Monolithic reconfigurable optical multiplexer systems and methods
First Claim
1. A monolithic reconfigurable optical multiplexer, comprising:
- a silicon demultiplexer;
a plurality of silicon optical switches; and
a silicon multiplexer, wherein the silicon demultiplexer, optical switches and multiplexer are monolithically integrated on a single silicon chip, wherein the single silicon chip comprises a silicon on insulator wafer and the silicon demultiplexer, the plurality of silicon optical switches and the silicon multiplexer are fabricated in a single crystal silicon device layer of the wafer.
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Abstract
A silicon demultiplexer, a plurality of silicon switches and a silicon multiplexer are monolithically integrated on a single silicon chip. In embodiments, the silicon demultiplexer and the silicon multiplexer each comprise a diffraction grating. In other embodiments, the silicon demultiplexer and the silicon multiplexer each comprise an arrayed waveguide grating. In various exemplary embodiments, the silicon optical switches comprise optical switches, micromachined torsion mirrors, electrostatic micromirrors, and/or tilting micromirrors. In use, an optical signal comprising a multiplexed data stream is input into the monolithic reconfigurable optical multiplexer. An optical signal that comprises a modified multiplexed data stream may be output. In an optical communications system, the silicon demultiplexer communicates with an input optical fiber, the plurality of silicon optical switches communicate between the silicon demultiplexer and the silicon multiplexer, and the silicon multiplexer communicates with an output optical fiber. In various embodiments, the optical switches are fabricated to be self-aligned.
43 Citations
16 Claims
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1. A monolithic reconfigurable optical multiplexer, comprising:
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a silicon demultiplexer;
a plurality of silicon optical switches; and
a silicon multiplexer, wherein the silicon demultiplexer, optical switches and multiplexer are monolithically integrated on a single silicon chip, wherein the single silicon chip comprises a silicon on insulator wafer and the silicon demultiplexer, the plurality of silicon optical switches and the silicon multiplexer are fabricated in a single crystal silicon device layer of the wafer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 16)
an input optical fiber;
the monolithic reconfigurable optical multiplexer of claim 1, the silicon demultiplexer communicating with the input optical fiber, the plurality of silicon optical switches communicating between the silicon demultiplexer and the silicon multiplexer; and
an output optical fiber communicating with the silicon multiplexer.
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- 11. A method for modifying an optical signal, comprising inputting an optical signal comprising a data stream into a monolithic reconfigurable optical multiplexer including at least one silicon demultiplexer, a plurality of silicon optical switches and at least one silicon multiplexer monolithically integrated on a single silicon chip, wherein the single silicon chip comprises a silicon on insulator wafer with the silicon demuitiplexer, the plurality of silicon optical switches and the silicon multiplexer fabricated in a single crystal silicon device layer of the wafer.
- 13. A method for manufacturing a monolithic reconfigurable optical multiplexer, comprising fabricating at least one silicon demultiplexer, a plurality of silicon optical switches and at least one silicon multiplexer in a single silicon layer, wherein the single silicon layer comprises a single crystal silicon device layer of a silicon on insulator wafer.
Specification