, or claim 11, or claim 13, or claim 14, or claim 15, wherein said recess has a feature size of less than about 0.1μ

and an aspect ratio of greater than 1.0.

17. The method of claim 16, wherein said feature size ranges from about 0.1μ

to about 0.15μ

.

18. The method of claim 9, wherein said first plasma source gas comprises HBr, Cl₂, O₂, and He.

19. The method of claim 9, wherein said first material etching endpoint is detected by the steps of:

b-1) directing an incident light beam onto a surface of said substrate;

b-2) measuring the intensity of reflected light over time to obtain a measured waveform pattern; and

b-3) comparing said measured waveform pattern to a predetermined waveform pattern to determine said etching endpoint.

20. The method of claim 9, wherein said first material etching endpoint is detected by the steps of:

b-1) directing an incident light beam onto a surface of said substrate;

b-2) monitoring the intensity of light reflected from said substrate surface over time to obtain a waveform; and

b-3) recognizing a characteristic feature of said waveform that occurs before said polysilicon is completely etched.

21. The method of claim 20, wherein said characteristic feature is a waveform shape.

22. The method of claim 21, wherein said waveform shape is a dip before a peak.

23. The method of claim 21, wherein said waveform shape is independent of the number of maxima or minima in said waveform pattern.

24. The method of claim 21, wherein said waveform shape comprises a curved portion.

25. The method of claim 20, wherein said method comprises monitoring the intensity of light having substantially a single wavelength.

26. The method of claim 20, wherein said light is substantially non-polarized light.

27. The method of claim 20, wherein said method comprises recognizing a characteristic waveform shape that occurs immediately prior to a terminal peak or dip in said waveform, said terminal peak or said dip corresponding to completion of etching of said polysilicon.

28. The method of claim 20, wherein said light has a wavelength within the range of about 350 nm to about 400 nm.

29. The method of claim 28, wherein said light has a wavelength of about 365 nm.