Apparatus and method for forming a battery in an integrated circuit

• US 6,650,000 B2
• Filed: 01/16/2001
• Issued: 11/18/2003
• Est. Priority Date: 01/16/2001
• Status: Expired due to Fees

• Current Assignee: GlobalFoundries, Inc.
• Original Assignee: International Business Machines Corporation
• Inventors: Rice, Michael B., Stamper, Anthony K., Nakos, James S., Ballantine, Arne W., Groves, Robert A., Lund, Jennifer L.
• Primary Examiner(s): Chaudhuri, Olik
• Assistant Examiner(s): Berezny, Neal
• Application Number:
  US09/761,123
• Publication Number:
  US 20020093029A1
• Time in Patent Office: 1,036 Days
• Field of Search: 257/551, 257/528, 257/758, 257/760, 257/798, 257/516, 438/19, 438/381, 216/2, 216/36, 216/56, 604/890.1, 604/93, 429/127, 429/193, 357/5
• US Class Current: 257/551
• CPC Class Codes: H01L 23/522 including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
• CPC Class Codes: H01L 23/58 Structural electrical arrangements for semiconductor devices not otherwise provided for , e.g. in combination with batteries H01L23/49593, H01L23/49596 take precedence
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
• CPC Class Codes: H01M 10/052 Li-accumulators
• CPC Class Codes: H01M 10/0562 Solid materials
• CPC Class Codes: H01M 10/058 Construction or manufacture
• CPC Class Codes: H01M 10/425 Structural combination with electronic components, e.g. electronic circuits integrated to the outside of the casing printed circuits H05K1/00
• CPC Class Codes: H01M 4/5825 Oxygenated metallic salts or polyanionic structures, e.g. borates, phosphates, silicates, olivines
• CPC Class Codes: H01M 6/42 Grouping of primary cells into batteries H01M6/40 takes precedence
• CPC Class Codes: Y02E 60/10 Energy storage using batteries
• CPC Class Codes: Y02P 70/50 Manufacturing or production processes characterised by the final manufactured product

Abstract

A method and structure that provides a battery within an integrated circuit for providing voltage to low-current electronic devices that exist within the integrated circuit. The method includes Front-End-Of-Line (FEOL) processing for generating a layer of electronic devices on a semiconductor wafer, followed by Back-End-Of-Line (BEOL) integration for wires connecting the electronic devices together to form completed electrical circuits of the integrated circuit. The BEOL integration includes forming a multilayered structure of wiring levels on the layer of electronic devices. Each wiring level includes conductive metallization (e.g., metal-plated vias, conductive wiring lines, etc.) embedded in insulative material. The battery is formed during BEOL integration within one or more wiring levels, and the conductive metallization conductively couples positive and negative terminals of the battery to the electronic devices. The battery may have several different topologies relative to the structural and geometrical relationships among the battery electrodes and electrolyte. Multiple batteries may be formed within one or more wiring levels, and may be conductively coupled to the electronic devices. The multiple batteries may be connected in series or in parallel.

Claims

1. An electrochemical structure within an integrated circuit, comprising:

a semiconductor wafer;

a layer of electronic devices on the semiconductor wafer, wherein the layer of electronic devices includes at least one electronic device;

N wiring levels within an interconnect structure of the integrated circuit, wherein the N wiring levels are disposed on the layer of electronic devices, wherein N is at least 1, wherein the N wiring levels are denoted as wiring level 1, wiring level 2, . . . , wiring level N, and wherein the N wiring levels include a first conductive metallization and a second conductive metallization; and

at least one battery within the wiring levels I through K, wherein I is selected from the group consisting of 1, 2, . . . , and N, wherein K is selected from the group consisting of I, I+1, . . . , and N, wherein the first conductive metallization conductively couples a first electrode of the at least one battery to the at least one electronic device, wherein the second conductive metallization conductively couples a second electrode of the battery to the at least one electronic device, wherein the first and second conductive metallizations are totally external to the interior of the at least one battery, and wherein said electrodes are external to the first and second conductive metallizations.

2. The electrochemical structure of claim 1, wherein the N wiring levels and the at least one battery are formed during a Back-End-Of-Line (BEOL) integration of the integrated circuit.

3. The electrochemical structure of claim 1, wherein the at least one battery includes a plurality of batteries in series.

4. The electrochemical structure of claim 3, wherein the batteries in series consist of U-Batteries in series.

5. The electrochemical structure of claim 3, wherein the plurality of batteries includes M batteries denoted as batteries 1, 2, . . . , M, wherein M is at least 2, wherein each battery L is in series with battery L+1 and is conductively coupled to battery L+1 by a conductive interconnect, and wherein L=1, 2, . . . , M−

1.

6. The electrochemical structure of claim 3, wherein the plurality of batteries includes M batteries denoted as batteries 1, 2, . . . , M, wherein M is at least 2, wherein each battery L is in series with battery L+1 and is conductively coupled to battery L+1, wherein there is no conductive interconnect between battery L and battery L+1, and wherein L=1, 2, . . . , M−

1.

7. The electrochemical structure of claim 1, wherein the at least one battery includes a plurality of batteries in parallel.

8. The electrochemical structure of claim 1, wherein the first conductive metallization includes a first conductor that conductively contacts the first electrode, wherein second conductive metallization includes a second conductor that conductively contacts the second electrode, wherein the first conductor is within the wiring levels I, I+1, . . . K, and wherein the second conductor is within the wiring levels I, I+1, . . . K.

9. The electrochemical structure of claim 8, wherein K=I.

10. The electrochemical structure of claim 1, wherein the first conductive metallization includes a first conductor that conductively contacts the first electrode, wherein second conductive metallization includes a second conductor that conductively contacts the second electrode, wherein the first conductor is outside of the wiring levels I, I+1, . . . K, and wherein the second conductor is outside of the wiring levels I, I+1, . . . K.

11. The electrochemical structure of claim 1, wherein the at least one battery includes a first battery, wherein an anode of the first battery includes an anode material selected from the group consisting of lithium, lithiated vanadium oxide (Li₈V₂O₅), AgI, Ag, and Zn, and wherein a cathode of the first battery includes a cathode material selected from the group consisting of V₂O₅, LiMn₂O₄, LiCoO₂, Sn, Pb, and Ag, and wherein an electrolyte of the first battery includes lithium phosphorous oxynitride.

12. The electrochemical structure of claim 1, wherein the at least one battery includes a U-Battery.

13. The electrochemical structure of claim 12, wherein the U-Battery is selected from the group consisting of a U-Battery With Double Extension.

14. The electrochemical structure of claim 1, wherein the at least one battery includes a S-Battery.