Absolute pressure sensor

• US 6,647,794 B1
• Filed: 05/06/2002
• Issued: 11/18/2003
• Est. Priority Date: 05/06/2002
• Status: Active Grant

• Current Assignee: Rosemount Incorporated (Emerson Electric Company)
• Original Assignee: Rosemount Incorporated (Emerson Electric Company)
• Inventors: McIntire, John, Hillman, David J., Nelson, Daniel S.
• Primary Examiner(s): OEN, WILLIAM L
• Application Number:
  US10/139,892
• Publication Number:
  US 20030205089A1
• Time in Patent Office: 561 Days
• Field of Search: 737/18, 737/24, 737/56, 737/08, 361/283--28
• US Class Current: 73/718
• CPC Class Codes: G01L 19/02 Arrangements for preventing, or for compensating for, effects of inclination or acceleration of the measuring device; Zero-setting means for aneroid barometers G01L7/14
• CPC Class Codes: G01L 19/04 Means for compensating for effects of changes of temperature , i.e. other than electric compensation
• CPC Class Codes: G01L 9/0073 using a semiconductive diaphragm
• CPC Class Codes: G01L 9/125 with temperature compensating means non electric temperature compensating means G01L19/04

Abstract

A barometric pressure sensor including a base layer, a sensor layer and a reference layer. The base layer has a passageway between a pressure inlet and a mounting face. The sensor layer is bonded by an insulating bond to the mounting face and includes a conductive diaphragm. The reference layer is mounted on the sensor layer to form a reference vacuum cavity. The reference layer includes a conducting surface facing the conductive diaphragm across the reference vacuum cavity to form a pressure sensing capacitor.

Claims

1. An absolute pressure sensor, comprising:

a base layer surrounding a passageway between an inlet adapted to receive a pressure and a mounting face on the base layer;

a sensor layer having a first face bonded by an insulating bond to the mounting face, the sensor layer including a conductive diaphragm aligned with the passageway, forming a pressure cavity that is between the sensor layer and the base layer, the pressure cavity receiving the pressure; and

a reference layer mounted on the sensor layer to form a reference vacuum cavity that is aligned with the conductive diaphragm, the reference layer including a conducting surface facing the conductive diaphragm across the reference vacuum cavity to form a pressure sensing capacitor, the conductive diaphragm separating the reference vacuum cavity from the pressure cavity, the conductive diaphragm sensing absolute pressure.

2. The pressure sensor of claim 1 wherein the insulating bond comprises a layer of glass frit.

3. The pressure sensor of claim 1 wherein the conductive diaphragm includes an oxide layer.

4. The pressure sensor of claim 3 wherein the conducting surface supports the oxide layer under an overpressure condition.

5. The pressure sensor of claim 1 wherein the sensor layer further includes a first insulating layer on a second face surrounding the conducting diaphragm, and the reference layer further includes a second insulating layer bonded to the first insulating layer.

6. The pressure sensor of claim 5 wherein the second insulating layer is masked to form a masked shape and the reference layer also includes a third insulating layer opposite the second insulating layer, the third insulating layer being masked in substantially the same masked shape as the second insulating layer.

7. The pressure sensor of claim 5 wherein the reference layer and the sensor layer comprise silicon and the first and second insulating layers comprise silicon dioxide and are fusion bonded together.

8. The pressure sensor of claim 1 wherein the reference layer comprises pyrex glass and is anodically bond ed to the sensor layer.

9. The pressure sensor of claim 1 further comprising a first electrical bonding pad disposed on the sensor layer and connected to the pressure sensing capacitor.

10. The pressure sensor of claim 9 further comprising a second electrical bonding pad connected to the pressure sensing capacitor.

11. The pressure sensor of claim 10 wherein the first electrical bonding pad is in electrical contact with the sensor layer, and the second electrical bonding pad is disposed on a pyrolytic oxide isolation channel on the sensor layer and is in electrical contact with the conducting surface.

12. The pressure sensor of claim 1 wherein the sensor layer further comprises a second passageway extending from the reference vacuum cavity to the insulating bond.

13. The pressure sensor of claim 12 wherein the second passageway is a laser drilled hole.

14. The pressure sensor of claim 13 wherein the reference vacuum cavity is shaped to include a cul-de-sac leading to the laser drilled hole.

15. The pressure sensor of claim 14 wherein the cul-de-sac includes a turn of at least 90 degrees.

16. The pressure sensor of claim 1 wherein the reference layer includes at least one groove facing the sensor layer.

17. The pressure sensor of claim 1 wherein the reference layer includes a mesa that faces the conductive diaphragm.

18. The pressure sensor of claim 1 wherein the sensor layer includes a shelf portion that extends beyond the reference layer, and at least one electrical bonding pad is disposed on the shelf portion.

19. The pressure sensor of claim 1 wherein the pressure sensor is a barometric pressure sensor having an operating range of at least 0.9-1.1 atmospheres.

20. A gage pressure transmitter that includes a barometric pressure sensor, the barometric pressure sensor comprising:

a base layer surrounding a passageway between an inlet adapted to receive a pressure and a mounting face on the base layer;

a sensor layer having a first face bonded by an insulating bond to the mounting face, the sensor layer including a conductive diaphragm aligned with the passageway, forming a pressure cavity that is between the sensor layer and the base layer, the pressure cavity receiving the pressure; and

a reference layer mounted on the sensor layer to form a reference vacuum cavity that is aligned with the conductive diaphragm, the reference layer including a conducting surface facing the conductive diaphragm across the reference vacuum cavity to form a pressure sensing capacitor, the conductive diaphragm separating the reference vacuum cavity from the pressure cavity, the conductive diaphragm sensing absolute pressure.

21. The gage pressure transmitter of claim 20 further comprising:

a transmitter housing, the transmitter housing having a barometric pressure port bonded to the inlet.

22. The gage pressure transmitter of claim 21 further comprising a porous teflon plug disposed in the barometric pressure port.

23. The gage pressure transmitter of claim 20, further comprising:

a process pressure sensor; and

a converter circuit coupled to the process pressure sensor and the barometric pressure sensor, the converter circuit calculating a difference between process pressure and barometric pressure.

24. The gage pressure transmitter of claim 23 wherein the converter circuit includes a sigma delta analog to digital converter.

25. The gage pressure transmitter of claim 23 wherein the converter circuit compensates a reading from the process pressure sensor and compensates a reading from the barometric pressure sensor and calculates the difference by subtracting the compensated barometric pressure reading from the process pressure reading.