Image processing method, image processing system, and modifying-data producing method
First Claim
1. A method of processing a plurality of batches of object-part-image data representing a plurality of object-part images which are taken by at least one image-taking device from a plurality of parts of an object, respectively, and thereby obtaining at least one optical characteristic value of the object,the object-part images imaging the parts of the object such that at least one first object-part image images at least one first part and at least one second object-part image images at least one second part adjacent to said at least one first part in the object and includes at least one overlapping portion imaging a portion of said at least one first part, each of said plurality of batches of object-part-image data comprising a plurality of optical characteristic values respectively associated with a plurality of physical positions, and thereby defining a corresponding one of a plurality of physical screens, the method comprising the steps of designating at least one virtual position on a virtual screen corresponding to the parts of the object, modifying, based on predetermined modifying data, said at least one virtual position on the virtual screen, and thereby determining at least one physical position corresponding to said at least one virtual position, on one of the physical screens, and obtaining at least one optical characteristic value associated with said at least one physical position on said one physical screen, as at least one optical characteristic value associated with said at least one virtual position on the virtual screen and as said at least one optical characteristic value of the object.
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Accused Products
Abstract
A method of processing batches of object-part-image data representing object-part images which are taken by one or more image-taking devices from parts of an object, respectively, and thereby obtaining one or more optical characteristic values of the object, the object-part images imaging the parts of the object such that a first object-part image images a first part and a second object-part image images a second part adjacent to the first part in the object and includes an overlapping portion imaging a portion of the first part, each of the batches of object-part-image data including optical characteristic values respectively associated with physical positions, and thereby defining a corresponding one of physical screens, the method including the steps of designating at least one virtual position on a virtual screen corresponding to the parts of the object, modifying, based on predetermined modifying data, the at least one virtual position on the virtual screen, and thereby determining at least one physical position corresponding to the at least one virtual position, on one of the physical screens, and obtaining at least one optical characteristic value associated with the at least one physical position on the one physical screen, as at least one optical characteristic value associated with the at least one virtual position on the virtual screen and as the at least one optical characteristic value of the object.
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Citations
21 Claims
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1. A method of processing a plurality of batches of object-part-image data representing a plurality of object-part images which are taken by at least one image-taking device from a plurality of parts of an object, respectively, and thereby obtaining at least one optical characteristic value of the object,
the object-part images imaging the parts of the object such that at least one first object-part image images at least one first part and at least one second object-part image images at least one second part adjacent to said at least one first part in the object and includes at least one overlapping portion imaging a portion of said at least one first part, each of said plurality of batches of object-part-image data comprising a plurality of optical characteristic values respectively associated with a plurality of physical positions, and thereby defining a corresponding one of a plurality of physical screens, the method comprising the steps of designating at least one virtual position on a virtual screen corresponding to the parts of the object, modifying, based on predetermined modifying data, said at least one virtual position on the virtual screen, and thereby determining at least one physical position corresponding to said at least one virtual position, on one of the physical screens, and obtaining at least one optical characteristic value associated with said at least one physical position on said one physical screen, as at least one optical characteristic value associated with said at least one virtual position on the virtual screen and as said at least one optical characteristic value of the object.
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11. An image-data processing system,
at least one image-taking device which takes a plurality of object-part images from a plurality of parts of an object, respectively, the object-part images imaging the parts of the object such that at least one first object-part image images at least one first part and at least one second object-part image images at least one second part adjacent to said at least one first part and includes at least one overlapping portion imaging a portion of said at least one first part; -
an object-part-image-data memory which stores a plurality of batches of object-part-image data representing the plurality of object-part images taken by the image-taking device, each of the batches of object-part-image data comprising a plurality of optical characteristic values respectively associated with a plurality of physical positions, and thereby defining a corresponding one of a plurality of physical screens;
a modifying-data memory which stores predetermined modifying data; and
a virtual-data producing device which modifies, go based on the modifying data, at least one virtual position on a virtual screen corresponding to the parts of the object, and thereby determines at least one physical position corresponding to said at least one virtual position, on one of the physical screens, and which produces virtual data comprising said at least one virtual position which is, on the virtual screen, associated with at least one optical characteristic value which is, on said one physical screen, associated with said at least one physical position. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20, 21)
taking, with said at least one image-taking device, at least two substrate-part images from at least two parts of a substrate that correspond to said at least one first part and said at least one second part of the object, the substrate having a plurality of reference marks which are regularly provided on a surface thereof, obtaining at least two batches of substrate-part-image data representing said at least two substrate-part images, respectively, said at least two substrate-part images imaging said at least two parts of the substrate such that at least one first substrate-part image images at least one first part of the substrate and at least one second substrate-part image images at least one second part of the substrate adjacent to said at least one first part in the substrate and includes at least one overlapping portion imaging a portion of said at least one first part of the substrate, each of said at least two batches of substrate-part-image data defining a corresponding one of a plurality of physical screens, and producing, based said on at least two physical screens, and a virtual screen corresponding to said at least two parts of the substrate and having, thereon, respective prescribed positions of the reference marks of the substrate, the modifying data to modify each of respective physical positions of the reference marks on said at least two physical screens so as to coincide with a corresponding one of the prescribed positions of the reference marks on the virtual screen.
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14. A method according to claim 13, wherein the step of producing the modifying data comprises producing the modifying data to modify a physical set of coordinates indicating said each of the respective physical positions of the reference marks on said at least two physical screens so as to coincide with a prescribed set of coordinates indicating said corresponding one of the prescribed positions of the reference marks on the virtual screen.
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15. A method according to claim 14, wherein the step of producing the modifying data comprises producing a plurality of prescribed sets of coordinates indicating the prescribed positions of the reference marks on the virtual screen, and a plurality of modifying vectors respectively directed from the plurality of prescribed sets of coordinates to a plurality of physical sets of coordinates indicating the respective physical positions of the reference marks on said at last two physical screens, and producing at least two modifying tables each of which associates at least two prescribed sets of coordinates out of said plurality of prescribed sets of coordinates, with at least two modifying vectors out of said plurality of modifying vectors.
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16. A method according to claim 15, wherein the step of taking said at least two substrate-part images comprises sequentially taking, with a single image-taking device as said at least one image-taking device, said at least two substrate-part images from said at least two parts of the substrate, and wherein the step of producing the modifying data comprises
producing, based on at least one of said at least two modifying tables that corresponds to at least one of said at least two physical screens, image-distortion data representing a distortion of said at least one physical screen relative to the virtual screen, and producing positional-error data representing a positional error of each of said at least two physical screens relative to the virtual screen. -
17. A method according to claim 16, wherein the step of producing the positional-error data comprises
producing, based on the modifying vectors of each of said at least two modifying tables, parallel-position-error data representing a position error of a corresponding one of said at least two physical screens relative to the virtual screen in a direction parallel to the virtual screen, and producing, based on the modifying vectors of said each modifying table, angular-phase-error data representing an angular-phase error of said corresponding one physical screen relative to the virtual screen about an axis line perpendicular to the virtual screen. -
18. A method according to claim 16, wherein the step of producing the positional-error data comprises
producing, based on at least one error of at least one physical set of coordinates indicating the physical position of at least one representative reference mark of the reference marks on said each physical screen, relative to at least one prescribed set of coordinates indicating the prescribed position of said at least one representative reference mark on the virtual screen, parallel-position-error data representing a position error of said each physical screen relative to the virtual screen in a direction parallel to the virtual screen, and producing, based on said at least one error of said at least one physical set of coordinates indicating the physical position of said at least one representative reference mark on said each physical screen, relative to said at least one prescribed set of coordinates indicating the prescribed position of said at least one representative reference mark on the virtual screen, angular-phase-error data representing an angular-phase error of said each physical screen relative to the virtual screen about an axis line perpendicular to the virtual screen. -
19. A method according to claim 16, wherein the step of producing the positional-error data further comprises determining, based on the positional-error data and at least one prescribed offset amount prescribed for said at least two physical screens, a physical offset amount between said at least two physical screens.
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20. A method according to claim 19, wherein said at least two physical screens comprise a single main physical screen and at least one auxiliary physical screen, and wherein the step of determining the physical offset amount comprises determining a relative positional error of said at least one auxiliary physical screen relative to the main physical screen.
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21. A method according to claim 20, wherein the step of obtaining said at least two batches of substrate-part-image data comprises obtaining at least three batches of substrate-part-image data representing at least three substrate-part images taken from at least three parts of the substrate, and defining at least three physical screens, respectively, and wherein said at least three physical screens comprise the main physical screen representing an middle one of said at least three substrate-part images taken from a middle one of said at least three parts of the substrate.
Specification