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Piezoelectric/electrostrictive device and method of manufacturing same

  • US 6,643,902 B2
  • Filed: 01/04/2002
  • Issued: 11/11/2003
  • Est. Priority Date: 10/01/1999
  • Status: Expired due to Fees
First Claim
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1. A method for producing a piezoelecuic/electrostrictive device comprising:

  • forming a pair of mutually opposing thin plate sections;

    forming a fixation section for supporting said thin plate sections;

    forming one or more piezoelectric/electrostrictive elements arranged on at least one thin plate section of said pair of thin plate sections;

    forming a hole formed by both inner walls of said pair of thin plate sections and an inner wall of said fixation section; and

    forming a movable section having a cutout at an end of said thin plate sections by cutting off a predetermined part after producing at least said piezoelecuic/electrostrictive element on said thin plate section.

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