Method of manufacturing spatial light modulator and electronic device employing it
First Claim
1. An optical card capable of optical switching comprising:
- an insulating substrate;
a plurality of induction coils provided on the insulating substrate;
a spatial light modulator provided on the insulating substrate; and
a wiring pattern provided on the insulating substrate that connects the plurality of induction coils with the spatial light modulator; and
wherein the spatial light modulator comprises;
a plurality of micromirrors that reflect light;
a plurality of pillars that support the plurality of micromirrors; and
a plurality of electrodes that drive the plurality of micromirrors by a coulomb force; and
wherein each electrode is connected to a respective one of the plurality of induction coils.
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Accused Products
Abstract
A spatial light modulator is constructed from a conductive silicon mirror substrate and a glass electrode substrate including sodium, anode-bonded together. The silicon mirror substrate has micromirrors arranged in a matrix, torsion bars coupling these micromirrors in the x-direction, and a frame coupled to both ends of the torsion bars. A glass electrode substrate has a central depression, a rim around the periphery thereof, pillars projecting from within the depression, and electrodes and wiring driving micromirrors formed within the depression in an inclining manner. Both ends of the torsion bars are bonded to the rim of the frame portion, and intermediate portions of the torsion bars are bonded to the pillars. Both ends of the torsion bars are cut away from the frame portion during dicing.
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Citations
5 Claims
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1. An optical card capable of optical switching comprising:
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an insulating substrate;
a plurality of induction coils provided on the insulating substrate;
a spatial light modulator provided on the insulating substrate; and
a wiring pattern provided on the insulating substrate that connects the plurality of induction coils with the spatial light modulator; and
wherein the spatial light modulator comprises;
a plurality of micromirrors that reflect light;
a plurality of pillars that support the plurality of micromirrors; and
a plurality of electrodes that drive the plurality of micromirrors by a coulomb force; and
wherein each electrode is connected to a respective one of the plurality of induction coils. - View Dependent Claims (2, 3, 4, 5)
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Specification