Grating light valve with encapsulated dampening gas

• US 6,646,778 B2
• Filed: 08/01/2001
• Issued: 11/11/2003
• Est. Priority Date: 08/01/2001
• Status: Active Grant

• Current Assignee: Silicon Light Machines Corporation (SCREEN Holdings Co., Ltd.)
• Original Assignee: Silicon Light Machines Corporation (SCREEN Holdings Co., Ltd.)
• Inventors: Gudeman, Chris, Shook, James Gill
• Primary Examiner(s): Dang, Hung Xuan
• Assistant Examiner(s): TRA, TUYEN Q
• Application Number:
  US09/921,266
• Publication Number:
  US 20030025984A1
• Time in Patent Office: 832 Days
• Field of Search: 359/290, 359/291, 359/292, 359/293, 359/295, 359/230, 359/231, 359/223, 359/224, 359/566, 359/572, 359/573
• US Class Current: 359/291
• CPC Class Codes: G02B 26/0808 by means of one or more diffracting elements

Abstract

An optical MEM device is encapsulated with a dampening gas to reduce oscillatory vibrations of movable parts during the operation of the device. Preferably, the dampening gas comprises one or more noble gases, such as neon and/or krypton with a partial pressure in a range of 50 to 100% of the total dampening gas pressure. In further embodiments, the dampening gas comprises a mixture of one or more noble gases and an inert carrier gas, such as nitrogen. Preferably, the optical MEM device is sealed within a die with a dampening gas pressure between 0.5 to 3.0 atmospheres at 20 degree Celsius. The current invention is particularly useful for reducing oscillatory vibrations of optical MEM devices having a plurality of movable ribbon structures configured to modulate light with one or more wavelengths in the near infrared (800 to 4000 nanometers) and which operate at high switching rates (4-40 Volts/nano second) and at high switching frequencies (1 kHz and greater).

Claims

1. An apparatus comprising a grating light valve for modulating a light source having wavelength λ

, wherein the grating light valve is encapsulated with a dampening gas environment and comprises a plurality of spatially arranged movable ribbons with reflective top surfaces and reflective substrate surfaces and wherein the dampening gas environment comprising a noble group VIII element for reducing oscillatory vibrations of the movable ribbons as the movable ribbons are switched between the conditions for constructive and destructive interference.

2. The apparatus of claim 1, further comprising a die structure for encapsulating the grating light valve within the dampening gas environment.

3. The apparatus of claim 1, wherein the dampening gas environment comprises Krypton gas with a partial pressure in a range of 50 to 100% of the total pressure of the dampening gas environment.

4. The apparatus of claim 1, wherein the dampening gas environment comprises Neon gas with a partial pressure in a range of 50 to 100% of the total pressure of the dampening gas environment.

5. The apparatus of claim 4, wherein the dampening gas environment further comprises an inert gas selected from a group consisting of He, Ar, Kr, Xe and Rn.

6. The apparatus of claim 1, wherein the movable ribbons are displaced by λ

/4 to alternate between the conditions for constructive and destructive interference.

7. The apparatus of claim 6, wherein λ

is between 800 and 4000 nanometers.

8. The apparatus of claim 1, wherein the grating light valve is configured to modulate the light source to activate a print medium.

9. The apparatus of claim 8, further comprising a lens for focusing the modulated light from the grating light valve to the print medium.

10. The apparatus of claim 1, further comprising a lens for focusing the incident light source on to the grating light valve.

11. A system comprising an array of grating light valves encapsulated within a dampening gas environment comprising Neon or Krypton gas with a partial pressure in a range 0.5 to 3 atmospheres at 20 degrees Celsius.

12. The system of claim 11, wherein the Neon gas is 50 to 100% of the total dampening gas environment.

13. The system of claim 12, wherein the dampening gas environment further comprises a gas selected from a group consisting of He, Ar, Kr, Xe and Rn.

14. The system of claim 11, wherein the array of grating light valves is configured to modulate an incident light source with a wavelength λ

between 800 and 4000 nanometers.

15. The system of claim 14, wherein a plurality of grating light valves within the array of grating light valves each comprises a plurality of spatially arranged elongated ribbon elements with reflective top surfaces and reflective substrate surfaces, wherein a portion of the elongated ribbon elements in each of the plurality of grating light valves are capable of being moved by a predetermined distance to interfere constructively and destructively with the incident light source.

16. The system of claim 11, where in the array of grating light valves is configured to activate a printing medium.

17. A method for making a grating light valve comprising the step of:

a. providing a die structure containing a grating light valve structure;

b. bathing the grating light valve structure with a Neon-based dampening gas; and

c. sealing the die with the grating light valve structure and the dampening gas contained within the die.

18. The method of claim 17, wherein the temperature of the grating light valve is adjusted to a temperature in a range of 100 to 300 Celsius prior to the step of sealing the die.

19. The method of claim 17, wherein the step of bathing the grating light valve with Neon-based dampening gas and the step of sealing the grating light valve with the dampening gas within the die structure is performed in an isolation chamber.

20. The method of claim 19, wherein pressure of the Neon-based dampening gas is adjusted to pressure greater than 1 atmosphere prior to sealing the die.

21. The method of claim 20, wherein the step of sealing the die comprises the additional steps of:

a. providing a metallized gasket around a sealing edge of the die structure;

b. providing a glass cap with a complementary metallized gasket;

c. placing the glass cap over the die and aligning the metallized gaskets with a solder material between the metallized gaskets; and

d. adjusting the temperature of the die structure and the glass cap to a temperature sufficient to melt the solder material and seal the glass cap to the die structure.

22. The method of claim 17, wherein dampening gas is equal to or greater than 50% Neon gas.

23. The method of claim 17, wherein dampening gas is equal to or greater than 50% Krypton gas.

24. The method of claim 17, wherein the grating light valve comprises a plurality of elongated ribbon elements and a substrate structure, wherein a portion of the ribbon elements are repeatedly separated by a distance greater than 200 nanometers when a sufficient alternating bias voltage is applied across the portion of the ribbons elements and the substrate structure.

25. An optical MEM device encapsulated within a die with a dampening gas comprising a noble gas environment with a pressure of 0.5 or more at 20 degrees Celsius, the device comprising an array of ribbon elements spatially arranged over a substrate, wherein the ribbons have reflective top surfaces and wherein a portions of the ribbons are configured to move to modulate light reflected from the reflective top surfaces.