Summing the output of an array of optical detector segments in an atomic force microscope

• US 6,649,902 B2
• Filed: 06/07/2002
• Issued: 11/18/2003
• Est. Priority Date: 10/06/1998
• Status: Expired due to Fees

• Current Assignee: Regents of the University of California (University of California)
• Original Assignee: Regents of the University of California (University of California)
• Inventors: Schäffer, Tilman, Hansma, Paul K.
• Primary Examiner(s): Luu, Thanh X.
• Application Number:
  US10/165,503
• Publication Number:
  US 20020195553A1
• Time in Patent Office: 529 Days
• Field of Search: 250/216, 250/234, 250/203.1, 250/203.2, 250/306, 250/307, 250/214.A, 250/208.1, 250/214.AG, 731/05
• US Class Current: 250/216
• CPC Class Codes: B82Y 35/00 Methods or apparatus for measurement or analysis of nanostructures
• CPC Class Codes: G01Q 20/02 by optical means
• CPC Class Codes: G01Q 70/06 Probe tip arrays
• CPC Class Codes: Y10S 977/863 Atomic force probe
• CPC Class Codes: Y10S 977/869 Optical microscope
• CPC Class Codes: Y10S 977/87 Optical lever arm for reflecting light

Abstract

A high sensitivity beam deflection sensing optical device, such as an atomic force microscope, including one or more of the following: specified means in the path of the incident beam for adjusting the size and/or power of the incident beam spot, means for moving the incident beam spot with movement of the object whereby to maintain the position of the spot on the object, and means for increasing the signal to noise ratio of the optical detector in which adjusted gains are applied to different segments of the optical detector.

Claims

1. A method for operating an optical beam deflection sensing device in an atomic force microscope having one or more cantilevers, a light source providing an incident beam, a lens for focusing the incident beam to a spot on a selected one of said one or more cantilevers, and an optical detector having a linear array of three or more segments for receiving the beam when reflected from the selected cantilever, whereby the addition of the signals from at least three segments detects a change of position or shape of the spot as the reflected beam traverses three or more segments.

2. The method of claim 1 wherein said array is a linear array.

3. The method of claim 1 wherein said pre-selected individual gains are dynamically applied to said signals.

4. The method of claim 1 wherein said method provides an increased signal to noise ratio when compared to an optical detector without said gains.