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Micromachine switch and method of manufacture thereof

  • US 6,657,324 B1
  • Filed: 10/25/2001
  • Issued: 12/02/2003
  • Est. Priority Date: 04/27/1999
  • Status: Expired due to Fees
First Claim
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1. A micromachine switch disposed on a substrate to operate based on a control signal, comprising:

  • first and second high-frequency signal lines having their respective ends spaced from each other;

    a cantilever fixed to the end of either said first or said second high-frequency signal line and extending to a position above the end of the other high-frequency signal line, said cantilever including an electrically conductive member;

    first insulating means disposed on said first high-frequency signal line;

    second insulating means disposed in an area where said cantilever and said other high-frequency signal line confront each other; and

    a first control signal line connected between the end of said first high-frequency signal line and said first insulating means, for applying said control signal which is represented by DC voltage level variations.

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