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Micromechanical device

  • US 6,657,360 B2
  • Filed: 07/24/2001
  • Issued: 12/02/2003
  • Est. Priority Date: 12/15/1998
  • Status: Expired due to Fees
First Claim
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1. An electrostatic microactuator comprising a substantially planar substrate, at least one comb drive assembly having first and second comb drive members, the first comb drive member being mounted on the substrate, first and second spaced-apart springs, each spring having a first end portion coupled to the substrate and a second end portion coupled to the second comb drive member for suspending the second comb drive member over the substrate, each of the first and second comb drive members being provided with a plurality of comb drive fingers, each of the comb drive fingers having a proximal portion with a width and a distal portion with a width less than the width of the proximal portion, the second comb drive member being movable relative to the first comb drive member from a rest position in which the distal portions of the comb drive fingers of the first and second comb drive members are interdigitated to an actuated position in which the distal portions of the comb drive fingers of the second comb drive member are interdigitated with the proximal portions of the comb drive fingers of the first comb drive member and the distal portions of the comb drive fingers of the first comb drive member are interdigitated with the proximal portions of the comb drive fingers of the second comb drive member.

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