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Gimbaled micro-mirror positionable by thermal actuators

  • US 6,647,164 B1
  • Filed: 10/31/2000
  • Issued: 11/11/2003
  • Est. Priority Date: 10/31/2000
  • Status: Expired due to Fees
First Claim
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1. A micro-mechanical device for steering beams of light comprising:

  • at least one mirror constructed on a surface of the substrate;

    at least one gimbal mechanically coupling the mirror to the surface of the substrate in a neutral position; and

    at least one thermal actuator constructed on the surface of the substrate adjacent to the mirror, the thermal actuator having a free end positioned to engage the mirror, but not attached to the mirror.

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