Surface inspection apparatus and method
First Claim
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1. A surface inspection apparatus comprising:
- a light source section for emitting a first luminous flux and a second luminous flux irradiated on a surface of an inspected object;
a first irradiation optical system in which the first luminous flux is irradiated on the surface of the inspected object at a first irradiation angle;
a second irradiation optical system in which the second luminous flux is radiated on the surface of the inspected object at a second irradiation angle different from the first irradiation angle;
a displacement section for displacing the inspected object relative to irradiation luminous fluxes of the first and second irradiation optical systems;
a light receiving optical system for receiving scattered light of the first luminous flux irradiated by the first irradiation optical system and produced from an inspection object on the surface of the inspected object and scattered light of the second luminous flux irradiated by the second irradiation optical system and produced from the inspection object on the surface of the inspected object;
a first light receiving section for converting scattered light of the first luminous flux received by the light receiving optical system into a first light receiving signal;
a second light receiving section for converting scattered light of the second luminous flux received by the light receiving optical system into a second light receiving signal; and
a signal forming section for forming a measuring signal on the basis of the first light receiving signal and the second light receiving signal, wherein the first light receiving section and the second light receiving section respectively form the first light receiving signal and the second light receiving signal which are different in sensitivity or dynamic range from each other, wherein the signal forming section synthesizes the first light receiving signal and the second light receiving signal which are different in sensitivity or dynamic range from each other to form the measuring signal, and wherein the signal forming section forms foreign matter data on the basis of the first light receiving signal at a high sensitivity side when both the first and second light receiving signals are not saturated, and forms foreign matter data on the basis of the first light receiving signal at a low sensitivity side when only one of the first and second light receiving signals is saturated.
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Abstract
A first light receiving section and a second light receiving section receive light from an inspected object, and respectively form a first light receiving signal and a second light receiving signal which are different in sensitivity or dynamic range from each other. The first light receiving signal and the second light receiving signal which are different in sensitivity or dynamic range from each other are synthesized in order to form a measuring signal. The measuring signal is used to detect whether there are any foreign matters on a surface of the inspected object.
33 Citations
24 Claims
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1. A surface inspection apparatus comprising:
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a light source section for emitting a first luminous flux and a second luminous flux irradiated on a surface of an inspected object;
a first irradiation optical system in which the first luminous flux is irradiated on the surface of the inspected object at a first irradiation angle;
a second irradiation optical system in which the second luminous flux is radiated on the surface of the inspected object at a second irradiation angle different from the first irradiation angle;
a displacement section for displacing the inspected object relative to irradiation luminous fluxes of the first and second irradiation optical systems;
a light receiving optical system for receiving scattered light of the first luminous flux irradiated by the first irradiation optical system and produced from an inspection object on the surface of the inspected object and scattered light of the second luminous flux irradiated by the second irradiation optical system and produced from the inspection object on the surface of the inspected object;
a first light receiving section for converting scattered light of the first luminous flux received by the light receiving optical system into a first light receiving signal;
a second light receiving section for converting scattered light of the second luminous flux received by the light receiving optical system into a second light receiving signal; and
a signal forming section for forming a measuring signal on the basis of the first light receiving signal and the second light receiving signal, wherein the first light receiving section and the second light receiving section respectively form the first light receiving signal and the second light receiving signal which are different in sensitivity or dynamic range from each other, wherein the signal forming section synthesizes the first light receiving signal and the second light receiving signal which are different in sensitivity or dynamic range from each other to form the measuring signal, and wherein the signal forming section forms foreign matter data on the basis of the first light receiving signal at a high sensitivity side when both the first and second light receiving signals are not saturated, and forms foreign matter data on the basis of the first light receiving signal at a low sensitivity side when only one of the first and second light receiving signals is saturated. - View Dependent Claims (2, 3)
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4. A surface inspection apparatus comprising:
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a light source section for emitting a luminous flux irradiated on a surface of an inspected object;
an irradiation optical system for irradiating a luminous flux on the surface of the inspected object at a fixed irradiation angle;
a displacement section for displacing the inspected object relative to an irradiation luminous flux of the irradiation optical system;
a first light receiving optical system for receiving a first scattered light in a first scattering direction of the irradiation luminous flux irradiated by the irradiation optical system and emitted from an inspection object on the surface of the inspected object;
a second light receiving optical system for receiving a second scattered light in a second scattering direction of the irradiation luminous flux irradiated by the irradiation optical system and emitted from the inspection object on the surface of the inspected object;
a first light receiving section for converting the first scattered light received by the first light receiving optical system into a first light receiving signal;
a second light receiving section for converting the second scattered light received by the second light receiving optical system into a second light receiving signal; and
a signal forming section for synthesizing the first light receiving signal and the second light receiving signal to thereby form a measuring signal, wherein the first light receiving section and the second light receiving section respectively form the first light receiving signal and the second light receiving signal which are different in sensitivity or dynamic range from each other, wherein the signal forming section synthesizes the first light receiving signal and the second light receiving signal which are different in sensitivity or dynamic range to form the measuring signal, and wherein the signal forming section forms foreign matter data on the basis of the first light receiving signal at a high sensitivity side when both the first and second light receiving signals are not saturated, and forms foreign matter data on the basis of the first light receiving signal at a low sensitivity side when only one of the first and second light receiving signals is saturated. - View Dependent Claims (5, 6, 7, 8)
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9. A surface inspection apparatus comprising:
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a light emitting means for emitting a first luminous flux and a second luminous flux for irradiating on a surface of an inspected object;
a first irradiation means for irradiating the first luminous flux on the surface of the inspected object at a first irradiation angle;
a second irradiation means for irradiating the second luminous flux on the surface of the inspected object at a second irradiation angle different from the first irradiation angle;
a displacement means for displacing the inspected object relative to irradiation luminous fluxes of the first and second irradiation means;
a light receiving means for receiving scattered light of the first luminous flux irradiated by the first irradiation means and produced from an inspection object on the surface of the inspected object, and scattered light of the second luminous flux irradiated by the second irradiation means and produced from the inspection object on the surface of the inspected object;
a first conversion means for converting scattered light of the first luminous flux received by the light receiving means into a first light receiving signal;
a second conversion means for converting scattered light of the second luminous flux received by the light receiving means into a second light receiving signal;
a signal forming means for forming a measuring signal on the basis of the first light receiving signal and the second light receiving signal, wherein the first conversion means and the second conversion means respectively form the first light receiving signal and the second light receiving signal which are different in sensitivity or dynamic range from each other, wherein the signal forming means synthesizes the first light receiving signal and the second light receiving signal which are different in sensitivity or dynamic range from each other to form the measuring signal, and wherein the signal forming means forms foreign matter data on the basis of the first light receiving signal at a high sensitivity side when both the first and second light receiving signals are not saturated, and forms foreign matter data on the basis of the first light receiving signal at a low sensitivity side when only one of the first and second light receiving signals is saturated. - View Dependent Claims (10, 11)
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12. A surface inspection apparatus comprising:
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a light emitting means for emitting a luminous flux for irradiating on a surface of an inspected object;
an irradiation means for irradiating a luminous flux on the surface of the inspected object at a fixed irradiation angle;
a displacement means for displacing the inspected object relative to an irradiation luminous flux of the irradiation means;
a first light receiving means for receiving a first scattered light in a first scattering direction of the irradiation luminous flux irradiated by the irradiation means and produced from an inspection object on the surface of the inspected object;
a second light receiving means for receiving a second scattered light in a second scattering direction of the irradiation luminous flux irradiated by the irradiation means and produced from the inspection object on the surface of the inspected object;
a first conversion means for converting the first scattered light received by the first light receiving means into a first light receiving signal;
a second conversion means for converting the second scattered light received by the second light receiving means into a second light receiving signal;
a signal forming means for forming a measuring signal by synthesizing the first light receiving signal and the second light receiving signal, wherein the first conversion means and the second conversion means respectively form the first light receiving signal and the second light receiving signal which are different in sensitivity or dynamic range from each other, wherein the signal forming means forms the measuring signal by synthesizing the first light receiving signal and the second light receiving signal which are different in sensitivity or dynamic range from each other, and wherein the signal forming means forms foreign matter data on the basis of the first light receiving signal at a high sensitivity side when both the first and second light receiving signals are not saturated, and forms foreign matter data on the basis of the first light receiving signal at a low sensitivity side when only one of the first and second light receiving signals is saturated. - View Dependent Claims (13, 14, 15, 16)
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17. A surface inspection method comprising:
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a step for emitting a first luminous flux and a second luminous flux for irradiating on a surface of an inspected object;
a step for irradiating the first luminous flux on the surface of the inspected object at a first irradiation angle;
a step for irradiating the second luminous flux on the surface of the inspected object at a second irradiation angle different from the first irradiation angle;
a step for displacing the inspected object relative to an irradiation luminous flux;
a step for receiving scattered light of the first luminous flux produced from an inspection object on the surface of the inspected object, and scattered light of the second luminous flux produced from the inspection object on the surface of the inspected object;
a step for converting the scattered light of the received first luminous flux into a first light receiving signal;
a step for converting the scattered light of the received second luminous flux into a second light receiving signal; and
a step for forming a measuring signal on the basis of the first light receiving signal and the second light receiving signal, wherein in the conversion step into the first light receiving signal and the conversion step into the second light receiving signal, the first light receiving signal and the second light receiving signal which are different in sensitivity or dynamic range from each other are formed, wherein in the signal forming step, the first light receiving signal and the second light receiving signal which are different in sensitivity or dynamic range from each other are synthesized to form the measuring signal, and wherein the signal forming step forms foreign matter data on the basis of the first light receiving signal at a high sensitivity side when both the first and second light receiving signals are not saturated, and forms foreign matter data on the basis of the first light receiving signal at a low sensitivity side when only one of the first and second light receiving signals is saturated. - View Dependent Claims (18, 19)
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20. A surface inspection method comprising:
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a step for emitting a luminous flux for irradiating on a surface of an inspected object;
a step for irradiating a luminous flux on the surface of the inspected object at a fixed irradiation angle;
a step for displacing the inspected object relative to an irradiation luminous flux;
a step for receiving a first scattered light in a first scattering direction produced from an inspection object on the surface of the inspected object;
a step for receiving a second scattered light in a second scattering direction produced from the inspection object on the surface of the inspected object;
a step for converting the received first scattered light into a first light receiving signal;
a step for converting the received second scattered light into a second light receiving signal; and
a step for forming a measuring signal by synthesizing the first light receiving signal and the second light receiving signal, wherein in the conversion step into the first light receiving signal and the conversion step into the second light receiving signal, the first light receiving signal and the second light receiving signal which are different in sensitivity or dynamic range from each other are formed, wherein in the signal forming step, the first light receiving signal and the second light receiving signal which are different in sensitivity or dynamic range from each other are synthesized to form the measuring signal, and wherein the signal forming section forms foreign matter data on the basis of the first light receiving signal at a high sensitivity side when both the first and second light receiving signals are not saturated, and forms foreign matter data on the basis of the first light receiving signal at a low sensitivity side when only one of the first and second light receiving signals is saturated. - View Dependent Claims (21, 22, 23, 24)
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Specification