Substrate processing using a member comprising an oxide of a group IIIB metal

• US 6,641,697 B2
• Filed: 10/24/2001
• Issued: 11/04/2003
• Est. Priority Date: 07/29/1998
• Status: Expired due to Term

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Lu, Danny, Yuan, Jie, Shih, Hong, Han, Nianci, Ma, Diana
• Primary Examiner(s): Hassanzadeh, Parviz
• Application Number:
  US10/083,738
• Publication Number:
  US 20020100554A1
• Time in Patent Office: 741 Days
• Field of Search: 156/345.1, 156/345.48, 156/345.47, 118/723.I, 118/715, 118/716, 118/723.E, 501/127, 501/152
• US Class Current: 156/345.1
• CPC Class Codes: H01J 37/321 the radio frequency energy being inductively coupled to the plasma
• CPC Class Codes: H01J 37/32467 Material
• CPC Class Codes: H01J 37/32642 Focus rings
• CPC Class Codes: Y10S 156/914 Differential etching apparatus including particular materials of construction

Abstract

An erosion resistant member that may be used in the processing of a substrate in a plasma of a processing gas, comprises at least a portion that may be exposed to the plasma of the processing gas and that contains more than about 3% by weight of an oxide of a Group IIIB metal. The portion may also further contain a ceramic compound selected from silicon carbide, silicon nitride, boron carbide, boron nitride, aluminum nitride, aluminum oxide, and mixtures thereof.

Claims

1. An erosion resistant member that is used in the processing of a substrate in a plasma of a processing gas, the member comprising at least a portion that is exposed to the plasma of the processing gas, said portion comprising more than about 3% by weight of an oxide of a Group IIIB metal.

2. A member according to claim 1 wherein the portion of the member comprises more than about 5% by weight of the oxide of the Group IIIB metal.

3. A member according to claim 1 wherein the portion of the member comprises less than about 60% by weight of the oxide of the Group IIIB metal.

4. A member according to claim 1 wherein the oxide of the Group IIIB metal comprises yttrium oxide.

5. A member according to claim 1 wherein the oxide of the Group IIIB metal consists essentially of yttrium oxide.

6. A member according to claim 1 wherein the portion of the member further comprises a ceramic compound selected from silicon carbide, silicon nitride, boron carbide, boron nitride, aluminum nitride, aluminum oxide, and mixtures thereof.

7. A member according to claim 6 wherein the portion of the member comprises less than about 95% by weight of the ceramic compound.

8. A member according to claim 6 wherein the ceramic compound comprises aluminum oxide.

9. A member according to claim 6 wherein the ceramic compound consists essentially of aluminum oxide.

10. A member according to claim 1 wherein the member is a dielectric member.

11. A member according to claim 1 wherein the member is a process kit.

12. A member according to claim 1 wherein the portion of the member comprises more than about 10% by weight of the oxide of the Group IIIB metal.

13. An erosion resistant member that is used in the processing of a substrate in a plasma of an etchant gas, the member comprising at least a portion that is exposed to the plasma of the etchant gas, said portion comprising (i) more than about 3% by weight of yttrium oxide and (ii) aluminum oxide.

14. A member according to claim 13 wherein the portion of the member comprises less than about 60% by weight of the yttrium oxide.

15. A member according to claim 13 wherein the portion of the member comprises less than about 95% by weight of the aluminum oxide.

16. A member according to claim 13 wherein the portion of the member consists essentially of yttrium oxide and aluminum oxide.

17. A member according to claim 13 wherein the member is a dielectric member.

18. A member according to claim 13 wherein the member is a process kit.

19. A member according to claim 13 wherein the portion of the member comprises more than about 10% by weight the oxide of the Group IIIB metal.