×

Close coupled match structure for RF drive electrode

  • US 6,657,395 B2
  • Filed: 02/12/2003
  • Issued: 12/02/2003
  • Est. Priority Date: 08/17/2000
  • Status: Expired due to Fees
First Claim
Patent Images

1. An electrode assembly for supplying RF power from an RF power source having an output impedance to an electrically non-linear medium, said assembly comprising:

  • a drive electrode in communication with the medium and forming with the medium a load impedance; and

    an impedance match network coupled between the RF power source and said drive electrode for matching the output impedance of the RF source to the load impedance, said match network having an output component that is directly connected, physically and electrically, to said drive electrode.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×