Charged particle beam apparatus

• US 6,653,633 B2
• Filed: 02/03/2003
• Issued: 11/25/2003
• Est. Priority Date: 07/09/1999
• Status: Expired due to Term

• Current Assignee: Hitachi, Ltd.
• Original Assignee: Hitachi, Ltd.
• Inventors: Sato, Mitsugu, Yoshida, Shoji, Ezumi, Makoto, Yoda, Haruo, Ikeda, Mitsuji, Todokoro, Hideo, Takane, Atsushi, Mizuno, Fumio
• Primary Examiner(s): NGUYEN, KIET TUAN
• Application Number:
  US10/356,498
• Publication Number:
  US 20030136907A1
• Time in Patent Office: 295 Days
• Field of Search: 250/310, 250/306, 250/307, 356/401, 356/372, 356/399, 378/98, 378/62, 348/333.01, 348/333.11
• US Class Current: 850/10
• CPC Class Codes: G06T 2207/10061 from scanning electron microscope
• CPC Class Codes: G06T 2207/30148 Semiconductor; IC; Wafer
• CPC Class Codes: G06T 5/20 using local operators
• CPC Class Codes: G06T 5/50 using two or more images, e.g. averaging or subtraction
• CPC Class Codes: G06T 5/70 Denoising; Smoothing
• CPC Class Codes: G06T 5/73 Deblurring; Sharpening
• CPC Class Codes: G06T 7/13 Edge detection
• CPC Class Codes: G06T 7/62 of area, perimeter, diameter or volume
• CPC Class Codes: H01J 2237/21 Focus adjustment
• CPC Class Codes: H01J 2237/216 Automatic focusing methods
• CPC Class Codes: H01J 2237/221 Image processing
• CPC Class Codes: H01J 2237/226 Image reconstruction
• CPC Class Codes: H01J 2237/281 Bottom of trenches or holes
• CPC Class Codes: H01J 2237/2815 Depth profile
• CPC Class Codes: H01J 2237/2817 Pattern inspection
• CPC Class Codes: H01J 37/21 Means for adjusting the focus
• CPC Class Codes: H01J 37/222 Image processing arrangements associated with the tube
• CPC Class Codes: H01J 37/28 with scanning beams H01J37/268, H01J37/292, H01J37/2955 take precedence

Abstract

It is an object of the present invention to obtain an image which is focused on all portions of a sample and to provide a charged particle beam apparatus capable of obtaining a two-dimensional image which has no blurred part over an entire sample. In order to achieve the above object, the present invention comprises means for changing a focus condition of a charged particle beam emitted from a charged particle source, a charged particle detector for detecting charged particles irradiated from a surface portion of said sample in response to the emitted charged particle beam, and means for composing a two-dimensional image of the surface portion of the based on signals on which said charged particle beam is focused, said signals being among signals output from the charged particle detector.

Claims

1. A method of composing a full-focused image, comprising the steps of:

reducing noise of a plurality of input images each read with a different focus;

evaluating noise amounts of the noise-reduced images whose noise has been reduced and evaluating in-focus degrees of said noise-reduced images to calculate signal change amount evaluation values;

generating a maximum signal change amount evaluation value and composition information based on the calculated signal change amount evaluation values;

generating favorableness degree information by determining a noise influence degree using said maximum signal change amount evaluation value and said noise amount evaluation values;

the series of steps being performed by a plurality of full-focused image composing means; and

generating a composite image based on a plurality of pieces of said favorableness degree information and a plurality of pieces of said composition information generated by said plurality of full-focused image composing means.

2. The method of composing a full-focused image as claimed in claim 1, further comprising a step of selecting composition information subjected to little noise influence for each pixel from a plurality of pieces of composition information, using said plurality of pieces of favorableness degree information and said plurality of pieces of composition information, to compose a composite image from the selected composition information.

3. The method of composing a full-focused image as claimed in claim 1, further comprising a step of, before reducing the noise of said plurality of input images, positioning the plurality of input images and matching the intensity thereof.

4. The method of composing a full-focused image as claimed in claims 1, wherein at least one of said plurality of full-focused image composing means selects a predetermined default image included in said input images.

5. A full-focused image composing apparatus comprising:

a plurality of full-focused image composing means including;

noise reducing means for reducing noise of a plurality of input images each read with a different focus to generate noise-reduced images;

noise amount evaluating means for evaluating noise amounts of said noise-reduced images to calculate noise amount evaluation values;

signal change amount evaluating means for calculating said noise amount evaluation values, and evaluating in-focus degrees of said noise-reduced images to calculate signal change amount evaluation values;

focus determination means for evaluating said signal change amount evaluation values to generate a maximum signal change amount evaluation value and composition information; and

noise determination means for determining a noise influence degree using said maximum signal change amount evaluation value and said noise amount evaluation values to generate favorableness degree information; and

composing means for generating a composite image based on a plurality of pieces of said favorableness degree information and a plurality of pieces of said composition information generated by said plurality of full-focused image composing means.

6. The full-focused image composing apparatus as claimed in claim 5, further comprising preprocessing means for, before said plurality of input images are input to said noise reducing means, either positioning said plurality of input images or matching the intensity thereof, or both.

7. The full-focused image composing apparatus as claimed in claim 5, wherein input images that have been previously input are subjected to a full-focused image composing process by said full-focused image composing means in parallel with an input process in which said plurality of input images are input to said full-focused image composing means.