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Method for electrostatic force bonding and a system thereof

  • US 6,638,627 B2
  • Filed: 12/10/2001
  • Issued: 10/28/2003
  • Est. Priority Date: 12/13/2000
  • Status: Active Grant
First Claim
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1. A system for electrostatic force bonding, the system comprising:

  • a first unit having a first region with fixed, trapped charge; and

    a second unit with a first region with induced charge, electrostatic forces between the fixed, trapped charge in the first region of the first unit and the induced charge in the first region of the second unit bonding the first and second units together wherein the first region of the first unit comprises a first layer and a second layer on top of the first layer to form a dual dielectric, the dual dielectric having an interface between the first and second layers where at least a portion of the fixed, trapped charge resides.

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