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Nonstick layer for a micromechanical component

  • US 6,656,368 B2
  • Filed: 03/02/2000
  • Issued: 12/02/2003
  • Est. Priority Date: 06/06/1997
  • Status: Expired due to Term
First Claim
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1. A method for manufacturing a micromechanical component, comprising:

  • producing, on a sacrificial layer, a movable element by patterning an upper layer;

    producing a metallization layer on the upper layer, wherein the metallization layer is not applied to the sacrificial layer;

    removing a portion of the sacrificial layer beneath the moveable element, so that the movable element becomes movable;

    subsequent to removing the portion of the sacrificial layer, producing a protective layer on the movable element and the metallization layer, wherein an adhesive force of the movable element is reduced by the protective layer; and

    removing the protective layer from the metallization layer.

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