Gimbaled micro-mirror positionable by thermal actuators

• US 6,647,164 B1
• Filed: 10/31/2000
• Issued: 11/11/2003
• Est. Priority Date: 10/31/2000
• Status: Expired due to Fees

• Current Assignee: 3M Innovative Properties Company (3M Company)
• Original Assignee: 3M Innovative Properties Company (3M Company)
• Inventors: Weaver, Billy L., Smith, Robert G., Hamerly, Mike E.
• Primary Examiner(s): Feild, Lynn D.
• Assistant Examiner(s): Webb, Brian S.
• Application Number:
  US09/702,646
• Time in Patent Office: 1,106 Days
• Field of Search: 385/16, 385/18, 359/224, 359/223, 359/291
• US Class Current: 385/16
• CPC Class Codes: G02B 26/0866 the reflecting means being moved or deformed by thermal means

Abstract

A micro-mechanical device including a gimbaled micro-mirror position able by a one or more thermal actuators. The thermal actuators are not attached to the micro-mirror. Rather, the micro-mirror is retained to the substrate by one or more gimbals. The micrometer sized thermal actuators are capable of repeatable and rapid moving the micro-mirror out-of-plane to accurately and repeatably steer a beam of light.

Claims

1. A micro-mechanical device for steering beams of light comprising:

at least one mirror constructed on a surface of the substrate;

at least one gimbal mechanically coupling the mirror to the surface of the substrate in a neutral position; and

at least one thermal actuator constructed on the surface of the substrate adjacent to the mirror, the thermal actuator having a free end positioned to engage the mirror, but not attached to the mirror.

2. The device of claim 1 wherein the free end is located between the mirror and the surface of the substrate.

3. The device of claim 1 wherein the thermal actuator is adapted to move the mirror out of the neutral position.

4. The device of claim 1 wherein the thermal actuator comprises two or more thermal actuators adapted to move the mirror through at least two degrees of freedom relative to the surface of the substrate.

5. The device of claim 1 wherein the neutral position comprises an in-plane configuration.

6. The device of claim 1 wherein the mirror is in an out-of-plane configuration when the thermal actuators are in an activated position.

7. The device of claim 1 wherein the mirror is in an in-plane configuration when the thermal actuators are in an unactivated position.

8. The device of claim 1 wherein the gimbal suspends the mirror over the surface of the substrate.

9. The device of claim 1 comprising:

a plurality of supports extending distally from a perimeter of the mirror; and

a plurality of pads attached to the supports positioned to engage with the surface of the substrate when the thermal actuators are in an unactivated position.

10. The device of claim 1 comprising a plurality of supports extending distally from a perimeter of the mirror comprising end stops.

11. The device of claim 1 wherein the mirror is rectangular and a thermal actuator is located at each corner thereof.

12. The device of claim 1 wherein the gimbal comprises:

at least one first arm extending distally from the mirror;

a member attached to a distal end of the first arm; and

a second arm extending from the member to an anchor on the surface of the substrate.

13. The device of claim 12 wherein the first arm is perpendicular to the mirror.

14. The device of claim 12 wherein the first arm is parallel to the second arm.

15. The device of claim 1 wherein the at least one mirror comprises an array of mirrors constructed on the surface of the substrate.

16. The device of claim 1 wherein the free end slides along a lower surface of the mirror during movement between the unactivated position and the activated position.

17. The device of claim 1 wherein the mirror comprises a plurality of outriggers positioned to mechanically engage with the free ends of the thermal actuators.

18. The device of claim 1 wherein the thermal actuator comprises:

at least one hot arm having a first end anchored to the surface and a distal end located above the surface;

a cold arm having a first end anchored to the surface and a distal end, the cold arm being located above the hot arm relative to the surface; and

a member mechanically and electrically coupling the distal ends of the hot and cold arms, the member comprising the free end configured to engage with the mirror when current is applied to at least the hot arm.

19. An optical switch comprising:

at least one input optical fiber;

one or more output optical fibers;

a micro-mechanical device for directing an optical signal projecting from the input optical fiber to any of the output optical fibers, the micro-mechanical device comprising;

at least one mirror constructed on a surface of the substrate and positioned to optically couple with the input optical fiber;

at least one gimbal mechanically coupling the mirror to the surface of the substrate in a neutral position; and

at least one thermal actuator constructed on the surface of the substrate adjacent to the mirror, the thermal actuators having a free end positioned to engage the mirror, but is not attached to the mirror.

20. The optical switch of claim 19 wherein the thermal actuator is adapted to move the mirror through two degrees of freedom relative to the surface of the substrate.