×

Image sensor having large micro-lenses at the peripheral regions

  • US 6,638,786 B2
  • Filed: 10/25/2002
  • Issued: 10/28/2003
  • Est. Priority Date: 10/25/2002
  • Status: Expired due to Term
First Claim
Patent Images

1. A method for forming an image sensor comprising:

  • forming a plurality of pixels in a semiconductor substrate, each pixel including a light sensitive element, said pixels grouped as a center portion of pixels and an outer portion of pixels;

    forming a micro-lens material over said plurality of pixels, wherein said micro-lens material is a photoresist;

    exposing said micro-lens material with a first reticle mask to generate gap sections in said micro-lens material;

    exposing said micro-lens material with a second reticle mask to generate top portions in said micro-lens material located in said center portion of pixels;

    developing said micro-lens material to remove said top portions and said gap sections;

    reflowing said micro-lens material to form a first set of micro-lenses over each of said pixels in said center portion of pixels and a second set of micro-lenses over each of said pixels in said outer portion of said pixels, wherein said second set of micro-lenses differ from said first set of micro-lenses.

View all claims
  • 3 Assignments
Timeline View
Assignment View
    ×
    ×