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Micromachined ultrasound transducer and method for fabricating same

  • US 6,659,954 B2
  • Filed: 12/19/2001
  • Issued: 12/09/2003
  • Est. Priority Date: 12/19/2001
  • Status: Expired due to Term
First Claim
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1. A micro-machined ultrasonic transducer array, comprising:

  • a substrate having an upper surface and an opposing lower surface and a thickness there between;

    a recess formed in the substrate that projects upwardly into the substrate from the lower surface to an intermediate position within the substrate, the recess being substantially filled with a solid material having a predetermined acoustic property; and

    at least one micro-machined ultrasonic transducer (MUT) supported by the upper surface of the substrate and positioned over the recess.

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