Method for producing layered structures on a substrate, substrate and semiconductor components produced according to said method

• US 6,645,833 B2
• Filed: 04/07/2000
• Issued: 11/11/2003
• Est. Priority Date: 06/30/1997
• Status: Expired due to Term

• Current Assignee: Max-Planck-Gesellschaft Zur Foerderung Der Wissenschaften e.V. (Max-Planck-Gesellschaft zur Frderung der Wissenschaften e)
• Original Assignee: Max-Planck-Gesellschaft Zur Foerderung Der Wissenschaften e.V. (Max-Planck-Gesellschaft zur Frderung der Wissenschaften e)
• Inventors: Brendel, Rolf
• Primary Examiner(s): Everhart, Caridad
• Assistant Examiner(s): MALSAWMA, LALRINFAMKIM HMAR
• Application Number:
  US09/447,000
• Publication Number:
  US 20030017712A1
• Time in Patent Office: 1,313 Days
• Field of Search: 438/409, 438/960, 438/531, 438/977, 438/149, 438/406, 438/408, 438/455, 438/758, 438/456, 438/458
• US Class Current: 438/458
• CPC Class Codes: H01L 21/76259 with separation/delamination along a porous layer
• CPC Class Codes: H01L 31/0236 Special surface textures
• CPC Class Codes: H01L 31/02363 of the semiconductor body itself, e.g. textured active layers
• CPC Class Codes: H01L 31/056 the light-reflecting means being of the back surface reflector [BSR] type
• CPC Class Codes: H01L 31/068 the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells
• CPC Class Codes: H01L 31/1804 comprising only elements of Group IV of the Periodic Table
• CPC Class Codes: Y02E 10/52 PV systems with concentrators
• CPC Class Codes: Y02E 10/547 Monocrystalline silicon PV cells
• CPC Class Codes: Y02P 70/50 Manufacturing or production processes characterised by the final manufactured product

Abstract

The invention relates to a method of manufacturing layer-like structures in which a material layer having hollow cavities, preferably a porous material layer, is produced on or out of a substrate consisting, for example, of monocrystalline p-type or n-type Si and in which the layer-like structure, or a part of it, is subsequently provided on the cavity exhibiting or porous material layer. The layer-like structure, or a part of it, is subsequently separated from the substrate using the layer having the hollow cavities, or porous layer, as a point of desired separation, for example through the production of a mechanical strain within or at a boundary surface of the cavity exhibiting or porous layer. The method is characterized in that the surface of the substrate is structured prior to the production of the porous layer, or in that the surface of the porous layer is structured.

Claims

1. A method of manufacturing a layer-like structure in which a cavity exhibiting or porous layer is produced on a crystalline semiconductor substrate and wherein the layer-like structure is subsequently provided on the cavity exhibiting or porous layer and is subsequently separated from the substrate using the cavity exhibiting or porous layer as a position of intended separation, the surface of the substrate being structured prior to the generation of the cavity exhibiting or porous layer and the structure of the surface of the substrate being preserved after separation of said layer-like structure from the cavity exhibiting or porous layer.

2. A method in accordance with claim 1, wherein the crystalline semiconductor substrate comprises at least one material selected from a group of materials comprising:

a monocrystalline p-type semiconductor, a monocrystalline n-type semiconductor, a polycrystalline p-type semiconductor, a polycrystalline n-type semiconductor, monocrystalline p-type silicon, monocrystalline n-type silicon, polycrystalline p-type silicon, and polycrystalline n-type silicon.

3. A method in accordance with claim 1, wherein the separation from the substrate using the cavity exhibiting or porous layer as a position of intended separation is performed by the generation of a mechanical strain within or at a boundary surface of the cavity exhibiting or porous layer.

4. A method in accordance with claim 3, wherein the generation of the mechanical strain acting within the cavity exhibiting or porous layer which leads to the separation of the layer-like structure, or of a part of it, from the substrate is produced by at least one of a group of methods comprising:

lifting the layer-like structure from the substrate, an ultrasonic treatment, the generation of strong thermal gradients, for example by current flow through the porous layer or by illumination from one side, and expansion or change of state of a fluid or solvent filled into the pores of the cavity exhibiting or porous layer.

5. A method in accordance with claim 1, wherein if structuring the surface of the substrate prior to the generation of the cavity exhibiting or porous layer, it is structured by at least one method, selected from a group of methods comprising:

by a photolithographic method, by an etch treatment, for example by a treatment of n- or p-silicon with KOH to produce random pyramids at the surface of the substrate, by a chemical method, by mechanical milling, and by laser treatment.

6. A method in accordance with claim 1, wherein if structuring the surface of the cavity exhibiting or porous layer, it is structured by at least one method, selected from a group of methods comprising:

by a photolithographic method, by an etch treatment, for example by a treatment of n- or p-silicon with KOH to produce random pyramids at the surface of the substrate, by a chemical method, by mechanical milling, by laser treatment, and by mechanical coining.

7. A method in accordance with claim 1, wherein the layer-like structure comprises one or more layers applied onto the surface of the cavity exhibiting or porous layer at least partly by an epitaxial method (homo-epitaxy or hetero-epitaxy) with at least one semiconductor layer belonging to the layer-like structure being applied onto the surface of the cavity exhibiting or porous layer by the epitaxial method.

8. A method in accordance with claim 1, wherein the layer-like structure is formed at least partly by the application or deposition of a metal layer which is applied to the layer-like structure by heating and surface diffusion.

9. A method in accordance with claim 8 wherein the metal layer is in the form of one of an aluminum foil or an aluminum sheet.

10. A method in accordance with claim 1, wherein the step of forming the layer-like structure includes the application of a dielectric layer on an exposed surface of said layer-like structure.

11. A method in accordance with claim 10, wherein said dielectric layer is a light-permeable window layer, formed by a Sol-gel process.

12. A method in accordance with claim 10, wherein said dielectric layer is a light-permeable window layer, applied to said exposed surface by an adhesive.

13. A method in accordance with claim 1, wherein a carrier layer is provided which is brought into connection with the layer-like structure by one of wafer bonding, or a diffusion brazing method, or is formed as a part of the layer-like structure.

14. A method in accordance with claim 13 wherein the carrier layer is connected to the layer-like structure by an easy bonding.

15. A method in accordance with claim 1, wherein after the separation of the layer-like structure from the substrate, a further structure is produced on or applied to a surface of the layer-like structure previously disposed adjacent the substrate.

16. A method in accordance with claim 15, wherein said surface previously disposed adjacent the substrate is at least one of cleaned or partly removed or newly structured or made porous prior to the production of the further structure.

17. A method in accordance with claim 1, wherein after the separation of the layer-like structure from the substrate at a fracture surface, corresponding to said position of intended fracture, the substrate is used again, with or without the remainder of the cavity exhibiting or porous layer, as a substrate for the application of another layer-like structure.

18. A method in accordance with claim 17, wherein with renewed use of the substrate, the substrate is subjected to a cleaning step.

19. A method in accordance with claim 18 wherein the cleaning step is carried out by one of etching or an ultrasonic cleaning process at said fracture surface.

20. A method in accordance with claim 1, wherein a further porous layer is produced on the surface of the layer-like structure remote from the substrate prior to or after separation of the layer-like structure from the substrate, and a further layer-like structure is formed on said further porous layer, whereby a plurality of layer-like structures arise above one another, which are respectively separated from an adjacent layer-like structure by a porous layer forming a position of intended fracture, wherein, after producing such a multiple structure, the individual layer-like structures are separated from one another by the production of a mechanical strain within the respective porous layer or by an anodizing process at a boundary surface of the respective porous layer.

21. A method in accordance with claim 20, wherein after the separation of the individual layer-like structures, further structures are produced on at least one of free surfaces of the respective layer-like structure.

22. A method in accordance with claim 20, wherein prior to the separation of the individual layer-like structures from the multiple structure, the individual layer-like structures are respectively provided with a carrier layer or secured to a carrier.

23. A method in accordance with claim 20, wherein respective further structures are grown by epitaxial methods onto the surfaces of the so formed layer-like structures originally facing towards the substrate.

24. A method in accordance with claim 1, wherein the total structure is dipped into an etching solution containing HF for the separation of the layer-like structure from the substrate, the etching solution penetrates the cavity exhibiting or porous material and holes are made available, whereby the porosity is increased in the cavity exhibiting or porous layer for the separation of the layer-like structure from the substrate.

25. A method in accordance with claim 24, wherein the initial porosity amounts to 5 to 50%.

26. A method in accordance with claim 25 wherein the initial porosity amounts to 10 to 20%.

27. A method in accordance with claim 26 wherein the initial porosity is increased to 100% for the carrying out of the separation.

28. A method for the manufacture of a substrate comprising a carrier layer and a porous layer of silicon or of another semiconductor material provided thereon, wherein a cylindrical bar consisting of a single crystal semiconductor material is continuously treated at its surface to produce a porous surface layer, a jacket surface of the bar being dipped during a rotation about the cylinder axis into an HF bath and an electrical potential drop is produced with corresponding flow of current from the bar to an electrode arranged in the HF bath, while the porous surface layer which is produced is continuously drawn off from the bar by a carrier layer which is continuously applied to the porous surface, and a layer-like structure is subsequently grown onto the porous surface layer.

29. A method in accordance with claim 28, wherein the drawn off layer is brought into a tube shape and subsequently converted by an epitaxial method into a monocrystalline tube.

30. A method in accordance with claim 28 wherein the layer-like structure is subsequently grown onto the porous surface layer onto a free-surface of the drawn off porous surface layer opposite to the carrier layer.

31. A method of manufacturing layer-like structures in which a cavity exhibiting or porous layer is produced on or from a substrate, wherein an uppermost layer of the cavity exhibiting or porous layer, is melted, at least in places, and is subsequently caused to solidify for the production of a single crystal non-porous layer and the solidified layer is subsequently separated from the substrate using the cavity exhibiting or porous layer, as a position of intended separation, or at a boundary surface of the cavity exhibiting or porous layer.

32. A method in accordance with claim 31, wherein the substrate comprises at least one material selected from a group of materials comprising:

a monocrystalline p-type semiconductor, a monocrystalline n-type semiconductor, a polycrystalline p-type semiconductor, a polycrystalline n-type semiconductor, monocrystalline p-type silicon, monocrystalline n-type silicon, polycrystalline p-type silicon, and polycrystalline n-type silicon.

33. A method in accordance with claim 31, wherein the melting of the uppermost layer of the cavity exhibiting or porous layer, or at least of places therein, is performed by at least one of a group comprising:

a laser beam, an electron beam, and a focused light beam.

34. A method in accordance with claim 31, wherein a layer like structure is grown onto the surface of the solidified layer prior to the separation of the solidified layer from the substrate.

35. A method in accordance with claim 31, wherein the total structure is dipped into an etching solution containing HF for the separation of the solidified layer from the substrate, the etching solution penetrates the cavity exhibiting or porous material and holes are made available, whereby the porosity is increased in the cavity exhibiting or porous layer for the separation of the solidified layer from the substrate.

36. A method in accordance with claim 35, wherein the initial porosity amounts to 5 to 50%.

37. A method in accordance with claim 36 wherein the initial porosity amounts to 10 to 20%.

38. A method in accordance with claim 37 wherein the initial porosity is increased to 100% for the carrying out of the separation.

39. A method in accordance with claim 31 wherein the production of a single crystal non-porous layer and the solidified layer is subsequently separated from the substrate using the cavity exhibiting or porous layer, as a position of independent separation, by the production of a mechanical strain within the cavity exhibiting or porous layer.

40. A method of producing a semiconductor circuit, using a method of manufacturing a layer-like structure in which a cavity exhibiting or porous layer is produced on a crystalline semiconductor substrate and wherein the layer-like structure is subsequently provided on the cavity exhibiting or porous layer and is subsequently separated from the substrate using the cavity exhibiting or porous layer as a position of intended separation, the surface of the substrate being structured prior to the generation of the cavity exhibiting or porous layer and the structure of the surface of the substrate being preserved after separation of said layer-like structure from the cavity exhibiting or porous layer wherein a shadow mask is arranged in front of the substrate during the manufacture of the layer-like structure and transverse to the transport direction of the atoms to be deposited and is used to control the growth of the layer-like structure.

41. A method in accordance with claim 40, wherein during the growth of a layer of the layer-like structure or between the growth of individual layers of the layer-like structure, a relative displacement is effected between the shadow mask and the substrate, in a first step, in a first position of the shadow mask, to produce a first layer with a trench between layer regions of a first conduction type and, in a subsequent step, in a further position of the shadow mask, to produce a second layer with an overlap between an edge region of a further layer of another conduction type and an exposed edge region of the layer of the first conductive type present adjacent to the trench, whereby the series connection is produced between two edge regions.

42. A method in accordance with claim 41 wherein the relative displacement is effected between the shadow mask and the substrate in parallel to the substrate.

43. A method in accordance with claim 41 wherein the two etch regions are two semiconductor elements formed by the layers on both sides of the trench.

44. A method in accordance with claim 40, wherein the shadow mask is formed from wires of any desired cross-sectional shape, the shadow mask is moved, from one side of the substrate to the other, in order to position new wire lengths forming the shadow mask in front of the substrate during the move.

45. A method in accordance with claim 44 wherein the shadow mask is periodically moved.

46. A method of manufacturing a substrate for semiconductor epitaxy, wherein a cavity exhibiting or porous layer is generated out of or applied onto a first substrate, a second substrate is applied onto a free surface of the cavity exhibiting or porous layer and subsequently separates the second substrate from the first substrate using the cavity exhibiting or porous layer as a position of intended fracture by the production of a mechanical strain such that a layer or sections of the cavity exhibiting or porous layer remains or remain adhered to the second substrate, whereby the second substrate can be used for epitaxial methods, wherein the first substrate or the cavity exhibiting or porous layer is structured prior to the separation of the second substrate from the first substrate, wherein the layer or sections of the cavity exhibiting or porous layer adhered to the second substrate is further prepared to form regions of porous material and regions which are free of porous material on said surface.

47. A method, in particular in accordance with claim 46, wherein said surface of said second substrate comprising regions of the cavity exhibiting or porous material is covered with a layer of amorphous silicon and the amorphous silicon is converted by a subsequent thermal treatment at positions where it covers said regions of cavity exhibiting or porous material into monocrystalline silicon, so that a desired pattern of amorphous silicon and monocrystalline silicon is present on the second substrate.

48. A method of manufacturing a substrate for semiconductor epitaxy, wherein a cavity exhibiting or porous layer is generated out of or applied onto a first substrate, a second substrate is applied onto a free surface of the cavity exhibiting or porous layer and subsequently separates the second substrate from the first substrate using the cavity exhibiting or porous layer as a position of intended fracture by the production of a mechanical strain such that a layer or sections of the cavity exhibiting or porous layer remains or remain adhered to the second substrate, whereby the second substrate can be used for epitaxial methods, wherein the total structure is dipped into an etching solution containing HF for the separation of the second substrate from the first substrate, the etching solution penetrates the cavity exhibiting or porous material and holes are made available, whereby the porosity is increased in the cavity exhibiting or porous layer for the separation of the second substrate from the first substrate.

49. Method in accordance with claim 48, wherein the initial porosity amounts to 5 to 50%.

50. A method in accordance with claim 49, wherein the initial porosity amounts to 10 to 20%.

51. A method in accordance with claim 50, wherein the initial porosity is increased to 100% for the carrying out of the separation.