Structure and fabrication process for integrated moving-coil magnetic micro-actuator
First Claim
1. A microactuator for finely positioning a transducing head adjacent a select radial track of a disc, the microactuator comprising:
- a bottom structure for supporting a slider, the bottom structure comprising a rotor and a stator, wherein the rotor comprises a coil embedded into a surface of the rotor; and
a top structure carrying a magnet and bonded to the bottom structure.
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Accused Products
Abstract
A moving-coil magnetic microactuator is formed by using a dual silicon wafer structure and thin film technologies such as deep trench reactive ion etching, reactive ion etching, plasma-enhanced chemical vapor deposition and metallo-organinc chemical vapor deposition. Several bottom structures are formed from a bottom wafer, each bottom structure having a coil and wires embedded in the surface of the bottom structure. Several top structures are formed from a top wafer, each top structure having a magnet and mechanical stand-offs. The top structures are bonded to the bottom structures so that the magnet is above the embedded coil, separated by an air gap created by the mechanical stand-offs.
73 Citations
20 Claims
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1. A microactuator for finely positioning a transducing head adjacent a select radial track of a disc, the microactuator comprising:
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a bottom structure for supporting a slider, the bottom structure comprising a rotor and a stator, wherein the rotor comprises a coil embedded into a surface of the rotor; and
a top structure carrying a magnet and bonded to the bottom structure. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A dual structure microactuator for positioning a transducing head relative to a select track of a disc, the dual structure microactuator comprising:
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a first structure having a stator and a rotor, wherein the rotor comprises a coil embedded into a surface of the rotor; and
a second structure carrying a magnet and comprising mechanical stand-offs;
wherein the first structure is attached to the second structure.- View Dependent Claims (11, 12, 13, 14, 15, 16)
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17. A dual structure microactuator having a stator and a rotor for finely positioning a slider above a surface of a disc, the dual structure microactuator comprising:
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a first structure comprising a coil embedded in a surface of the first structure so that the surface remains essentially planar; and
a second structure comprising a magnet;
wherein the second structure is attached to the first structure so that a gap is formed between the magnet of the second structure and the embedded coil of the first structure. - View Dependent Claims (18, 19, 20)
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Specification