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Method and apparatus for measuring gap, method and apparatus for measuring shape and method for manufacturing liquid crystal device

  • US 6,657,218 B2
  • Filed: 10/31/2001
  • Issued: 12/02/2003
  • Est. Priority Date: 11/01/2000
  • Status: Active Grant
First Claim
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1. A gap measuring method characterized by comprising the steps of:

  • applying a plurality of color lights to a member provided with a gap, to produce color interference fringes;

    obtaining respective intensities of the color lights in the images of the interference fringes taken by a color camera, at each of predetermined positions of each image, so as to compute an actual ratio among the obtained intensities of the color lights for each of the predetermined positions; and

    obtaining gap values of a plurality of points of the gap provided in the member, based on said actual ratio and theoretical ratios each of which is computed based on intensities of said color lights in an image, correspondingly to each of preliminarily set gap values.

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