Mirror assembly with elevator lifter

• US 6,637,901 B2
• Filed: 03/14/2002
• Issued: 10/28/2003
• Est. Priority Date: 03/14/2002
• Status: Expired due to Term

• Current Assignee: NeoPhotonics Corporation (Lumentum Holdings Inc.)
• Original Assignee: MEMX, Inc. (Lumentum Holdings Inc.)
• Inventors: Rodgers, Murray Steven
• Primary Examiner(s): Sikder, Mohammad
• Application Number:
  US10/099,466
• Publication Number:
  US 20030184889A1
• Time in Patent Office: 593 Days
• Field of Search: 359/872, 359/871, 359/877, 359/224, 359/225, 359/226
• US Class Current: 359/872
• CPC Class Codes: B81B 2201/045 Optical switches
• CPC Class Codes: B81B 3/004 Angular deflection
• CPC Class Codes: B81B 7/0003 MEMS mechanisms for assembling automatically hinged components, self-assembly devices self-assembly processes B81C1/00007
• CPC Class Codes: G02B 5/08 Mirrors vehicle mirrors involving special optical features B60R1/08
• CPC Class Codes: G02B 7/182 for mirrors

Abstract

The present invention is generally directed to a method and assembly for elevating and supporting a microstructure of a MEM system generally by engaging a positioning system of the MEM system with a first elevator lifter. The MEM system generally includes a first microstructure (such as a mirror) disposed in vertically spaced relation to a substrate. The positioning system generally includes an actuator assembly movably interconnected with the substrate, an elevator pivotally interconnected with the substrate and further interconnected with the microstructure, and a tether interconnecting the actuator assembly and the elevator. The first elevator lifter is provided to engage the elevator to lift/elevate the microstructure away from the substrate generally after fabrication of the MEM system and prior to utilizing the microstructure in operation of the MEM system.

Claims

1. A mirror assembly, comprising:

a substrate;

a mirror disposed in vertically spaced relation to said substrate;

an actuator assembly movably interconnected with said substrate;

an elevator pivotally interconnected with said substrate and further interconnected with said mirror;

a tether interconnecting said actuator assembly and said elevator; and

a first elevator lifter engageable with said elevator.

2. A mirror assembly, as claimed in claim 1, wherein:

said actuator assembly comprises at least one actuator.

3. A mirror assembly, as claimed in claim 1, wherein:

said actuator assembly comprises first and second actuators.

4. A mirror assembly, as claimed in claim 1, further comprising:

a displacement multiplier comprising an input structure and an output structure, wherein said actuator assembly is interconnected with said input structure and said tether is interconnected with said output structure.

5. A mirror assembly, as claimed in claim 1, further comprising:

first and second mirror interconnects extending between an interconnecting said elevator and said mirror.

6. A mirror assembly, as claimed in claim 1, wherein:

said first elevator lifter is at least initially disposed in vertically spaced relation to said elevator.

7. A mirror assembly, as claimed in claim 1, wherein:

said first elevator lifter is disposed under at least a portion of said elevator.

8. A mirror assembly, as claimed in claim 1, wherein:

said first elevator lifter comprises a pre-stressed beam.

9. A mirror assembly, as claimed in claim 8, wherein:

said pre-stressed beam comprises an encased oxide.

10. A mirror assembly, as claimed in claim 8, wherein:

sacrificial material maintains said first elevator lifter in vertically spaced relation to at least a portion of said elevator prior to being released by an etchant, and after release of said sacrificial material said first elevator lifter engages said at least a portion of said elevator to move said elevator at least generally away from said substrate.

11. A mirror assembly, as claimed in claim 8, wherein:

said pre-stressed beam comprises upper and lower walls disposed in vertically spaced relation by a closed-perimeter sidewall that extends between and interconnects said upper and lower walls, wherein said pre-stressed bean further comprises an oxide disposed within an enclosed space defined by said upper and lower walls and said sidewall.

12. A mirror assembly, as claimed in claim 1, wherein:

a thickness of said oxide between said upper and lower walls is within a range of about 0.3 micron to about 6 microns.

13. A mirror assembly, as claimed in claim 1, further comprising:

a first fuse interconnected with said first elevator lifter.

14. A mirror assembly, as claimed in claim 13, wherein:

said first fuse maintains said first elevator lifter in vertically spaced relation to at least a portion of said elevator prior to being activated, and after activation of said first fuse said first elevator lifter engages said at least a portion of said elevator to move said elevator at least generally away from said substrate.