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Semiconductor device and method of fabricating the same

  • US 6,638,781 B1
  • Filed: 06/29/2000
  • Issued: 10/28/2003
  • Est. Priority Date: 07/06/1999
  • Status: Expired due to Term
First Claim
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1. A semiconductor device comprising:

  • a first substrate;

    second substrate; and

    a plurality of columnar spacers disposed between said first substrate and said second substrate, each of said columnar spacers having at least an upper surface, a side surface, and an edge between said upper surface and said side surface, wherein said upper surface faces a surface of said second substrate, and wherein a radius R of curvature of said edge is 2 μ

    m or less.

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