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MEMS optical switches having obliquely angled inputs and outputs relative to a face thereof and moveable reflectors with parallel positions therein and methods of forming same

  • US 6,636,655 B2
  • Filed: 08/24/2001
  • Issued: 10/21/2003
  • Est. Priority Date: 08/29/2000
  • Status: Expired due to Fees
First Claim
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1. A MEMS optical switch comprising:

  • a substrate having first and second opposing faces and a plurality of moveable reflectors on the first face;

    an input that is obliquely angled towards the first face adjacent thereto and that optically couples optical radiation towards the first face;

    at least one of the plurality of moveable reflectors on the first face being configured to move from a first position to a second position that is parallel to the first position to reflect the optical radiation from the input to provide reflected optical radiation; and

    an output that is obliquely angled away from the first face adjacent thereto and that optically couples the reflected optical radiation away from the first face.

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