Wide or multiple frequency band ultrasound transducer and transducer arrays

• US 6,645,150 B2
• Filed: 01/07/2002
• Issued: 11/11/2003
• Est. Priority Date: 01/05/2001
• Status: Expired due to Fees

• Current Assignee: Bjorn A.J. Angelsen, Tonni F. Johansen
• Original Assignee: Bjorn A.J. Angelsen, Tonni F. Johansen
• Inventors: Angelsen, Bjorn A. J., Johansen, Tonni F.
• Primary Examiner(s): Jaworski, Francis J.
• Application Number:
  US10/041,311
• Publication Number:
  US 20020156379A1
• Time in Patent Office: 673 Days
• Field of Search: 600/443, 600/447, 600/458, 600/459, 303/20--22, 303/34, 303/36, 303/45, 303/48
• US Class Current: 600/459
• CPC Class Codes: B06B 1/0614 for generating several frequencies
• CPC Class Codes: G10K 11/02 Mechanical acoustic impedances; Impedance matching, e.g. by horns; Acoustic resonators
• CPC Class Codes: H04R 17/00 Piezoelectric transducers; Electrostrictive transducers piezoelectric or electrostrictive elements in general H10N30/00; details of piezoelectric or electrostrictive motors, generators or positioners H10N30/00

Abstract

Ultrasound bulk wave transducers and bulk wave transducer arrays for wide band or multi frequency band operation, in which the bulk wave is radiated from a front surface and the transducer is mounted on a backing material with sufficiently high absorption that reflected waves in the backing material can be neglected. The transducer is formed of layers that include a high impedance section comprised of at least one piezoelectric layer covered with electrodes to form an electric port, and at least one additional elastic layer, with all of the layers of the high impedance section having substantially the same characteristic impedance to yield negligible reflection between the layers. The transducer further includes a load matching section comprised of a set of elastic layers for impedance matching between the high impedance section and the load material and, optionally, impedance matching layers between the high impedance section and the backing material for shaping the transducer frequency response. For multiband operation, the high impedance section includes multiple piezoelectric layers covered with electrodes to form multiple electric ports that can further be combined by electric parallel, anti-parallel, serial, or anti-serial galvanic coupling to form electric ports with selected frequency transfer functions. Each electric port may be separately transceiver-connected to obtain parallel, anti-parallel, serial or anti-serial port coupling for multi-band transmission, and extremely wide-band reception.

Claims

1. An ultrasound bulk wave transducer for transmission and reception of ultrasound pulses in one of a wide band and multiple bands of frequencies, where the ultrasound is radiated from a front face of the transducer and in a thickness direction normal to the radiating front face, comprising:

a high impedance section composed of multiple, stacked layers with at least one piezoelectric layer and at least one additional elastic layer, the at least one piezoelectric layer having a front face and a back face that are covered with conducting electrodes to form two connections for at least one electric layer port, the layers having characteristic impedances so close to each other that the total thickness of the high impedance section defines the thickness resonance frequencies of the high impedance section with open electric ports of the piezoelectric layers,

a back face of the high impedance section being acoustically connected to a backing material and optionally through a back impedance matching section comprised of a stack of at least one elastic layer, the backing material having a sufficiently large acoustic absorption that reflected waves in the backing material can be neglected,

a front face of the high impedance section being acoustically connected to a load material through a load matching section composed of a set of elastic layers, the characteristic impedance of the layers of the load matching section lying between that of the high impedance section and of the load material with monotonously falling values from the high impedance section towards the load material, and

at least one electric layer port being used for electro-acoustic coupling to vibrations of the transducer radiating front face at frequencies at which the thickness of the high impedance section is substantially larger than half a wave length.

2. An ultrasound transducer according to claim 1, wherein the piezoelectric layers are based on a composite of a whole piezoelectric material and a polymer.

3. An ultrasound transducer according to claim 1, wherein at least one additional elastic layer of the high impedance section is an electrically unloaded piezoelectric layer.

4. An ultrasound transducer according to claim 1, wherein at least one additional elastic layer of the high impedance section is made of silicon.

5. An ultrasound transducer according to claim 1, wherein at least one additional elastic layer of the high impedance section is made of a glass or a glass composite.

6. An ultrasound transducer according to claim 1, wherein at least one additional elastic layer of the high impedance section is made of one of alloys and pure forms of one of tin, cadmium, beryllium, lead, bismuth, aluminum, and magnesium.

7. An ultrasound transducer according to claim 1, wherein at least one additional elastic layer of the high impedance section is electrically conducting and also functions as an electrode.

8. An ultrasound transducer according to claim 4 or 7, wherein at least one additional elastic layer of the high impedance section is highly doped silicon.

9. An ultrasound transducer according to claim 1, wherein at least one additional elastic layer of the high impedance section is made of a material with characteristic impedance close to that of the whole piezoelectric material, and the elastic layer is adhered to the whole piezoelectric material before dicing to form the piezoelectric/polymer composite, and the elastic layer is diced together with the piezoelectric layer to manufacture a composite of polymer and the piezoelectric/elastic layers with characteristic impedances close to each other.

10. An ultrasound transducer according to claim 1, wherein first a piezoelectric/polymer composite is made with a coarse distance between the dicing grooves, followed by application of at least one additional elastic layer on the piezoelectric/polymer material, followed by a final dicing of the layered elastic and piezoelectric/polymer structure with dicing grooves between the first dicing grooves, so that uneven relative volume fill of the piezoelectric/polymer and the elastic material/polymer is obtained, for matching the characteristic impedances of the piezoelectric/polymer and the elastic material/polymer composite layers to each other.

11. An ultrasound transducer according to claim 9 or 10, wherein at least one elastic layer is made of a conducting material that functions as electrodes connecting to piezoelectric posts.

12. An ultrasound transducer according to claim 9 or 10, wherein at least one elastic layer is deployed by electroplating onto a metallic layer on the piezoelectric layer before final dicing.

13. An ultrasound transducer according to claim 9 or 10, wherein at least one elastic layer is deployed by thick film printing onto the piezoelectric layer before final dicing.

14. An ultrasound transducer according to claim 9 or 10, wherein a final thickness of the elastic layer is obtained through etching.

15. An ultrasound transducer according to claim 9 or 10, wherein the added elastic layer can be etched, and the relative thickness of the posts of elastic and piezoelectric layers are reduced by etching after final dicing, for tuning of the relative magnitudes of the characteristic impedances of the elastic and piezoelectric layers.

16. An ultrasound transducer according to claim 9 or 10, wherein the added elastic layer can be electroplated, and the relative thickness of the posts of elastic and piezoelectric layers are increased by electroplating after final dicing, for tuning of the relative magnitudes of the characteristic impedances of the elastic and piezoelectric layers.

17. An ultrasound transducer according to claim 9 or 10, wherein tuning of the thickness of the posts of at least one of the elastic and piezoelectric layers are done by additional dicing, for tuning of the relative magnitudes of the characteristic impedances of the elastic and piezoelectric layers.

18. An ultrasound transducer according to claim 9 or 10, wherein at least one elastic layer is made of one of alloys or pure materials of one of gold, iron, copper, silver, brass, cast iron, zirconium, zinc, titanium, germanium, gallium arsenide, tin, cadmium, beryllium, lead, bismuth, silicon, and aluminum.

19. An ultrasound transducer according to claim 9 or 10, wherein at least one of the load and back matching layers are adhered to the layers of the high impedance section before final dicing, followed by final dicing of all of the layers together, filling of the dice grooves with polymer material to form composites with polymer material to obtain piezoelectric/polymer, high impedance elastic/polymer, and impedance matching layer/polymer composites, optionally with different volume fills, so that the characteristic impedances of the said layers are tuned to transfer function requirements.

20. An ultrasound transducer according to claim 19, wherein the added elastic layer, and the load or back matching layers before dicing are made of a conducting material, and wherein a thin metal layer on top of the composite binds conducting posts together to form electrodes for the piezoelectric layers.

21. An ultrasound transducer according to claim 20, wherein the conducting material of the load and back matching layers is made of one of alloys and pure material of one of titanium, germanium, gallium arsenide, tin, cadmium, beryllium, lead, bismuth, silicon, aluminum, and magnesium.

22. An ultrasound transducer according to claim 19, wherein the added matching layers can be etched, and the relative thickness of posts of the matching, high impedance elastic and piezoelectric layers are reduced by etching after the final dicing, for tuning of the relative magnitudes of the characteristic impedances of the said layers to the transfer function requirements.

23. An ultrasound transducer according to claim 19, wherein the added matching layers can be electroplated, and the relative thickness of posts of the matching, high impedance elastic and piezoelectric layers are increased by electroplating after the dicing, for tuning of the relative magnitudes of the characteristic impedances of said layers to the transfer function requirements.

24. An ultrasound transducer according to claim 19, wherein tuning of the thickness of posts of one of the matching, high impedance elastic layers and the piezoelectric layers are done by additional dicing, for tuning of the relative magnitudes of the characteristic impedances of said layers to the transfer function requirements.

25. An ultrasound transducer according to claim 1, wherein at least one of the load and back matching layers are made of one of a glass and a glass/solid particle composite.

26. An ultrasound transducer according to claim 1, wherein at least one of the load or back matching layers are made of a composite of solid particles and a polymer material.

27. An ultrasound transducer according to claim 1, wherein at least one of the load or back matching layers are made of one of alloys and pure materials of one of silicon, aluminum, and magnesium.

28. An ultrasound transducer according to claim 1, wherein the front layer of the back impedance matching section is electrically conducting and in electrical contact with the back piezoelectric layer so that it functions as the back electrode of the back piezoelectric layer.

29. An ultrasound transducer according to claim 28, wherein the front layer of the back matching section is made of one of alloys and pure material of one of bismuth, lead, beryllium, cadmium, tin, gallium arsenide, germanium, titanium, zinc, zirconium, silver, copper, gold, platinum, and tungsten.

30. An ultrasound transducer according to claim 1, wherein the high impedance section is composed of more than one piezoelectric layer covered with electrodes to form multiple electric layer ports for electro-acoustic coupling into a load material in different frequency bands.

31. An ultrasound transducer according to claim 30, wherein electric layer ports are combined into electric resultant ports through direct galvanic connection of the electrodes of the layer ports that are combined to produce one of serial, anti-serial, parallel, and anti-parallel couplings of the layer ports, determined by a polarization direction of the piezoelectric layers and the connection of the electrodes.

32. An ultrasound transducer according to claim 31, wherein the electric resultant ports are more than one, and at least one of the resultant ports provides effective transduction bands at frequencies at which the thickness of the high impedance section is substantially larger than half a wave length.

33. An ultrasound transducer according to claim 30 or 32, wherein active electric ports are combined through electric connection of the electrodes through electronically controllable switches, for electronic selection of electrical combination of the active ports to produce one of serial, anti-serial, parallel, and anti-parallel couplings of the layer ports.

34. An ultrasound transducer according to claim 33,

wherein the number of active electric ports is two, defined as a front port closest to the acoustic load and a back port closest to the backing,

wherein the back port provides efficient electro-acoustic transduction at frequencies at which the thickness of the high impedance section is substantially larger than half a wave length so that the back port is efficient in a high frequency band, and

wherein a low frequency electric port is obtained by electrical serial or electrical parallel coupling of the front and the back ports.

35. An ultrasound transducer according to claim 34, wherein electrical serial coupling of the front and the back ports is obtained with the same polarization directions of the front and the back piezoelectric layers, and wherein a signal is connected between the front electrode of the front port and the back electrode of the back port.

36. An ultrasound transducer according to claim 34, wherein electrical parallel coupling of the front and back ports is obtained with opposite polarization directions of the front and the back piezoelectric layers, and electric connections between the front electrode of the front port and the back electrode of the back port, and middle electrodes of the front port and the back port, and the signal is connected between the front and back electrodes and the middle electrodes of the front and the back ports.

37. An ultrasound transducer according to claim 34, wherein the two active ports are electrically one of anti-parallel and anti-serial combined to form a high frequency electric port.

38. An ultrasound transducer array composed of a plurality of element transducers according to claim 1, said plural transducers being placed by side so that the element front faces form an optionally curved composite array radiating surface, and the electric ports of each element being connected to individual electronic transceiver systems, for electronic steering of array focus and optionally of beam direction.

39. An ultrasound transducer array according to claim 38, wherein at least one of the electrodes internally within the high impedance section is grounded and forms a continuous electrode between all of the plural element transducers throughout the array, for simplified ground connection to the at least one electrode for the whole array, and wherein the other electrodes of the ports connect through one of the front and back faces of the high impedance section and through sides of the high impedance section.

40. A two-dimensional ultrasound transducer array according to claim 39, wherein some of the front electrodes of the front electric ports connect to an instrument through the front elastic layer of the high impedance section, and optionally also through at least one layer of the load matching section, and some of the back electrodes of the back electric ports connect to the instrument through at least one optional back matching layer and optionally through the backing material, while the internal ground electrode extends continuously throughout the whole array.

41. An ultrasound transducer array according to claim 38 and that is encapsulated in a grounded, electrically conducting cage, electrically isolated from the signal electrodes of the transducer array.

47. An ultrasound transceiver system according to claim 42, including a transducer in accordance with claim 1.

53. An ultrasound transducer according to claim 1 and that is encapsulated in a grounded, electrically conducting cage, electrically isolated from signal electrodes of the transducer.

42. An ultrasound transceiver system, comprising:

an ultrasound bulk wave transducer with several electric ports coupling to a common acoustic front face port to define electro-acoustic ports, the transfer functions of the electro-acoustic ports having efficient operation in different frequency bands,

receive amplifiers selectively connected in receive mode to each electric port to provide receive signals with the transfer functions of the actual electro-acoustic ports, and

transmit amplifiers selectively connected to each electric port so that one in transmit mode can select the transmit signal on a selected electro-acoustic port for efficient transmission of ultrasound waves in a frequency band of the selected port, and so that one through selection of combined transmitter signals on at least two electric ports is able to obtain transfer functions of combined electro-acoustic ports combined as one of electric parallel, anti parallel, serial and anti-serial couplings of the ports, and so that one through selection of combined transmitter signals on at least two electric ports is operable to transmit composite signals with components in multiple frequency bands.

43. An ultrasound transceiver system according to claim 42, further comprising an additive signal combination unit that in receive mode combines the received signal from several electro-acoustic ports after the receiver amplifiers, optionally after filtering of signals, to provide receive signals in wide band or multiple frequency bands.

44. An ultrasound transceiver system according to claim 43, wherein the signal combination unit contains filters that provide multiple signals that have a harmonic frequency relation to each other, said frequency relation comprising frequency components in bands with one of a 1^st, a 2^nd, a 3^rd, and a 4^th harmonic relation to each other.

45. An ultrasound transceiver system according to claim 42, wherein the transducer is formed of several layered sections and wherein ultrasound is radiated from a front face and in the thickness direction normal to the radiating front face, further comprising:

a high impedance section comprised of multiple, stacked layers with characteristic impedances so close to each other that the section functions acoustically as a unit so that a total thickness of the high impedance section defines thickness resonance frequencies of the high impedance section with open electric ports,

a back face of the high impedance section being acoustically connected to a backing material, optionally through a back impedance matching section, the backing material having sufficiently large acoustic absorption so that reflected waves in the backing material can be neglected,

a front face of the high impedance section being acoustically connected to a load material through a load matching section comprised of a set of elastic layers,

the high impedance section being comprised of at least two piezoelectric layers with a front and a back face that are covered with conducting electrodes to form two connections of electric layer ports for each layer,

the electric layer ports being such that some of the ports perform efficient electro-acoustic coupling at frequencies at which the thickness of the high impedance section is substantially larger than half a wave length, and other port transfer functions are efficient at frequencies at which the thickness of the high impedance section is below half a wave length with a back impedance lower than a characteristic impedance of the high impedance section and below a quarter wave length with a back impedance higher than the characteristic impedance of the high impedance section.

46. An ultrasound transceiver system according to claim 45, wherein:

the electrodes from some electric layer ports are combined galvanically to form electric resultant ports in one of a series, parallel, anti-parallel and anti-series coupling of the involved layer ports,

the transfer functions of the electro-acoustic resultant ports having efficient operation in different frequency bands where at least one of the resultant port transfer functions is efficient at frequencies at which the thickness of the high impedance section is substantially larger than half a wave length, and at least one port transfer function is efficient at frequencies where the thickness of the high impedance section is below half a wave length with a back impedance lower than the characteristic impedance of the high impedance section and below a quarter wave length with a back impedance higher than the characteristic impedance of the high impedance section.

48. An ultrasound transceiver system according to one of claims 42 to 46, wherein the number of electric ports is two and defined as a front port closest to the load and a back port closest to the backing, and electrical polarization of the piezoelectric layers is arranged so that

transmit operation in a low frequency band through parallel coupling of the ports is obtained by driving the ports with the same voltage signal where the voltage polarity on each port is referred to the polarization direction of piezoelectric material of the each port,

transmit operation in a high frequency band through anti-parallel coupling of the ports is obtained by driving the ports with voltage signals of opposite polarity and the same form where the voltage polarity on each port is referred to the polarization direction of piezoelectric material of the each port,

transmit operation in a widest frequency band is obtained through a voltage drive signal at the back port with no drive signal on the front port,

transmit operation of combined signals with a combined low and high frequency band is obtained by driving the ports with voltage signals which are the sums of a low frequency signal that is equal on each port and one of a high frequency signal at one port only and high frequency signals that have opposite polarity on each port where the voltage polarity on each port is referred to the polarization direction of piezoelectric material of the each port.

49. An ultrasound array transceiver system, comprising a plurality of ultrasound tranceiver systems according to one of claims 42 to 46, and comprising ultrasound element transducers with multiple electric ports, the element transducers being placed side-by-side so that the element radiating front faces form an optionally curved composite array radiating surface, the electric ports of each element transducer being connected to individual electronic transceivers, for electronic steering of array focus and optionally of beam direction.

50. An ultrasound array transceiver system according to claim 49, wherein at least one of the electrodes internally within the high impedance section of the element transducers is grounded and the grounded electrode forms a continuous electrode between all of the element transducers throughout the array, for simplified connection of the at least one electrode to ground for the whole array.

51. An ultrasound array transceiver system according to claim 50, wherein each element transducer contains two electric ports sharing one common ground electrode situated internally within the high impedance section and extending throughout the array, and the other two electrodes of the ports connect through one of the front and back faces, and sides, of the high impedance section.

52. An ultrasound array transceiver system according to claim 50 or 51, wherein some of the front electrodes of the front electric ports connect to an instrument through an optionally elastic front layer of the high impedance section, and optionally also through at least one load matching layer, and wherein some of the back electrodes of the back electric ports connect to the instrument through one of at least one back matching layer and the backing material, and an internal ground electrode extends continuously throughout the whole array.