Single chip optical cross connect

• US 6,640,023 B2
• Filed: 09/27/2001
• Issued: 10/28/2003
• Est. Priority Date: 09/27/2001
• Status: Expired due to Term

• Current Assignee: NeoPhotonics Corporation (Lumentum Holdings Inc.)
• Original Assignee: MEMX, Inc. (Lumentum Holdings Inc.)
• Inventors: Miller, Samuel Lee, McWhorter, Paul Jackson, Rodgers, Murray Steven, Barnes, Stephen Matthew, Sniegowski, Jeffry Joseph
• Primary Examiner(s): Lee, John D.
• Assistant Examiner(s): VALENCIA, DANIEL E
• Application Number:
  US09/966,966
• Publication Number:
  US 20030059153A1
• Time in Patent Office: 761 Days
• Field of Search: 385/16, 385/17, 385/18
• US Class Current: 385/17
• CPC Class Codes: B33Y 80/00 Products made by additive manufacturing
• CPC Class Codes: G02B 6/32 having lens focusing means positioned between opposed fibre ends with lens being an integral part of the single fibre end G02B6/262
• CPC Class Codes: G02B 6/3512 the optical element being reflective, e.g. mirror
• CPC Class Codes: G02B 6/3556 NxM switch, i.e. regular arrays of switches elements of matrix type constellation
• CPC Class Codes: G02B 6/357 Electrostatic force electrostatic forces controlling reflecting elements in general G02B26/0841
• CPC Class Codes: G02B 6/358 Latching of the moving element, i.e. maintaining or holding the moving element in place once operation has been performed; includes a mechanically bistable system
• CPC Class Codes: G02B 6/3582 Housing means or package or arranging details of the switching elements, e.g. for thermal isolation
• CPC Class Codes: G02B 6/3644 the coupling means being through-holes or wall apertures
• CPC Class Codes: G02B 6/3672 with fibres arranged in a regular matrix array
• CPC Class Codes: H04Q 11/0005 Switch and router aspects
• CPC Class Codes: H04Q 2011/003 using switches based on microelectro-mechanical systems [MEMS]

Abstract

The present invention provides a free space optical cross connect for switching optical signals between a plurality of optical signal ports to/from the switch interface. In one embodiment, a single chip 2N OXC (10) for switching optical signals (12) between any one of N input optical fibers (14) and any one of N output optical fibers (16) within a compact free space switch interface (18) includes N reflective microstructures (20) built/assembled on a substrate (30) and N positioning systems (40) associated with the reflective microstructures (20) that are also built/assembled on the substrate (30). The positioning systems (40) are operable to both elevate their associated reflective microstructures (20) from the surface of the substrate (30) and to tilt their associated reflective microstructures (20) with at least two degrees of freedom with respect to the surface of the substrate (30) in order to reflect optical signal (12) through the switch interface (18) from any one of the input optical fibers (14) to any one of the output optical fibers (16). The single chip 2N OXC (10) may also include a lid (62) overlying and spaced away from the substrate (30) to provide a hermetically sealed package (60).

Claims

1. An optical cross connect for switching optical signals between a plurality of optical ports, said optical cross connect comprising:

a substrate having a first surface facing the optical ports;

a plurality of reflective microstructures formed on the first surface of said substrate, each said reflective microstructure being associated with one of said optical ports and including an optically reflective surface; and

a free space switch interface defined between the optical ports and the first surface of said substrate with the optical ports being on a first side of said free space switch interface and said reflective microstructures being on a second side of said free space switch interface opposite the first side;

each said reflective microstructure being positionable to orient its reflective surface to reflect an optical signal receivable from its associated optical port directly to the reflective surface of at least one other one of said reflective microstructures;

each said reflective microstructure being positionable to orient its reflective surface to reflect an optical signal receivable directly from at least one other one of said reflective microstructures to its associated optical port.

2. The optical cross connect of claim 1 further comprising:

a plurality of positioning systems, each said positioning system being associated with one of said reflective microstructures and operable to elevate its associated reflective microstructure from the first surface of said substrate and tilt its associated reflective microstructure with at least two degrees of freedom with respect to the first surface of said substrate.

3. The optical cross connect of claim 2 wherein said reflective microstructures are arranged on said substrate and said positioning systems are configured to align a center of the reflective surface of each said reflective microstructure with a central axis of its associated optical port when said reflective microstructure is elevated at a specified height from the first surface of said substrate.

4. The optical cross connect of claim 1 wherein the reflective surfaces of said reflective microstructures are one of circular and elliptical.

5. The optical cross connect of claim 1 further comprising:

a lid positionable between the optical ports and the first surface of said substrate, said lid being configured for permitting transmission of optical signals therethrough between each optical port and its associated reflective microstructure.

6. The optical cross connect of claim 5 wherein the optical ports comprise optical fiber ends.

7. The optical cross connect of claim 6 further comprising:

a plurality of holes within which the optical fiber ends are receivable formed on a side of said lid facing away from the first surface of said substrate, said holes being arranged on the lid to align the optical fiber ends with said reflective microstructures.

8. The optical cross connect of claim 7 further comprising:

a plurality of lenses disposed on a side of said lid facing the first surface of said substrate, said lenses being arranged on the lid in a manner corresponding with said holes.

9. The optical cross connect of claim 8 further comprising:

a plurality of optical fiber cores disposed within the lid, each said optical fiber core extending between one of said holes and one of said lenses.

10. The optical cross connect of claim 6 further comprising:

at least one plate attachable to said lid, said at least one plate including a plurality of holes within which the optical fiber ends are receivable formed on a side of said at least one plate facing away from the first surface of said substrate, the holes being arranged on said at least one plate to align the optical fiber ends with the reflective microstructures when said at least one plate is attached on said lid.

11. The optical cross connect of claim 5 wherein said substrate and said lid comprise a hermetically sealed package.

12. An optical cross connect for switching an optical signal between a first plurality of optical ports and a second plurality of optical ports, said optical cross connect comprising:

a substrate having a first surface facing the first and second pluralities of optical ports;

a first plurality of reflective microstructures formed on the first surface of said substrate, each said reflective microstructure of said first plurality of reflective microstructures being associated with one of the first plurality of optical ports and including an optically reflective surface;

a second plurality of reflective microstructures formed on the first surface of said substrate, each said reflective microstructure of said second plurality of reflective microstructures being associated with one of the second plurality of optical ports and including an optically reflective surface; and

a free space switch interface defined between the optical ports and the first surface of said substrate with the optical ports being on a first side of said free space switch interface and said reflective microstructures being on a second side of said free space switch interface opposite the first side;

each said reflective microstructure of said first plurality of reflective microstructures being positionable to orient its reflective surface to reflect an optical signal receivable from its associated optical port directly to the reflective surface of at least one of said reflective microstructures of said second plurality of reflective microstructures and to reflect an optical signal receivable directly from the reflective surface of at least one of said reflective microstructures of said second plurality of reflective microstructures to its associated optical port;

each said reflective microstructure of said second plurality of reflective microstructures being positionable to orient its reflective surface to reflect an optical signal receivable directly from the reflective surface of at least one of said reflective microstructures of said first plurality of reflective microstructures to its associated optical port and to reflect an optical signal receivable from its associated optical port directly to the reflective surface of at least one of said reflective microstructures of said first plurality of reflective microstructures.

13. The optical cross connect of claim 12 further comprising:

a plurality of positioning systems, each said positioning system being associated with one of said reflective microstructures and operable to elevate its associated reflective microstructure from the first surface of said substrate and tilt its associated reflective microstructure with at least two degrees of freedom with respect to the first surface of said substrate.

14. The optical cross connect of claim 13 wherein said reflective microstructures are arranged on said substrate and said positioning systems are configured to align a center of the reflective surface of each said reflective microstructure of said first and second pluralities of reflective microstructures with a central axis of its associated optical port when said reflective microstructure is elevated at a specified height from the first surface of said substrate.

15. The optical cross connect of claim 13 wherein said each said positioning system is oriented on said substrate such that a range of a required tilt angle of its associated reflective microstructure is symmetric about an axis of symmetry of such positioning system.

16. The optical cross connect of claim 12 wherein said first and second pluralities of reflective microstructures are arranged in a plurality of parallel rows on said substrate.

17. The optical cross connect of claim 16 wherein said reflective microstructures within an outer one of said rows are elevatable to a greater height from the first surface of said substrate than said reflective microstructures within an inner one of said rows.

18. The optical cross connect of claim 12 wherein said first and second pluralities of reflective microstructures are arranged in a plurality of arcs on said substrate.

19. The optical cross connect of claim 12 wherein the reflective surfaces of said reflective microstructures of said first and second pluralities of reflective microstructures are one of circular and elliptical.

20. The optical cross connect of claim 12 further comprising:

a lid positionable between the optical ports and the first surface of said substrate, said lid being configured for permitting transmission of optical signals therethrough between each optical port and its associated reflective microstructure.

21. The optical cross connect of claim 20 wherein the first and second pluralities of optical ports comprise optical fiber ends.

22. The optical cross connect of claim 21 further comprising:

a plurality of holes within which the optical fiber ends are receivable formed on a side of said lid facing away from the first surface of said substrate, said holes being arranged on the lid to align the optical fiber ends with said reflective microstructures.

23. The optical cross connect of claim 22 further comprising:

a plurality of lenses, said lenses being disposed in said holes formed in said lid.

24. The optical cross connect of claim 22 further comprising:

a plurality of lenses disposed on a side of said lid facing the first surface of said substrate, said lenses being arranged on the lid in a manner corresponding with said holes.

25. The optical cross connect of claim 24 further comprising:

a plurality of optical fiber cores disposed within the lid, each said optical fiber core extending between one of said holes and one of said lenses.

26. The optical cross connect of claim 21 further comprising:

at least one plate attachable to said lid, said at least one plate including a plurality of holes within which the optical fiber ends are receivable formed on a side of said at least one plate facing away from the first surface of said substrate, the holes being arranged on said at least one plate to align the optical fiber ends with the reflective microstructures when said at least one plate is attached on said lid.

27. The optical cross connect of claim 26 further comprising:

a plurality of lenses, said lenses being disposed in said holes formed in said at least one plate.

28. The optical cross connect of claim 26 further comprising:

an alignment structure configured to ensure correct alignment of said at least one plate on said lid when attaching said at least one plate to said lid.

29. The optical cross connect of claim 28 wherein said alignment structure comprises at least one of a notch, a groove, and a pin formed on at least one of said lid and said plate.

30. The optical cross connect of claim 12 wherein an arrangement of said first and second pluralities of reflective microstructures on said substrate comprises a single die formed on said substrate, and wherein a plurality of identical dies are formed on said substrate.

31. The optical cross connect of claim 30 wherein said dies are arranged relative to one another such that at least one reflective microstructure of each said die is positionable to reflect an optical signal to at least one reflective microstructure of at least one other die.

32. The optical cross connect of claim 31 wherein said dies are arranged in a side-by-side manner on said substrate.

37. The optical cross connect of claim 31 further comprising:

a plurality of optical fiber cores disposed within the lid, each said optical fiber core extending between one of said holes and one of said lenses.

33. An optical cross connect for switching an optical signal between a first plurality of optical ports and a second plurality of optical ports, said optical cross connect comprising:

a substrate having a first surface facing the first and second pluralities of optical ports;

a first plurality of reflective microstructures formed on the first surface of said substrate, each said reflective microstructure of said first plurality of reflective microstructures being associated with one of the first plurality of optical ports and including an optically reflective surface, wherein the number of reflective microstructures in the first plurality of reflective microstructures equals the number of optical ports in the first plurality of optical ports;

a second plurality of reflective microstructures formed on the first surface of said substrate, each said reflective microstructure of said second plurality of reflective microstructures being associated with one of the second plurality of optical ports and including an optically reflective surface, wherein the number of reflective microstructures in the second plurality of reflective microstructures equals the number of optical ports in the second plurality of optical ports;

an optically reflective area facing and spaced away from the first surface of said substrate, said optically reflective area being positioned between the first and second pluralities of optical ports to reflect an optical signal between the optically reflective surface of any one of said reflective microstructures of said first plurality of reflective microstructures and the optically reflective surface of any one of said reflective microstructures of said second plurality of reflective microstructures;

a lid positionable between the optical ports and the first surface of said substrate, said lid being configured for permitting transmission of optical signals therethrough between each optical port and its associated reflective microstructure, said lid having said optically reflective area formed on a side of said lid facing the first surface of said substrate; and

at least one plate attachable to said lid, said at least one plate including a plurality of holes within which a plurality of optical fiber ends are receivable formed on a side of said at least one plate facing away from the first surface of said substrate, the holes being arranged on said at least one plate to align the optical fiber ends with the reflective microstructures when said at least one plate is attached on said lid;

each said reflective microstructure of said first and second pluralities of reflective microstructures being positionable to orient its reflective surface to reflect an optical signal receivable from its associated optical port to the optically reflective area and to reflect an optical signal receivable from the optically reflective area to its associated optical port.

34. The optical cross connect of claim 33 further comprising:

a plurality of positioning systems, each said positioning system being associated with one of said reflective microstructures and operable to elevate its associated reflective microstructure from the first surface of said substrate and tilt its associated reflective microstructure with at least two degrees of freedom with respect to the first surface of said substrate.

38. The optical cross connect of claim 33 wherein said optically reflective area is configured to modify optical properties of an optical signal reflected therefrom.

39. The optical cross connect of claim 38 wherein said optical properties include polarization.

40. The optical cross connect of claim 33 further comprising a light-sensitive structure configured and positioned for detecting the locations of optical signals incident thereon.

35. The optical cross connect of claim 35 further comprising:

a plurality of holes within which the optical fiber ends are receivable formed on a side of said lid facing away from the first surface of said substrate, said holes being arranged on the lid to align the optical fiber ends with said reflective microstructures.

36. The optical cross connect of claim 35 further comprising:

a plurality of lenses disposed on a side of said lid facing the first surface of said substrate, said lenses being arranged on the lid in a manner corresponding with said holes.

41. An optical cross connect for switching optical signals between a plurality of optical ports, said optical cross connect comprising:

a substrate having a first surface facing the optical ports;

a plurality of first means formed on said substrate for reflecting optical signals incident thereon, each said first means being associated with one of the optical ports;

a free space switch interface defined between the optical ports and the first surface of said substrate with the optical ports being on a first side of said free space switch interface and said first means being on a second side of said free space switch interface opposite the first side; and

a plurality of second means formed on said substrate for orienting each said first means to direct an optical signal receivable from its associated optical port directly to at least one other one of said first means and orienting each said first means to direct an optical signal receivable directly from at least one other one of said first means to its associated optical port.

42. The optical cross connect of claim 41 wherein each said first means comprises a positionable reflective microstructure.

43. The optical cross connect of claim 42 wherein each said second means comprises a positioning system, each said positioning system being associated with one of said reflective microstructures and operable to elevate its associated reflective microstructure from the first surface of said substrate and tilt its associated reflective microstructure with at least two degrees of freedom with respect to the first surface of said substrate.

44. The optical cross connect of claim 41 wherein the plurality of optical ports comprise optical fiber ends.

45. The optical cross connect of claim 44 further comprising:

means for covering said first surface of said substrate; and

means for aligning the optical fiber ends with said first means.

46. The optical cross connect of claim 45 wherein said means for covering comprise a lid positionable between the optical ports and the first surface of said substrate, said lid being configured for permitting transmission of optical signals therethrough between each optical fiber end and its associated first means, and wherein said means for aligning comprise a plurality of holes within which the optical fiber ends are receivable, said holes being formed on a side of said lid facing away from the first surface of said substrate, said holes being arranged on the lid to align the optical fiber ends with said first means.

47. The optical cross connect of claim 45 wherein said means for covering comprise a lid positionable between the optical fiber ends and the first surface of said substrate, said lid being configured for permitting transmission of optical signals therethrough between each optical fiber end and its associated first means, and wherein said means for aligning comprise at least one plate attachable to said lid, said at least one plate including a plurality of holes within which the optical fiber ends are receivable formed on a side of said at least one plate facing away from the first surface of said substrate, the holes being arranged on said at least one plate to align the optical fiber ends with said first means when said at least one plate is attached on said lid.

48. The optical cross connect of claim 44 further comprising:

means, associated with each optical fiber end, for forming a free space optical beam from an optical signal transmittable from each said optical fiber end and focusing a free space optical beam onto each said optical fiber end.

49. The optical cross connect of claim 48 wherein said means for forming a free space optical beam comprises a lens associated with each optical fiber end.

50. An optical cross connect for switching optical signals between a plurality of optical ports, said optical cross connect comprising;

a substrate having a first surface facing the optical ports;

a plurality of reflective microstructures formed on the first surface of said substrate, each said reflective microstructure being associated with one of the optical ports and including an optically reflective surface;

a plurality of positioning systems formed on the first surface of said substrate, each said positioning system being associated with one of said reflective microstructures and operable to elevate its associated reflective microstructure from the first surface of said substrate and tilt its associated reflective microstructure with at least two degrees of freedom with respect to the first surface of said substrate;

at least one positioning system including a first lever arm of a first length having a first end thereof attached to its associated reflective microstructure and a second end thereof attached to said substrate, said first lever arm of a first length being pivotable about its second end; and

at least one positioning system including a second lever arm of a second length having a first end thereof attached to its associated reflective microstructure and a second end thereof attached to said substrate, said second lever arm of a second length being pivotable about its second end;

said first and second lengths being different wherein pivoting of said first and second lever arms through the same angular displacement achieves different vertical displacement of the first ends of said first and second lever arms with respect to the first surface of said substrate.

51. The optical cross connect of claim 50 wherein said first length is between 500 microns and 1000 microns, and wherein said second length is between 1000 microns and 1500 microns.

52. The optical cross connect of claim 50 wherein said first and second lever arms are coupled with electrostatic actuators operable to effect pivoting of said first and second lever arms about the second ends thereof.

53. The optical cross connect of claim 50 wherein said reflective microstructures are arranged in a plurality of rows on the first surface of said substrate, and wherein positioning systems associated with reflective microstructures in a first one of said rows include first lever arms of a first length and wherein positioning systems associated with reflective microstructures in a second one of said rows include second lever arms of a second length.

54. The optical cross connect of claim 50 wherein said reflective microstructures are arranged in a plurality of arcs on the first surface of said substrate, and wherein positioning systems associated with reflective microstructures in a first one of said arcs include first lever arms of a first length and wherein positioning systems associated with reflective microstructures in a second one of said arcs include second lever arms of a second length.

55. An optical cross connect for switching an optical signal between a first optical port and any one of a plurality of second optical ports, said optical cross connect comprising:

a substrate having a surface facing the first optical port and the plurality of second optical ports;

a first reflective microstructure formed on the surface of said substrate, said first reflective microstructure being associated with the first optical port and including an optically reflective surface;

a plurality of second reflective microstructures formed on the surface of said substrate, each said second reflective microstructure being associated with one of said second optical ports and including an optically reflective surface; and

a free space switch interface defined between the optical ports and the surface of said substrate with the optical ports being on a first side of said free space switch interface and said reflective microstructures being on a second side of said free space switch interface opposite the first side;

said first reflective microstructure being positionable to orient its reflective surface to reflect an optical signal receivable from the first optical port directly to the reflective surface of any one of said second reflective microstructures and to reflect an optical signal receivable directly from the reflective surface of any one of said second reflective microstructures to the first optical port;

each said second reflective microstructure being positionable to orient its reflective surface to reflect an optical signal receivable directly from said first reflective microstructure to its associated optical port and to reflect an optical signal receivable from its associated optical port directly to said first reflective microstructure.

56. The optical cross connect of claim 55 wherein said second reflective microstructures are arranged in at least one arc, said first reflective microstructure being located on a concave side of said arc.

57. The optical cross connect of claim 56 wherein said second reflective microstructures are positionable with only one degree of freedom.

58. The optical cross connect of claim 56 wherein said second reflective microstructures are arranged in an outer and an inner arc.

59. The optical cross connect of claim 58 wherein said second reflective microstructures in the inner and outer arcs are located at different angular locations with respect to said first reflective microstructure.

60. An optical cross connect switch, comprising:

a support;

a plurality of first input mirror microstructures disposed within a first row on a first side of a first reference axis;

a first pivot member for each of said first input mirror microstructures, wherein each said first pivot member interconnects its corresponding said first input mirror microstructure with said support, and wherein each said first pivot member is of a first length;

a plurality of second input mirror microstructures disposed within a second row on said first side of said first reference axis in spaced relation to said first row such that said first row is disposed between said second row and said first reference axis;

a second pivot member for each of said second input mirror microstructures, wherein each said second pivot member interconnects its corresponding said second input mirror microstructure with said support, and wherein each said second pivot member is of a second length different from said first length;

a plurality of first output mirror microstructures disposed within a third row on a second side of said first reference axis that is opposite said first side;

a third pivot member for each of said first output mirror microstructures, wherein each said third pivot member interconnects its corresponding said first output mirror microstructure with said support, and wherein each said third pivot member is of a third length;

a plurality of second output mirror microstructures disposed within a fourth row on said second side of said first reference axis in spaced relation to said third row such that said third row is disposed between said fourth row and said first reference axis; and

a fourth pivot member for each of said second output mirror microstructures, wherein each said fourth pivot member interconnects its corresponding said second output mirror microstructure with said support, and wherein each said fourth pivot member is of a fourth length different from said third length.

61. A switch, as claimed in claim 60, wherein:

said support comprises a single, common substrate.

62. A switch, as claimed in claim 60, wherein:

said first, second, third, and fourth rows are disposed in a parallel relation.

63. A switch, as claimed in claim 60, wherein:

said first and second input mirror microstructures pivot away from said support in a direction of said first and second output mirror microstructures, and wherein said first and second output mirror microstructures pivot away from said support in a direction of said first and second input mirror microstructures.

64. A switch, as claimed in claim 60, wherein:

a second reference axis is perpendicular to said first reference axis, wherein a magnitude of a first acute angle between said first reference axis and each said first pivot member is decreased for each said first pivot member that is disposed further from said second reference axis, wherein a magnitude of a second acute angle between said first reference axis and each said second pivot member is decreased for each said second pivot member that is disposed further from said second reference axis, wherein a magnitude of a third acute angle between said first reference axis and each said third pivot member is decreased for each said third pivot member that is disposed further from said second reference axis, and wherein a magnitude of a fourth acute angle between said first reference axis and each said fourth pivot member is decreased for each said fourth pivot member that is disposed further from said second reference axis.

65. A switch, as claimed in claim 60, wherein said second length is greater than said first length and wherein said fourth length is greater than third length.

66. A switch, as claimed in claim 60, wherein said first and third lengths are the same and wherein said second and fourth lengths are the same.

67. A switch, as claimed in claim 60, further comprising:

an optically reflective area spaced away from said support, said optically reflective area being positioned laterally to have portions thereof on both the first and second sides of said first reference axis, wherein optical signals are reflectable between any one of the first and second input mirror microstructures and any one of the first and second output mirror microstructures via said optically reflective area.

68. A switch, as claimed in claim 67, further comprising:

a lid positionable over said support, said lid having said optically reflective area formed on a side of said lid facing said support.

69. An optical cross connect switch, comprising:

a support having a surface;

a plurality of first input mirror microstructures disposed within a first row on a first side of a first reference axis defined on the surface of said support;

an input pivot member for each of said input mirror microstructures, wherein each said input pivot member interconnects its corresponding said input mirror microstructure with said support;

a plurality of output mirror micro structures disposed within a second row on a second side of said first reference axis that is opposite said first side; and

an output pivot member for each of said output mirror microstructures, wherein each said output pivot member interconnects its corresponding said output mirror microstructure with said support, wherein a second reference axis defined on the surface of said support is perpendicular to said first reference axis, wherein a magnitude of a first acute angle defined on the surface of said support between said first reference axis and each said input pivot member is decreased for each said input pivot member that is disposed further from said second reference axis, and wherein a magnitude of a second acute angle defined on the surface of said support between said first reference axis and each said output pivot member is decreased for each said output pivot member that is disposed further from said second reference axis.

70. An optical cross connect for switching an optical signal between a first plurality of optical ports and a second plurality of optical ports, said optical cross connect comprising:

a substrate having a first surface facing the first and second pluralities of optical ports;

a first plurality of reflective microstructures formed on the first surface of said substrate, each said reflective microstructure of said first plurality of reflective microstructures being associated with one of the first plurality of optical ports and including an optically reflective surface; and

a second plurality of reflective microstructures formed on the first surface of said substrate, each said reflective microstructure of said second plurality of reflective microstructures being associated with one of the second plurality of optical ports and including an optically reflective surface;

each said reflective microstructure of said first plurality of reflective microstructures being positionable to orient its reflective surface to reflect an optical signal receivable from its associated optical port to the reflective surface of at least one of said reflective microstructures of said second plurality of reflective microstructures and to reflect an optical signal receivable from the reflective surface of at least one of said reflective microstructures of said second plurality of reflective microstructures to its associated optical port;

each said reflective microstructure of said second plurality of reflective microstructures being positionable to orient its reflective surface to reflect an optical signal receivable from the reflective surface of at least one of said reflective microstructures of said first plurality of reflective microstructures to its associated optical port and to reflect an optical signal receivable from its associated optical port to the reflective surface of at least one of said reflective microstructures of said first plurality of reflective microstructures;

wherein said first and second pluralities of reflective microstructures are arranged in a plurality of rows on said substrate and said reflective microstructures within an outer one of said rows are elevatable to a greater height from the first surface of said substrate than said reflective microstructures within an inner one of said rows.

71. An optical cross connect for switching an optical signal between a first plurality of optical ports and a second plurality of optical ports, the first and second pluralities of optical ports comprising optical fiber ends, said optical cross connect comprising:

a substrate having a first surface facing the first and second pluralities of optical ports;

a first plurality of reflective microstructures formed on the first surface of said substrate, each said reflective microstructure of said first plurality of reflective microstructures being associated with one of the first plurality of optical ports and including an optically reflective surface;

a second plurality of reflective microstructures formed on the first surface of said substrate, each said reflective microstructure of said second plurality of reflective microstructures being associated with one of the second plurality of optical ports and including an optically reflective surface;

each said reflective microstructure of said first plurality of reflective microstructures being positionable to orient its reflective surface to reflect an optical signal receivable from its associated optical port to the reflective surface of at least one of said reflective microstructures of said second plurality of reflective microstructures and to reflect an optical signal receivable from the reflective surface of at least one of said reflective microstructures of said second plurality of reflective microstructures to its associated optical port;

each said reflective microstructure of said second plurality of reflective microstructures being positionable to orient its reflective surface to reflect an optical signal receivable from the reflective surface of at least one of said reflective microstructures of said first plurality of reflective microstructures to its associated optical port and to reflect an optical signal receivable from its associated optical port to the reflective surface of at least one of said reflective microstructures of said first plurality of reflective microstructures;

a lid positionable between the optical ports and the first surface of said substrate, said lid being configured for permitting transmission of optical signals therethrough between each optical port and its associated reflective microstructure;

at least one plate attachable to said lid, said at least one plate including a plurality of holes within which the optical fiber ends are receivable formed on a side of said at least one plate facing away from the first surface of said substrate, the holes being arranged on said at least one plate to align the optical fiber ends with the reflective microstructures when said at least one plate is attached on said lid; and

an alignment structure configured to ensure correct alignment of said at least one plate on said lid when attaching said at least one plate to said lid, wherein said alignment structure comprises at least one of a notch, a groove, and a pin formed on at least one of said lid and said plate.

72. An optical cross connect for switching an optical signal between a first plurality of optical ports and a second plurality of optical ports, said optical cross connect comprising:

a substrate having a first surface facing the first and second pluralities of optical ports;

a first plurality of reflective microstructures formed on the first surface of said substrate, each said reflective microstructure of said first plurality of reflective microstructures being associated with one of the first plurality of optical ports and including an optically reflective surface;

a second plurality of reflective microstructures formed on the first surface of said substrate, each said reflective microstructure of said second plurality of reflective microstructures being associated with one of the second plurality of optical ports and including an optically reflective surface; and

an optically reflective area facing and spaced away from the first surface of said substrate, said optically reflective area being positioned between the first and second pluralities of optical ports to reflect an optical signal between the optically reflective surface of any one of said reflective microstructures of said first plurality of reflective microstructures and the optically reflective surface of any one of said reflective microstructures of said second plurality of reflective microstructures, wherein said optically reflective area is configured to modify optical properties of an optical signal reflected therefrom, said optical properties including polarization;

each said reflective microstructure of said first and second pluralities of reflective microstructures being positionable to orient its reflective surface to reflect an optical signal receivable from its associated optical port to the optically reflective area and to reflect an optical signal receivable from the optically reflective area to its associated optical port.

73. An optical cross connect switch, comprising:

a support;

a plurality of first input mirror microstructures disposed within a first row on a first side of a first reference axis;

a first pivot member for each of said input mirror microstructures, wherein each said first pivot member interconnects its corresponding said first input mirror microstructure with said support, and wherein each said first pivot members is of a first length;

a plurality of second input mirror microstructure disposed within a second row on said first side of said first reference axis in second relation to said first row such that said first row is disposed between second row and said first reference axis;

a second pivot member for each of said second input mirror microstructure, wherein each said second pivot member interconnects its corresponding said second input mirror microstructure with said support, and wherein each said pivot member is of a second length;

a plurality of first output mirror microstructure disposed within a third row on a second side of said first reference axis that is opposite said first side;

a third pivot member for each of said first output mirror microstructure, wherein each said third pivot member interconnects its corresponding said first output mirror microstructure with said support, and wherein each said third pivot member is of a third length;

a plurality of second output mirror microstructure disposed within a fourth row on said second side of said first reference axis in spaced relation to said third row such that said third row is disposed between said fourth row and said first reference axis; and

a fourth pivot member for each of said second output mirror microstructure, wherein each said fourth pivot member interconnects its corresponding said second output mirror microstructure with said support, and wherein each said fourth pivot member is of a fourth length;

wherein said second length is greater than said first length and wherein said fourth length is greater than said third length.

74. An optical cross connect switch, comprising:

a support having a surface;

a plurality of first input mirror microstructures disposed within a first row on a first side of a first reference axis defined on the surface of said support;

a first pivot member for each of said input mirror microstructures, wherein each said first pivot member interconnects its corresponding said input mirror microstructure with said support, wherein said first input pivot members in said first row are disposed in non- parallel relation;

a plurality of output mirror microstructures disposed within a second row on a second side of said first reference axis that is opposite said first side; and

a first output pivot member for each of said output mirror microstructures, wherein each said first output pivot member interconnects its corresponding said output mirror microstructure with said support, wherein said first output pivot members in said second row are disposed in non-parallel relation.