Segmented contactor
First Claim
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1. A method of fabricating a segmented contactor comprising:
- forming a contactor unit having electrically conductive areas to contact conductive areas of a device on a wafer to enable testing the device;
testing electrically said contactor unit; and
assembling said contactor input which passed said testing with a substrate tat supports another contactor unit to form said segmented contactor, wherein the step of assembling comprises;
providing an assembly fixture including a plate defining a contactor position;
placing said contactor unit having a first side and a second side into said contactor position with said first side facing said plate; and
attaching the second side of said contactor unit to said substrate.
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Abstract
A method of fabricating a large area, multi-element contactor. A segmented contactor is provided for testing semiconductor devices on a wafer that comprises a plurality of contactor units mounted to a substrate. The contactor units are formed, tested, and assembled to a backing substrate. The contactor units may include leads extending laterally for connection to an external instrument such as a burn-in board. The contactor units include conductive areas such as pads that are placed into contact with conductive terminals on devices under test.
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Citations
40 Claims
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1. A method of fabricating a segmented contactor comprising:
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forming a contactor unit having electrically conductive areas to contact conductive areas of a device on a wafer to enable testing the device;
testing electrically said contactor unit; and
assembling said contactor input which passed said testing with a substrate tat supports another contactor unit to form said segmented contactor, wherein the step of assembling comprises;
providing an assembly fixture including a plate defining a contactor position;
placing said contactor unit having a first side and a second side into said contactor position with said first side facing said plate; and
attaching the second side of said contactor unit to said substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
applying an adhesive on said second side of said contactor unit; and
pressing said substrate onto said adhesive to attach said contactor unit to said substrate.
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9. The method of claim 1 wherein said plate defines grooves and the method further comprising inserting guide blocks into said grooves to define said contactor position between said guide blocks.
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10. The method of claim 1 wherein said first side of said contactor unit includes a plurality of conductive areas.
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11. A method of fabricating a segmented contactor comprising:
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forming a plurality of contactor units on a single contactor substrate, the contactor units having electrically conductive areas to contact conductive areas of devices on a wafer to enable testing the devices;
testing electrically each of said contactor units;
separating each of said contactor units from said single contactor substrate; and
assembling said contactor units which have passed said testing to form said segmented contactor, wherein the step of assembling comprises;
providing an assembly fixture including a plate defining contactor positions;
placing one of said contactor units having a first side and a second side into a corresponding one of said contactor positions with said first side facing said plate; and
attaching a backing substrate to the second side of said contactor unit. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24)
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25. The method of fabricating a segmented contactor comprising:
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forming a plurality of contactor units on a single contactor substrate, wherein the contactor units have electrically conductive areas to contact conductive areas of devices on a wafer to enable testing the devices;
attaching a plurality of electrically conductive leads to one of said plurality of contactor units, wherein said plurality of electrically conductive leads extend horizontally beyond an edge of said one of said plurality of contactor units to enable connecting the leads to an external testing device;
testing each of said contactor units;
separating each of said contactor units from said single contactor substrate; and
assembling said contactor units which have passed said testing to form said segmented contactor, wherein said step of assembling comprises;
providing an assembly fixture including a plate defining contactor positions;
placing one of said contactor units having a first side and a second side into a corresponding one of said contactor positions with said first side facing said plate; and
attaching a backing substrate to the second side of the contactor unit. - View Dependent Claims (26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40)
applying adhesive on said second side of said contactor unit; and
pressing the backing substrate onto said adhesive to attach said contactor unit to said backing substrate.
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39. The method of claim 25 wherein said plate defines grooves and the method further comprising inserting guide blocks into said grooves to define said contactor positions between said guide blocks.
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40. The method of claim 25 wherein said first side of said contactor unit includes the conductive areas.
Specification