Method for manufacturing a semiconductor device having a reliable thinning step
First Claim
1. A method for manufacturing a semiconductor device, which comprises:
- a step of bonding a semiconductor device substrate to a dummy substrate with a heat foamable adhesive sheet to unify them, a step of thinning the semiconductor device substrate while it is unified with the dummy substrate, and a step of dicing the semiconductor substrate after removing it from the dummy substrate, wherein the semiconductor device substrate is fixed to the dummy substrate by bonding a heat foamable-adhesive side of the heat foamable adhesive sheet directly to a device side of the semiconductor device substrate, and by bonding a normal adhesive side of the heat foamable adhesive sheet to the dummy substrate.
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Abstract
The present invention relates to a method for manufacturing a semiconductor device from a step of thinning a semiconductor device substrate to a step of dicing it, and a semiconductor device. The method for manufacturing a semiconductor device substrate of the present invention is characterized by carrying out a series of processes from a step of uniformly thinning a whole surface of a semiconductor device substrate to a step of back-metal plating, while the semiconductor device substrate is unified with a dummy substrate. Therefore, the present invention allows a semiconductor device to be manufactured without breaking the thinned semiconductor device substrate even after the thinned substrate is separated from the dummy substrate.
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11 Claims
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1. A method for manufacturing a semiconductor device, which comprises:
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a step of bonding a semiconductor device substrate to a dummy substrate with a heat foamable adhesive sheet to unify them, a step of thinning the semiconductor device substrate while it is unified with the dummy substrate, and a step of dicing the semiconductor substrate after removing it from the dummy substrate, wherein the semiconductor device substrate is fixed to the dummy substrate by bonding a heat foamable-adhesive side of the heat foamable adhesive sheet directly to a device side of the semiconductor device substrate, and by bonding a normal adhesive side of the heat foamable adhesive sheet to the dummy substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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Specification