Flow-rate detecting device for heat-sensitive type flow sensor
First Claim
1. A flow-rate detecting device for a heat-sensitive type flow sensor, comprising:
- a planar substrate having first and second through-holes formed therein in juxtaposition with each other;
an insulative supporting film formed over one major surface of said substrate so as to cover said through-holes;
a fluid temperature measuring resistor formed by a heat-sensitive resistor film deposited at a location of said first through-hole on said supporting film oppositely to said substrate;
a heat generating resistor formed of a heat-sensitive resistance film deposited at a location of said second through-hole on said supporting film oppositely to said substrate;
an insulative protection film deposited so as to cover said fluid temperature measuring resistor and said heat generating resistor; and
a non-metallic reinforcing film provided for said fluid temperature measuring resistor, said reinforcing film being not provided for said heat generating resistor, wherein flow rate or alternatively flow speed of a fluid is measured on the basis of phenomenon of heat transfer to said fluid from said heat generating resistor.
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Abstract
A flow-rate detecting device for a heat-sensitive type flow sensor having high reliability. The device includes a planar substrate having first and second through-holes formed therein in juxtaposition with each other, an insulative supporting film formed over one major surface of the substrate so as to cover the through-holes, a fluid temperature measuring resistor formed by a heat-sensitive resistor film deposited at a location of the first through-hole on the supporting film oppositely to the substrate, a heat generating resistor formed of a heat-sensitive resistance film deposited at a location of the second through-hole on the supporting film oppositely to the substrate, an insulative protection film deposited so as to cover the fluid temperature measuring resistor and the heat generating resistor, and a reinforcing film provided for the fluid temperature measuring resistor. The reinforcing film is not provided for the heat generating resistor. Flow rate or alternatively flow speed of a fluid is measured by taking advantage of phenomenon of heat transfer to the fluid from the heat generating resistor.
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Citations
6 Claims
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1. A flow-rate detecting device for a heat-sensitive type flow sensor, comprising:
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a planar substrate having first and second through-holes formed therein in juxtaposition with each other;
an insulative supporting film formed over one major surface of said substrate so as to cover said through-holes;
a fluid temperature measuring resistor formed by a heat-sensitive resistor film deposited at a location of said first through-hole on said supporting film oppositely to said substrate;
a heat generating resistor formed of a heat-sensitive resistance film deposited at a location of said second through-hole on said supporting film oppositely to said substrate;
an insulative protection film deposited so as to cover said fluid temperature measuring resistor and said heat generating resistor; and
a non-metallic reinforcing film provided for said fluid temperature measuring resistor, said reinforcing film being not provided for said heat generating resistor, wherein flow rate or alternatively flow speed of a fluid is measured on the basis of phenomenon of heat transfer to said fluid from said heat generating resistor. - View Dependent Claims (2, 3, 4, 5, 6)
wherein said reinforcing film is deposited at a location of said first through-hole on a surface of said protection film oppositely to said fluid temperature measuring resistor. -
3. A flow-rate detecting device for a heat-sensitive type flow sensor according to claim 1,
wherein said reinforcing film is deposited at a location of said first through-hole on a back surface of said supporting film oppositely to said fluid temperature measuring resistor. -
4. A flow-rate detecting device for a heat-sensitive type flow sensor according to claim 1,
wherein said reinforcing film is formed of a heat-sensitive resistance film disposed around said fluid temperature measuring resistor. -
5. A flow-rate detecting device for a heat-sensitive type flow sensor according to claim 1,
wherein said reinforcing film is so formed as to be embedded in said supporting film at a location of said first through-hole. -
6. A flow-rate detecting device for a heat-sensitive type flow sensor according to claim 1,
wherein said reinforcing film is so formed as to be embedded in said protection film at a location of said first through-hole.
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Specification