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Charged particle beam apparatus

  • US 6,653,633 B2
  • Filed: 02/03/2003
  • Issued: 11/25/2003
  • Est. Priority Date: 07/09/1999
  • Status: Expired due to Term
First Claim
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1. A method of composing a full-focused image, comprising the steps of:

  • reducing noise of a plurality of input images each read with a different focus;

    evaluating noise amounts of the noise-reduced images whose noise has been reduced and evaluating in-focus degrees of said noise-reduced images to calculate signal change amount evaluation values;

    generating a maximum signal change amount evaluation value and composition information based on the calculated signal change amount evaluation values;

    generating favorableness degree information by determining a noise influence degree using said maximum signal change amount evaluation value and said noise amount evaluation values;

    the series of steps being performed by a plurality of full-focused image composing means; and

    generating a composite image based on a plurality of pieces of said favorableness degree information and a plurality of pieces of said composition information generated by said plurality of full-focused image composing means.

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