Bistable micromirror with contactless stops
First Claim
1. A microstructure for steering light, the microstructure comprising:
- a substrate;
a structural linkage connected with the substrate and supporting a structural film, the structural film including a reflective coating; and
a first hold electrode connected with the substrate at a position laterally beyond an orthogonal projection of the structural film on the substrate and configured to hold the structural film electrostatically in a first tilted position with respect to the substrate upon application of a potential difference between the structural film and the first hold electrode.
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Accused Products
Abstract
A microstructure for steering light is provided that mitigates stiction. A substrate is provided on which a structural linkage is connected to support a structural film. The structural film includes a reflective coating. A hold electrode is connected with the substrate at a position laterally beyond an orthogonal projection of the structural film on the substrate. It is configured to hold the structural film electrostatically in a tilted position with respect to the substrate upon application of a potential difference between the structural film and the hold electrode. Because of its positioning with respect to the structural film, it is ensured that the structural film is not in contact with the substrate when the structural film is being held by the hold electrode.
77 Citations
27 Claims
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1. A microstructure for steering light, the microstructure comprising:
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a substrate;
a structural linkage connected with the substrate and supporting a structural film, the structural film including a reflective coating; and
a first hold electrode connected with the substrate at a position laterally beyond an orthogonal projection of the structural film on the substrate and configured to hold the structural film electrostatically in a first tilted position with respect to the substrate upon application of a potential difference between the structural film and the first hold electrode. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
wherein the first hold electrode comprises a first comb structure having a plurality of teeth, the first hold electrode being configured such that the first tilted position is defined by a first angle with respect to the substrate that depends on the potential difference between the structural film and the first electrode; - and
wherein the second hold electrode comprises a second comb structure having a plurality of teeth, the second hold electrode being configured such that the second tilted position is defined by a second angle with respect to the substrate that depends on the potential difference between the structural film and the second electrode.
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14. The microstructure recited in claim 13,
wherein the first angle deviates increasingly from horizontal with an increase in the potential difference between the structural film and the first electrode; - and
wherein the second angle deviates increasingly from horizontal with an increase in the potential difference between the structural film and the second electrode.
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15. A method for fabricating a microstructure for steering light, the method comprising:
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forming a first hold electrode on a substrate;
forming a structural linkage on the substrate;
forming a structural film on the structural linkage; and
depositing a reflective coating on the structural film;
wherein the first hold electrode is at a position laterally beyond an orthogonal projection of the structural film on the substrate and configured to hold the structural film electrostatically in a first tilted position with respect to the substrate upon application of a potential difference between the structural film and the first hold electrode. - View Dependent Claims (16, 17, 18, 19, 20, 21, 22)
forming a first hold electrode comprises forming a first comb structure having a plurality of teeth, wherein the first hold electrode is configured such that the first tilted position is defined by an angle with respect to the substrate that depends on the potential difference between the structural film and the first hold electrode; - and
forming a second hold electrode comprises forming a second comb structure having a plurality of teeth, wherein the second hold electrode is configured such that the second tilted position is defined by an angle with respect to the substrate that depends on the potential difference between the structural film and the second hold electrode.
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23. A microstructure for steering light, the microstructure comprising:
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support means;
tiltable micromirror means connected with the support means; and
first electrostatic-field-generation means for providing an electrostatic field to hold the tiltable micromirror means in a tilted position with respect to the support means, wherein the first electrostatic-field-generation means is connected with the support means at a position laterally beyond an orthogonal projection of the tiltable micromirror means on the support means. - View Dependent Claims (24, 25, 26, 27)
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Specification