Method of manufacturing bump electrodes and a method of manufacturing a semiconductor device

• US 6,653,219 B2
• Filed: 12/07/2001
• Issued: 11/25/2003
• Est. Priority Date: 01/13/2000
• Status: Expired due to Fees

• Current Assignee: Hitachi, Ltd.
• Original Assignee: Hitachi, Ltd.
• Inventors: Fukuyama, Satoru
• Primary Examiner(s): PERT, EVAN T
• Application Number:
  US10/004,875
• Publication Number:
  US 20020086515A1
• Time in Patent Office: 718 Days
• Field of Search: 438/106, 438/119, 438/612, 438/613, 438/615, 438/616, 438/660, 298/42, 298/43
• US Class Current: 438/616
• CPC Class Codes: H01L 21/4853 Connection or disconnection of other leads to or from a metallisation, e.g. pins, wires, bumps
• CPC Class Codes: H01L 21/6835 using temporarily an auxiliary support
• CPC Class Codes: H01L 2224/05568 the whole external layer protruding from the surface
• CPC Class Codes: H01L 2224/05573 Single external layer
• CPC Class Codes: H01L 2224/0558 being stacked
• CPC Class Codes: H01L 2224/05644 Gold [Au] as principal constituent
• CPC Class Codes: H01L 2224/11003 for holding or transferring the bump preform
• CPC Class Codes: H01L 2224/13099 Material
• CPC Class Codes: H01L 2224/131 with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
• CPC Class Codes: H01L 2224/16225 the item being non-metallic, e.g. insulating substrate with or without metallisation
• CPC Class Codes: H01L 2224/48091 Arched
• CPC Class Codes: H01L 2224/73253 Bump and layer connectors
• CPC Class Codes: H01L 24/05 of an individual bonding area
• CPC Class Codes: H01L 24/11 Manufacturing methods for bumps on insulating substrates H01L21/4853
• CPC Class Codes: H01L 24/13 of an individual bump connector
• CPC Class Codes: H01L 2924/00014 the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
• CPC Class Codes: H01L 2924/01005 Boron [B]
• CPC Class Codes: H01L 2924/01006 Carbon [C]
• CPC Class Codes: H01L 2924/01013 Aluminum [Al]
• CPC Class Codes: H01L 2924/01015 Phosphorus [P]
• CPC Class Codes: H01L 2924/01024 : Chromium [Cr]
• CPC Class Codes: H01L 2924/01033 : Arsenic [As]
• CPC Class Codes: H01L 2924/01047 : Silver [Ag]
• CPC Class Codes: H01L 2924/01078 : Platinum [Pt]
• CPC Class Codes: H01L 2924/01079 : Gold [Au]
• CPC Class Codes: H01L 2924/01082 : Lead [Pb]
• CPC Class Codes: H01L 2924/014 : Solder alloys
• CPC Class Codes: H01L 2924/15153 : the die mounting substrate comprising a recess for hosting the device
• CPC Class Codes: H01L 2924/15165 : Monolayer substrate
• CPC Class Codes: H01L 2924/15311 : being a ball array, e.g. BGA
• CPC Class Codes: H01L 2924/15312 : being a pin array, e.g. PGA
• CPC Class Codes: H01L 2924/16152 : Cap comprising a cavity for hosting the device, e.g. U-shaped cap
• CPC Class Codes: H01L 2924/16195 : Flat cap [not enclosing an internal cavity]

Abstract

In a method of manufacturing bump electrodes, a solder paste material is filled in concave parts provided on one surface of a jig for forming bumps, and the solder paste material is melted under the condition in that the concave parts of the jig for forming bumps face electrode pads provided on one surface of a substrate (a semiconductor chip or a circuit board), to form bump electrodes on the electrode pads of the substrate, whereby the size of the bump electrodes formed on electrode pads can be uniform. Furthermore, a short circuit among the electrode pads of the substrate (a semiconductor chip or a circuit board) can be prevented. Furthermore, the yield in a production process of a semiconductor device having bump electrodes can be increased.

Claims

1. A method of manufacturing a semiconductor package having bump electrodes comprising the steps of:

(a) providing a semiconductor chip having a plurality of semiconductor elements and terminal pads formed on a main surface thereof;

(b) providing a jig for forming said bump electrodes and a substrate, said jig having concave parts provided on one surface thereof, each of concave parts being defined by an upper surface corresponding to said one surface, a bottom surface positioned at a relatively lower level than said upper surface and a side surface extending from said upper surface to said bottom surface, said substrate having electrode pads arranged on one surface thereof, each of said electrode pads having a size which is smaller than an opening of each of concave parts in a plane view;

(c) mounting said semiconductor chip on said substrate such that said main surface of said semiconductor chip faces the opposing surface of said substrate;

(d) filling said concave parts of said jig with a solder paste material;

(e) disposing said substrate with said semiconductor chip on said jig in such a manner that said one surface of said substrate contacts said one surface of said jig; and

(f) subjecting said solder paste material in said concave parts of said jig to a heat treatment and melting said solder paste material under the condition in that said electrode pads are embedded in said concave parts of said jig respectively and are in contact with said solder paste material, thereby to form bump electrodes on said electrode pads of said substrate and to form said semiconductor package to be mounted on a printed circuit board by said bump electrodes.

2. A method according to claim 1, further comprising a step of detaching said one surface of said substrate from said one surface of said jig by surface tension of said solder paste material in the step (f), thereby to form a space between said one surface of said substrate and said one surface of said jig in a thickness direction of said substrate.

3. A method according to claim 2, further comprising a step of cleaning a flux component included in said solder paste material by providing a cleaning fluid into said space between said one surface of substrate and said one surface of said jig.

4. A method according to claim 3, wherein each of concave parts of said jig has a square shape, and wherein a depth of each of said concave parts of said jig is set at a dimension that is about a half of a plane edge of each of said concave parts.

5. A method according to claim 4, wherein said depth of each of said concave parts of said jig is set at a dimension smaller than a height of said bump electrodes.

6. A method according to claim 5, wherein said jig is formed of a material having a wettability with said solder paste material lower than that of said substrate.

7. A method according to claim 6, wherein said jig is formed of glass.