Optical modulator and method of manufacture thereof

• US 6,661,562 B2
• Filed: 08/17/2001
• Issued: 12/09/2003
• Est. Priority Date: 08/17/2001
• Status: Expired due to Term

• Current Assignee: Avago Technologies International Sales Pte Limited (Broadcom, Inc.)
• Original Assignee: Agere Systems Incorporated (Broadcom, Inc.), Lucent Technologies, Inc. (Nokia Corporation)
• Inventors: Walker, James A.
• Primary Examiner(s): Epps, Georgia
• Assistant Examiner(s): THOMPSON, TIMOTHY J
• Application Number:
  US09/932,218
• Publication Number:
  US 20030035196A1
• Time in Patent Office: 844 Days
• Field of Search: 359/223, 359/224, 359/290, 359/291, 359/295, 359/318, 359/271
• US Class Current: 359/295
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26
• CPC Class Codes: G02B 26/02 for controlling the intensity of light G02B26/004 takes precedence

Abstract

An optical modulator having an optical modulator window coupled to a substrate and a method of manufacture thereof. In one embodiment, the optical modulator includes at least one drive electrode that adjusts a portion of the optical modulator window to attenuate light passing therethrough. The optical modulator further includes a sense element configured to measure a characteristic associated with the optical modulator window.

Claims

1. An optical modulator comprising:

a released membrane dielectric layer including an optical modulator window;

at least one drive electrode coupled to said released membrane dielectric layer adjacent said optical modulator window and configured to adjust a portion of said optical modulator window to attenuate light passing therethrough; and

a sense element coupled to said released membrane dielectric layer adjacent said optical modulator window and configured to measure a characteristic associated with said optical modulator window.

2. The optical modulator as recited in claim 1 wherein said sense element provides a determination of an attenuation of said light.

3. The optical modulator as recited in claim 1 comprising a pair of drive electrodes located on opposing sides of said optical modulator window.

4. The optical modulator as recited in claim 1 wherein said sense element is a first sense element and further comprising a second sense element located on an opposing side of said optical modulator window.

5. The optical modulator as recited in claim 4 wherein said drive electrode is a first drive electrode located adjacent said first sense element and further comprising a second drive electrode located adjacent said second sense element.

6. The optical modulator as recited in claim 1 wherein said sense element is coupled to an amplifier circuit.

7. The optical modulator as recited in claim 1 wherein said sense element is configured to measure a capacitance associated with the optical modulator window.

8. An optical modulator, comprising:

a substrate;

a gap layer located over said substrate;

a released membrane dielectric layer located over said gap layer and including a modulator region;

a drive electrode coupled to said released membrane dielectric layer and located adjacent said modulator region; and

a sense element coupled to said released membrane dielectric layer and located adjacent said modulator region.

9. The optical modulator as recited in claim 8 wherein said modulator region comprises an optical modulator window.

10. The optical modulator as recited in claim 9 comprising a pair of drive electrodes located adjacent said modulator region and on opposing sides of said optical modulator window.

11. The optical modulator as recited in claim 8 comprising a plurality of drive electrodes and a plurality of sense elements located proximate to said modulator region.

12. The optical modulator as recited in claim 11 wherein each of said plurality of drive electrodes is located adjacent a corresponding one of said plurality of sense elements.

13. The optical modulator as recited in claim 8 wherein said modulator region is formed from at least silicon nitride.

14. The optical modulator as recited in claim 8 wherein said drive electrode and sense element are formed from a material selected from the group consisting of:

aluminum,

platinum,

tungsten,

conductive silicon, and

gold.

15. A method of manufacturing an optical modulator, comprising:

providing a substrate;

forming a gap layer over said substrate;

forming a released membrane dielectric layer including a modulator region over said gap layer;

coupling a drive electrode to said released membrane dielectric layer and adjacent said modulator region; and

coupling a sense element to said released membrane dielectric layer and adjacent said modulator region proximate said drive electrode.

16. The method as recited in claim 15 further comprising forming an optical modulator window in said modulator region.

17. The method as recited in claim 16 further comprising forming a pair of drive electrodes on opposing sides of said optical modulator window.

18. The method as recited in claim 15 further comprising forming a plurality of drive electrodes and a plurality of sense elements over said modulator region.

19. The method as recited in claim 18 wherein each of said plurality of drive electrodes is located adjacent a corresponding one of said plurality of sense elements.

20. The method as recited in claim 15 wherein said modulator region is formed from at least silicon nitride.

21. The method as recited in claim 15 wherein said drive electrode and sense element are formed from a material selected from the group consisting of:

aluminum,

platinum,

tungsten,

conductive silicon, and

gold.