Frequency tunable resonant scanner with auxiliary arms

• US 6,654,158 B2
• Filed: 11/01/2002
• Issued: 11/25/2003
• Est. Priority Date: 04/20/2001
• Status: Active Grant

• Current Assignee: Microvision, Inc.
• Original Assignee: Microvision, Inc.
• Inventors: Tegreene, Clarence T., Helsel, Mark P., Wine, David W.
• Primary Examiner(s): Spector, David N.
• Application Number:
  US10/286,226
• Publication Number:
  US 20030117689A1
• Time in Patent Office: 389 Days
• Field of Search: 359/290, 359/291, 359/292
• US Class Current: 359/292
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means

Abstract

A MEMs scanning device has a variable resonant frequency. In one embodiment, the MEMs device includes a flexible arm that extends from an oscillatory body. An electrical field applies a force to the flexible arm, thereby bending the flexible arm to change the moment of inertia of the oscillatory body and a secondary mass carried by the flexible arm. The shifted combined center of mass changes the resonant frequency of the MEMs device. In another embodiment, an absorptive material forms a portion of a torsional arm that supports the oscillatory body. The mechanical properties of the absorptive material can be varied by varying the concentration of a gas surrounding the absorptive material. The varied mechanical properties change the resonant frequency of the scanning device. A display apparatus includes the scanning device and the scanning device scans about two or more axes, typically in a raster pattern. Various approaches to controlling the frequency responses of the scanning device are described, including active control of MEMs scanners and passive frequency tuning.

Claims

1. A MEMs scanner, comprising:

a central plate carrying a mirror and having a centerline;

a supporting frame;

at least one torsional member extending between the central plate and the supporting frame; and

a plurality of masses carried by the central plate and distributed radially symmetrically about the scan axis, the plurality of masses having an asymmetric distribution about the mirror centerline.

2. The MEMs scanner of claim 1 wherein the centerline and the pivot axis are perpendicular.

3. The MEMs scanner of claim 1 wherein the torsional member, central plate mirror and masses are configured to define a resonant scanning frequency about the pivot axis, and wherein the masses and distribution are selected to define a resonant frequency about the centerline that is substantially twice the resonant scanning frequency.

4. The MEMs scanner of claim 1 further comprising:

a substrate;

at least one torsional member extending between the supporting frame and the substrate, the torsional member defining a rotation axis substantially parallel to the centerline.

5. An optical scanning system comprising:

a light source, operative to emit a beam of light;

a MEMs structure including;

a central plate carrying a mirror and positioned to intercept the beam of light;

an actuator positioned to provide a motive force to the central plate

a supporting frame carrying the central plate, wherein the central plate is responsive to the motive force to rotate about a primary pivot axis relative to the supporting frame at a primary rotation frequency, the central plate further including an asymmetric mass distribution selected to produce rotation about a second axis orthogonal to the pivot axis in response to rotation of the central plate about the primary pivot axis.

6. The optical scanning system of claim 5 wherein the mass distribution is selected such that the rotation about the second axis is resonant at substantially twice the primary rotation frequency.

7. A method of scanning a light beam through a raster pattern having a line rate and a refresh rate, comprising the steps of:

directing the light beam toward a mirror having a primary body and at least one mass carried by the primary body;

actuating the primary body with a first motive force aligned to produce rotation of the primary body about a primary pivot axis at an integral multiple of the line rate, wherein the at least one mass acts on the primary body to produce a rotational component about a second axis orthogonal to the primary pivot axis;

rotating the mirror with a second motive force about the second axis at the refresh rate.

8. The method of claim 7 wherein the integral multiple is 2.

9. The method of claim 7 wherein the line rate is substantially equal to a resonant frequency of rotation of the primary body.