MEMS optical switch actuator

• US 6,647,171 B1
• Filed: 12/01/2000
• Issued: 11/11/2003
• Est. Priority Date: 12/01/2000
• Status: Expired due to Fees

• Current Assignee: Corning Incorporated
• Original Assignee: Corning Incorporated
• Inventors: Merchant, Paul P., Fu, Xiaodong R., Lambert, David W.
• Primary Examiner(s): Font, Frank G.
• Assistant Examiner(s): Kianni, Kevin
• Application Number:
  US09/728,474
• Publication Number:
  US 20030210851A1
• Time in Patent Office: 1,075 Days
• Field of Search: 385/18, 385/6, 385/2, 385/8, 385/14, 385/15, 385/16, 385/40, 385/57, 385/88, 385/129
• US Class Current: 385/18
• CPC Class Codes: G02B 6/3514 the reflective optical element moving along a line so as to translate into and out of the beam path, i.e. across the beam path
• CPC Class Codes: G02B 6/3518 the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device MEMS devices in general B81B; manufacture of MEM devices in general B81C; micromechanical devices controlling the direction of light G02B26/0833
• CPC Class Codes: G02B 6/3546 NxM switch, i.e. a regular array of switches elements of matrix type constellation
• CPC Class Codes: G02B 6/357 Electrostatic force electrostatic forces controlling reflecting elements in general G02B26/0841
• CPC Class Codes: G02B 6/358 Latching of the moving element, i.e. maintaining or holding the moving element in place once operation has been performed; includes a mechanically bistable system
• CPC Class Codes: G02B 6/3584 constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching MEMS per se B81B, B81C
• CPC Class Codes: G02B 6/3596 With planar waveguide arrangement, i.e. in a substrate, regardless if actuating mechanism is outside the substrate

Abstract

A micro-electro-mechanical system (MEMS) optical switch actuator and method for fabricating the actuator provide an anchor assembly that functions as a second electrode. The actuator has a reflective element assembly and a first electrode assembly for moving the reflective element assembly from a first position to a second position based on a switching signal. The actuator further includes an anchor assembly coupled to the reflective element assembly such that a spring force is generated in the reflective element assembly when the reflective element assembly is in the second position. The anchor assembly is electrically conductive such that the switching signal generates an electrostatic force between the anchor assembly and the first electrode assembly. The method for fabricating the actuator includes the step of coupling a multi-level reflection assembly to an optical circuit. The reflection assembly has an electrically conductive anchor assembly positioned at a first level with respect to the optical circuit and a mirror positioned at a second level with respect to the optical circuit. An insulative mirror beam layer is then coupled to the reflection assembly, and an electrode assembly is coupled to the mirror beam layer. The electrode assembly is coupled such that a voltage potential between the anchor assembly and the electrode assembly causes the electrode assembly to force the mirror beam layer and the mirror from the first switching position to the second switching position.

Claims

1. A micro-electro-mechanical-system (MEMS) optical switch actuator comprising:

a reflective element assembly;

a first electrode assembly for linearly moving the reflective element assembly from a first position to a second position based on a switching signal wherein the first electrode assembly includes an actuator beam, a contact stud coupled to the actuator beam and a pillar structure for supporting the actuator beam adjacent to the reflective element assembly such that the contact stud moves the reflective element assembly from the first position to the second position in response to the switching signal, wherein the pillar structure includes a single pillar architecture for supporting the actuator beam at a first end such that a second end of the actuator beam is free standing; and

an anchor assembly coupled to the reflective element assembly such that a spring force is generated in the reflective element assembly when the reflective element assembly is in the second position, the anchor assembly being electrically conductive such that the switching signal generates an electrostatic force between the anchor assembly and the first electrode assembly.

2. The actuator of claim 1 wherein the pillar structure includes a dual pillar architecture for supporting the actuator beam at a first end and a second end.

3. The actuator of claim 1 wherein the reflective element assembly includes:

a non-electrically conductive mirror beam; and

a mirror coupled to the mirror beam.

4. A micro-electro-mechanical-system (MEMS) optical switch actuator comprising:

a reflective element assembly;

a first electrode assembly for linearly moving the reflective element assembly from a first position to a second position based on a switching signal; and

an anchor assembly coupled to the reflective element assembly such that a spring force is generated in the reflective element assembly when the reflective element assembly is in the second position, the anchor assembly being electrically conductive such that the switching signal generates an electrostatic force between the anchor assembly and the first electrode assembly, wherein the anchor assembly includes;

a first anchor for supporting the reflective element assembly at a first end; and

a second anchor for supporting the reflective element assembly at a second end.

5. The actuator of claim 4 wherein each anchor includes:

an electrode; and

an extension coupled to the electrode and the reflective element assembly.