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Post etch inspection system

  • US 6,656,374 B2
  • Filed: 04/02/2001
  • Issued: 12/02/2003
  • Est. Priority Date: 04/02/2000
  • Status: Expired due to Fees
First Claim
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1. A method for post etching inspection of electrical circuits, comprising:

  • viewing an electrical circuit at various locations thereon and providing output indications of a width of a conductor line on said electrical circuit at said various locations along a length of the conductor line; and

    receiving said output indications of said width of a conductor line on said electrical circuit at said various locations and providing an output indication of variations in an etching characteristic between at least some of said various locations, said etching characteristic corresponding to a line width of the conductor line being generally uniform at least over a minimum length of the conductor line.

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