Apparatus and method(s) for reducing the effects of coherent artifacts in an interferometer

• US 6,643,024 B2
• Filed: 05/03/2001
• Issued: 11/04/2003
• Est. Priority Date: 05/03/2001
• Status: Active Grant

• Current Assignee: Zygo Corporation (Ametek Incorporated)
• Original Assignee: Zygo Corporation (Ametek Incorporated)
• Inventors: Stephenson, David, Gratix, Edward J., Deck, Leslie L., Zanoni, Carl A.
• Primary Examiner(s): Font, Frank G.
• Assistant Examiner(s): LEE, HWA S
• Application Number:
  US09/848,055
• Publication Number:
  US 20030043380A1
• Time in Patent Office: 915 Days
• Field of Search: 356/450, 356/496, 356/498, 356/503, 356/504, 356/505, 356/513, 356/515
• US Class Current: 356/496
• CPC Class Codes: G01B 9/0201 using temporal phase variation
• CPC Class Codes: G01B 9/02022 contacting one object by grazing incidence
• CPC Class Codes: G01B 9/02034 characterised by particularly shaped beams or wavefronts
• CPC Class Codes: G01B 9/02057 by using common path configuration, i.e. reference and object path almost entirely overlapping
• CPC Class Codes: G01B 9/02069 Synchronization of light source or manipulator and detector
• CPC Class Codes: G01B 9/02082 Caused by speckles
• CPC Class Codes: G02B 27/48 Laser speckle optics

Abstract

Interferometric apparatus and methods for reducing the effects of coherent artifacts in interferometers. Fringe contrast in interferograms is preserved while coherent artifacts that would otherwise be present in the interferogram because of coherent superposition of unwanted radiation generated in the interferometer are suppressed. Use is made of illumination and interferogrammetric imaging architectures that generate individual interferograms of the selected characteristics of a test surface from the perspective of different off-axis locations of illumination in an interferometer and then combine them to preserve fringe contrast while at the same time arranging for artifacts to exist at different field locations so that their contribution in the combined interferogram is diluted.

Claims

1. An interferometric apparatus having an optical axis, said interferometric apparatus comprising:

means for locating an object to be measured along the optical axis;

an optical arrangement adapted to at least in part cooperate with an object to form an interferometer and facilitate the generation of interfering wavefronts in which phase information about the object is encoded; and

means for directing radiation onto the object to be measured from at least two different locations that are distant from said optical axis to generate interfering wavefronts corresponding to each of said locations where each wavefront contains substantially identical phase information about the object from said interferometer,

wherein said radiation directing means comprises a radiation source and at least one optical component for receiving radiation from said radiation source and forming at least one thin ring of illumination all points of which are distant from said optical axis such that said two locations are encompassed by said thin ring of illumination, said radiation source comprising a light source and a holographic diffuser element illuminated by said focused light source to form said thin ring of illumination.

2. The interferometric apparatus of claim 1 wherein said holographic diffuser element is mounted for movement along said optical axis to selectively change the radius of said thin ring.

3. The interferometric apparatus of claim 1 wherein said holographic diffuser is mounted for movement transverse to said optical axis between a first position in which said thin ring of illumination is formed and a second position in which said holographic diffuser is out of the path of illumination provided by said light source.

4. An interferometric apparatus having an optical axis, said interferometric apparatus comprising:

means for locating an object to be measured along the optical axis;

an optical arrangement adapted to at least in part cooperate with an object to form an interferometer and facilitate the generation of interfering wavefronts in which phase information about the object is encoded; and

means for directing radiation onto the object to be measured from at least two different locations that are distant from said optical axis to generate interfering wavefronts corresponding to each of said locations where each wavefront contains substantially identical phase information about the object from said interferometer,

wherein said means for directing radiation comprises a point source and an arrangement for optically rotating said point source around said optical axis at a predetermined rate such that radiation emanating from said point source appears to be originating from said two different locations, said arrangement comprising a pair of serially arranged acousto-optic modulators.

5. An interferometric apparatus having an optical axis, said interferometric apparatus comprising:

means for locating an object to be measured along the optical axis;

an optical arrangement adapted to at least in part cooperate with an object to form an interferometer and facilitate the generation of interfering wavefronts in which phase information about the object is encoded; and

means for directing radiation onto the object to be measured from at least two different locations that are distant from said optical axis to generate interfering wavefronts corresponding to each of said locations where each wavefront contains substantially identical phase information about the object from said interferometer,

wherein said means for directing radiation comprises a point source and an arrangement for optically rotating said point source around said optical axis at a predetermined rate such that radiation emanating from said point source appears to be originating from said two different locations, said arrangement comprising a pair of serially arranged electro-optic modulators.

6. An interferometric apparatus having an optical axis, said interferometric apparatus comprising:

means for locating an object to be measured along the optical axis;

an optical arrangement adapted to at least in part cooperate with an object to form an interferometer and facilitate the generation of interfering wavefronts in which phase information about the object is encoded; and

means for directing radiation onto the object to be measured from at least two different locations that are distant from said optical axis to generate interfering wavefronts corresponding to each of said locations where each wavefront contains substantially identical phase information about the object from said interferometer,

wherein said means for directing radiation comprises a point source and a fiber face plate having an input end for accepting radiation from said point source and an output end arranged so that radiation emanating from said point source appears to be originating from said two different locations.

7. The interferometric apparatus of claim 6 wherein said output end of said fiber face plate is arranged so that the output therefrom is in the form of at least one ring.

8. An interferometric apparatus having an optical axis, said interferometric apparatus comprising:

means for locating an object to be measured along the optical axis;

an optical arrangement adapted to at least in part cooperate with an object to form an interferometer and facilitate the generation of interfering wavefronts in which phase information about the object is encoded; and

means for directing radiation onto the object to be measured from at least two different locations that are distant from said optical axis to generate interfering wavefronts corresponding to each of said locations where each wavefront contains substantially identical phase information about the object from said interferometer,

wherein said means for directing radiation toward an object comprises means for assuring that radiation emanating from said two locations is substantially mutually incoherent with respect to one another.

9. The interferometric apparatus of claim 8 wherein said means for assuring that radiation emanating from said two locations is substantially mutually incoherent with respect to one another comprises at least one rotating diffuser positioned along the optical axis.

10. An interferometric method for use with an interferometer having an optical axis, said interferometric method comprising the steps of:

locating an object to be measured along the optical axis;

providing an optical arrangement adapted to at least in part cooperate with an object to form an interferometer and facilitate the generation of interfering wavefronts in which phase information about the object is encoded; and

directing radiation onto the object to be measured from at least two different locations that are distant from said optical axis to generate interfering wavefronts corresponding to each of said locations where each wavefront contains substantially identical phase information about the object from said interferometer,

wherein said radiation directing step comprises forming at least one thin ring of illumination all points of which are distant from said optical axis such that said two locations are encompassed by said thin ring of illumination, said thin ring of illumination being formed by directing light onto a holographic diffuser element.

11. The interferometric method of claim 10 further including the step of moving said holographic diffuser element along said optical axis to selectively change the radius of said thin ring.

12. The interferometric method of claim 10 further including the step of moving said holographic diffuser element transverse to said optical axis between a first position in which said thin ring is formed and a second position in which said holographic diffuser is out of the path of illumination provided by said directed light.

13. An interferometric method for use with an interferometer having an optical axis, said interferometric method comprising:

locating an object to be measured along the optical axis;

providing an optical arrangement adapted to at least in part cooperate with an object to form an interferometer and facilitate the generation of interfering wavefronts in which phase information about the object is encoded; and

directing radiation onto the object to be measured from at least two different locations that are distant from said optical axis to generate interfering wavefronts corresponding to each of said locations where each wavefront contains substantially identical phase information about the object from said interferometer,

wherein said step of directing radiation toward an object comprises the further step of assuring that radiation emanating from said two locations is substantially mutually incoherent with respect to one another.

14. The interferometric method of claim 13 wherein said step for assuring that radiation emanating from said two locations is substantially mutually incoherent with respect to one another comprises rotating at least one diffuser positioned along the optical axis.