Oscillatory angular rate sensor
First Claim
1. An angular rate sensor unit comprising:
- a mount base; and
a sensor element installed on said mount base, said sensor element including a substrate, an oscillator, an oscillation exciting mechanism, and an angular velocity sensing mechanism, the oscillator being retained by the substrate through a first support member elastically deformable in a first direction and a second support member elastically deformable in a second direction perpendicular to the first direction, the oscillation exciting mechanism working to excite the oscillator to oscillate in the first direction, the angular velocity sensing mechanism working to produce a sensor output as a function of degree of oscillation of the oscillator in the second direction arising from angular motion the oscillator experiences about an axis extending in a third direction perpendicular to the first and second directions during oscillation of the oscillator in the first direction, wherein a resonant frequency of a structure made up of said mount base and said sensor element in the second direction is set to a value less than or equal to a reciprocal of square root of two times a difference between a resonant frequency of the oscillator in the first direction and a resonant frequency of the oscillator in the second direction.
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Accused Products
Abstract
An oscillatory angular rate sensor unit includes a mount base and a sensor element installed on the mount base. The sensor element includes an oscillator which produces angular velocity-caused oscillations in a first direction when the sensor element experiences angular motion during self-excited oscillation of the oscillator in a second direction opposite the first direction. A resonant frequency of the sensor unit in the first direction is set to a value less than or equal to a reciprocal of square root of two times a difference between resonant frequencies of the oscillator in the first and second directions, thereby eliminating an error output caused by undesirable acceleration acting on the sensor unit.
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Citations
2 Claims
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1. An angular rate sensor unit comprising:
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a mount base; and
a sensor element installed on said mount base, said sensor element including a substrate, an oscillator, an oscillation exciting mechanism, and an angular velocity sensing mechanism, the oscillator being retained by the substrate through a first support member elastically deformable in a first direction and a second support member elastically deformable in a second direction perpendicular to the first direction, the oscillation exciting mechanism working to excite the oscillator to oscillate in the first direction, the angular velocity sensing mechanism working to produce a sensor output as a function of degree of oscillation of the oscillator in the second direction arising from angular motion the oscillator experiences about an axis extending in a third direction perpendicular to the first and second directions during oscillation of the oscillator in the first direction, wherein a resonant frequency of a structure made up of said mount base and said sensor element in the second direction is set to a value less than or equal to a reciprocal of square root of two times a difference between a resonant frequency of the oscillator in the first direction and a resonant frequency of the oscillator in the second direction. - View Dependent Claims (2)
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Specification