Liquid crystal display device and its manufacturing method
First Claim
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1. A liquid crystal display device having a thin-film transistor for driving a pixel electrode and a storage capacity element on a substrate, comprising:
- said storage capacity element being formed to underlie a thin-film semiconductor layer forming said thin-film transistor wherein said storage capacity element is made of a structure interposing a storage capacity dielectric film between a storage capacity line and a storage capacity pixel electrode.
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Abstract
A liquid crystal display device having a thin-film transistor for driving a pixel electrode and a storage capacity element on a substrate comprises the storage capacity element being formed to underlie a thin-film semiconductor layer forming said thin-film transistor. And its manufacturing method characterizes in making the storage capacity element on the substrate and making the thin-film transistor to overlie the storage capacity element via an inter-layer insulating film.
49 Citations
12 Claims
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1. A liquid crystal display device having a thin-film transistor for driving a pixel electrode and a storage capacity element on a substrate, comprising:
said storage capacity element being formed to underlie a thin-film semiconductor layer forming said thin-film transistor wherein said storage capacity element is made of a structure interposing a storage capacity dielectric film between a storage capacity line and a storage capacity pixel electrode. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A manufacturing method of a liquid crystal display device having a thin-film transistor for driving a pixel electrode and a storage capacity element on a substrate, characterized in:
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making said storage capacity element on said substrate; and
making said thin-film transistor to overlie said storage capacity element via an inter-layer insulating film wherein said storage capacity element is made by sequentially stacking a storage capacity pixel electrode, a storage capacity dielectric film and a storage capacity line on said substrate. - View Dependent Claims (10, 11, 12)
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Specification