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Integrated substrate processing system

  • US 6,637,446 B2
  • Filed: 08/01/2002
  • Issued: 10/28/2003
  • Est. Priority Date: 03/31/2000
  • Status: Expired due to Term
First Claim
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1. In an integrated substrate processing system, a substrate immersion tank and load/unload station, comprising:

  • an immersion tank configured to receive a plurality of substrates in a liquid bath;

    a cassette hangar configured to receive the plurality of substrates in a location exterior to the immersion tank and configured to position the plurality of substrates in the liquid bath;

    a substrate picker configured to extract the plurality of substrates one at a time from the liquid bath and position each one of the plurality of substrates exterior to the immersion tank, the positioning configured to enable each one of the plurality of substrates to be received by a substrate robot; and

    a substrate output shelf positioned over the immersion tank and configured to receive the plurality of substrates after processing in the integrated substrate processing system, to position the plurality of substrates for removal from the integrated substrate processing system, and to be positioned to provide access to the immersion tank for receiving the plurality of substrates.

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