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Fluid supply arrangment for a micro-electromechanical device

  • US 6,644,793 B2
  • Filed: 12/02/2002
  • Issued: 11/11/2003
  • Est. Priority Date: 10/16/1998
  • Status: Expired due to Fees
First Claim
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1. A fluid supply arrangement for a micro-electromechanical device, the fluid supply arrangement comprisinga fluid supply unit that is connectable to the micro-electromechanical device with a suitable fluid distribution device, the fluid supply unit having a housing that defines at least one elongate storage chamber, for holding fluid for supply to said fluid distribution device, and a series of baffles spaced along the storage chamber and extending transversely so that consecutive baffles and the housing define a series of chamber portions, each chamber portion being in fluid communication with respective fluid inlets of the fluid distribution device.

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