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Composition and method for a coating providing anti-reflective and anti-static properties

  • US 6,638,630 B2
  • Filed: 11/21/2001
  • Issued: 10/28/2003
  • Est. Priority Date: 09/13/1999
  • Status: Expired due to Term
First Claim
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1. An apparatus comprising:

  • a substrate;

    a first crystalline metal compound layer overlying the substrate comprising crystalline particles having a particle size less than one micron, the first layer having a first reflective index; and

    a second layer overlying the substrate and having a second reflective index different than the first reflective index.

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