Small profile spectrometer

• US 6,657,197 B2
• Filed: 12/22/2000
• Issued: 12/02/2003
• Est. Priority Date: 12/22/2000
• Status: Active Grant

• Current Assignee: Honeywell International Inc.
• Original Assignee: Honeywell International Inc.
• Inventors: Droessler, Justin G., Peczalski, Andrzej
• Primary Examiner(s): Hannaher, Constantine
• Assistant Examiner(s): MORAN, TIMOTHY J
• Application Number:
  US09/747,032
• Publication Number:
  US 20020079451A1
• Time in Patent Office: 1,075 Days
• Field of Search: 250/339.11, 250/343, 250/339.13, 250/339.12, 250/339.02, 250/345, 356/445
• US Class Current: 250/339.12
• CPC Class Codes: G01J 3/02 Details
• CPC Class Codes: G01N 21/35 using infrared light G01N21/39 takes precedence
• CPC Class Codes: G01N 21/3577 for analysing liquids, e.g. polluted water
• CPC Class Codes: G01N 21/552 Attenuated total reflection

Abstract

A low profile spectrometer includes one or more electromagnetic energy emitters, one or more electromagnetic energy detectors, and an optical path including a sampling element. The optical path optically couples each of the one or more electromagnetic energy emitters to one of the one or more electromagnetic energy detectors. The one or more electromagnetic energy detectors and the one or more electromagnetic energy emitters are formed on a common substrate. The spectrometer may also include one or more first re-imaging elements for optically coupling the one or more electromagnetic energy emitters to the sampling element, and one or more second re-imaging elements for optically coupling the one or more electromagnetic energy detectors to the sampling element. The sampling element is capable of being optically coupled to a sample and provides a path for optically coupling the one or more first re-imaging elements to the one or more second re-imaging elements.

Claims

1. A spectrometer comprising:

one or more electromagnetic energy emitters;

one or more electromagnetic energy detectors; and

an optical path including a sampling element structured for being optically coupled to a non-gaseous sample, the optical path for optically coupling each of the one or more electromagnetic energy emitters to one of the one or more electromagnetic energy detectors, wherein each of the one or more electromagnetic energy emitters and each of the one or more electromagnetic energy detectors are formed on a common substrate.

2. A spectrometer comprising:

one or more electromagnetic energy emitters;

one or more electromagnetic energy detectors; and

an optical path including a sampling element structured for being optically coupled to a non-gaseous sample, the optical path for optically coupling each of the one or more electromagnetic energy emitters to one of the one or more electromagnetic energy detectors, wherein each of the one or more electromagnetic energy emitters and each of the one or more electromagnetic energy detectors are formed on a common substrate and each of the one or more electromagnetic energy emitters comprises a microbolometer emitter capable of emitting infrared energy.

3. A spectrometer comprising:

one or more electromagnetic energy emitters;

one or more electromagnetic energy detectors; and

an optical path including a sampling element structured for being optically coupled to a non-gaseous sample, the optical path for optically coupling each of the one or more electromagnetic energy emitters to one of the one or more electromagnetic energy detectors, wherein the one or more electromagnetic energy emitters comprise between about twenty and about thirty electromagnetic energy emitters and the one or more electromagnetic energy detectors comprise between about twenty and about thirty electromagnetic energy detectors formed on a substrate and the between about twenty and about thirty electromagnetic energy emitters are formed on the substrate.

4. A spectrometer comprising:

one or more electromagnetic energy emitters;

one or more electromagnetic energy detectors; and

an optical path including a sampling element structured for being optically coupled to a non-gaseous sample, the optical path for optically coupling each of the one or more electromagnetic energy emitters to one of the one or more electromagnetic energy detectors, wherein the optical path comprises;

one or more first re-imaging elements for optically coupling the one or more electromagnetic energy emitters to the sampling element; and

one or more second re-imaging elements for optically coupling the one or more electromagnetic energy detectors to the sampling element, wherein the sampling element provides a path for optically coupling the one or more first re-imaging elements to the one or more second re-imaging elements.

5. The spectrometer of claim 4, wherein the sampling element comprises a crystal.

6. The spectrometer of claim 5, wherein the crystal is fabricated on a substrate.

7. The spectrometer of claim 6, wherein the crystal has at least one mirrored surface.

8. The spectrometer of claim 4, wherein the sampling element comprises a material that is substantially transparent to infrared energy.

9. The spectrometer of claim 4, wherein each of the one or more first re-imaging elements comprises a diffractive lens.

10. The spectrometer of claim 4, wherein each of the one or more first re-imaging elements comprises a collimating lens.

11. The spectrometer of claim 4, wherein each of the one or more second re-imaging elements comprises a focusing lens.

12. The spectrometer of claim 4, wherein each of the one or more electromagnetic radiation sources is capable of generating infrared radiation having a wavelength of between about 2.5 micrometers and about 16.7 micrometers.

13. The spectrometer of claim 4, further comprising one or more aperture stops located in the optical path.

14. The spectrometer of claim 4, wherein each of the one or more first re-imaging elements and each of the one or more second re-imaging elements are located an equal distance from a substrate.

15. The spectrometer of claim 4, wherein each of the one or more first re-imaging elements and each of the one or more second re-imaging elements are located at a distance of between about 0.05 to 1.5 millimeters from the sampling element.

16. The spectrometer of claim 4, further comprising:

a reservoir containing a lubricant, the lubricant being optically coupled to the sampling element.

17. A spectrometer comprising:

a first substrate comprising one or more infrared radiation emitters and one or more infrared radiation detectors formed thereon;

a second substrate comprising a plurality of re-imaging elements formed thereon;

a third substrate comprising a plurality of apertures formed thereon;

a fourth substrate comprising one or more re-imaging elements and one or more apertures formed thereon; and

a fifth substrate comprising a sampling element formed thereon, wherein the first substrate, the second substrate, the third substrate, and the fourth substrate are arranged such that an optical path coupling the one or more infrared radiation emitters to the one or more infrared radiation detectors is formed.

18. The spectrometer of claim 17, wherein the spectrometer has a length of between about 1.5 millimeters and about 4.5 millimeters, a width of between about 1.5 millimeters and about 4.5 millimeters, and a thickness of between about 2.5 millimeters and about 6.5 millimeters.

19. The spectrometer of claim 17, wherein the first substrate comprises silicon and the fifth substrate comprises germanium.

20. The spectrometer of claim 17, further comprising:

a reservoir containing a lubricant, the lubricant being optically coupled to the sampling element.

21. A method comprising:

generating a plurality of infrared radiation beams from a plurality of electromagnetic energy emitters, each of the plurality of infrared radiation beams having a different wavelength band;

transmitting each of the plurality of infrared radiation beams along an optical path that includes a sampling element optically coupled to a sample material to produce a plurality of attenuated infrared radiation beams;

measuring the intensity of each of the plurality of attenuated infrared radiation beams to produce a plurality of intensity measurements; and

processing the plurality of intensity measurements to identify one or more properties of the sample material.

22. The method of claim 21, wherein generating a plurality of infrared radiation beams from a plurality of electromagnetic energy emitters comprises:

passing a current through a plurality of bolometer emitters to generate the plurality of infrared radiation beams; and

separately collimating each of the plurality of infrared radiation beams such that each of the plurality of infrared radiation beams includes a substantially unique range of infrared wavelengths.

23. The method of claim 21, wherein processing the plurality of intensity measurements to identify one or more properties of the sample material comprises:

determining a concentration value for a contaminant in the sample material.

24. A method comprising:

generating a plurality of infrared radiation beams, each of the plurality of infrared radiation beams having a different wavelength band;

transmitting each of the plurality of infrared radiation beams along an optical path that includes a sampling element optically coupled to a sample material to produce a plurality of attenuated infrared radiation beams;

measuring the intensity of each of the plurality of attenuated infrared radiation beams to produce a plurality of intensity measurements;

processing the plurality of intensity measurements to identify one or more properties of the sample material;

wherein generating a plurality of infrared radiation beams comprises;

passing a current through one or more bolometer emitters to generate the one or more infrared radiation beams; and

separately collimating each of the plurality of infrared radiation beams such that each of the plurality of infrared radiation beams includes a substantially unique range of infrared wavelengths; and

wherein separately collimating each of the plurality of infrared radiation beams such that each of the plurality of infrared radiation beams includes a substantially unique range of infrared wavelengths comprises;

placing one or more collimating lenses having different dispersing factors in each of the plurality of infrared radiation beams.

25. A spectrometer comprising:

one or more electromagnetic energy emitters;

one or more electromagnetic energy detectors; and

an optical path including a sampling element, the optical path for optically coupling each of the one or more electromagnetic energy emitters to one of the one or more electromagnetic energy detectors;

one or more first re-imaging elements for optically coupling the one or more electromagnetic energy emitters to the sampling element;

one or more second re-imaging elements for optically coupling the one or more electromagnetic energy detectors to the sampling element, wherein the sampling element provides a path for optically coupling the one or more first re-imaging elements to the one or more second re-imaging elements; and

wherein the sampling element comprises a crystal.

26. A spectrometer comprising:

an electromagnetic energy emitter;

an electromagnetic energy detector; and

an optical path coupling the electromagnetic energy emitter to the electromagnetic energy detector, the optical path including a sampling element that at least partially comprises a crystal formed on a substrate, the sampling element being structured to be optically coupled to a non-gaseous sample.

27. The spectrometer of claim 26 wherein the sampling element has a thickness between about five microns and about fifteen microns.

28. The spectrometer of claim 26 wherein the crystal is zinc selenide.

29. The spectrometer of claim 26 wherein the crystal is formed on the substrate by chemical vapor deposition.

30. The spectrometer of claim 26 wherein the substrate is transparent to infrared energy.

31. The spectrometer of claim 26 wherein the substrate is silicon.

32. The spectrometer of claim 26 wherein a surface of the sampling element is coated with a material that reflects infrared energy.

33. The spectrometer of claim 32 wherein the material is coated on the sampling element by chemical vapor deposition.

34. The spectrometer of claim 32 wherein the material is aluminum.