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High frequency deformable mirror device

  • US 6,661,561 B2
  • Filed: 03/26/2001
  • Issued: 12/09/2003
  • Est. Priority Date: 03/26/2001
  • Status: Expired due to Fees
First Claim
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1. A method for modulating light using a microelectromechanical structure, said microelectromechanical structure comprising a plurality of thin flexible reflective members, said reflective members having elongated shapes, said elongated shapes having a long dimension and a short dimension, said reflective members having at least one reflector surface, said reflector surface having one or more reflective segments and said reflective members capable of being flexed independently of one another, said method comprising directing a beam of light to reflect from said reflective members and flexing a part of said reflective members about an axis parallel to said long dimension to vary a curvature of at least one of the reflective segments,wherein each of said reflective members is affixed to the rest of said microelectromechanical structure along a line parallel to said long dimension and along a pedestal extending along said long dimension and each of said reflective members projects to either side of the pedestal and wherein said flexing is induced by application of one of the following forces to said reflective members:

  • electrostatic, magnetic.

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