Optical micro-cavity sensors

• US 6,661,938 B2
• Filed: 09/25/2001
• Issued: 12/09/2003
• Est. Priority Date: 09/25/2000
• Status: Expired due to Fees

• Current Assignee: Massachusetts Institute of Technology
• Original Assignee: Massachusetts Institute of Technology
• Inventors: Agarwal, Anuradha, Kimerling, Lionel C., Lim, Desmond R.
• Primary Examiner(s): NGO, HUNG NHAT
• Application Number:
  US09/963,026
• Publication Number:
  US 20020097947A1
• Time in Patent Office: 805 Days
• Field of Search: 385/12, 385/129, 385/131
• US Class Current: 385/12
• CPC Class Codes: G01N 21/552 Attenuated total reflection
• CPC Class Codes: G01N 21/7746 the waveguide coupled to a cavity resonator

Abstract

An integrated optical sensor using optical waveguide micro-cavity resonators. Using a laser and a detector it is possible to detect changes in the position of the resonance position, in wavelength or frequency, of one or more modes of the resonator. The change in resonance can be made dependent on chemicals, which have been adsorbed by chemically or biologically sensitive material provided in close proximity to the resonator.

Claims

1. An integrated optical sensor comprising:

an optical planar waveguide micro-resonator device; and

means for measuring change in resonance position, in wavelength or frequency, of one or more modes of said micro-resonator device, wherein the difference in position, in wavelength or frequency, of two or more modes is measured.

2. The sensor of claim 1, wherein said means for measuring comprises a tunable laser source.

3. The sensor of claim 1, wherein said means for measuring comprises a white light source coupled with a spectrometer.

4. The sensor of claim 1, wherein said means for measuring comprises a light source and a detector that are hybridly or monolithically integrated with said micro-resonator device.

5. The sensor of claim 1 further comprising a chemically or biologically sensitive layer in close proximity to said micro-resonator device.

6. The sensor of claim 1 when integrated with more than one other sensor on the same chip.

8. The sensor of claim 6, wherein the difference in position, in wavelength or frequency, of two or more modes is measured.

9. The sensor of claim 6, wherein said means for measuring comprises a tunable laser source.

10. The sensor of claim 6, wherein said means for measuring comprises a white light source coupled with a spectrometer.

11. The sensor of claim 6, wherein said means for measuring comprises a light source and a detector that are hybridly or monolithically integrated with said micro-resonator device.

12. The sensor of claim 6 further comprising a chemically or biologically sensitive layer in close proximity to said micro-resonator device.

13. The sensor of claim 1 when integrated with more than one other sensor on the same chip.

7. An integrated optical sensor comprising:

at least one optical waveguide micro-resonator device; and

means for measuring change in resonance position, in wavelength or frequency, of one or more modes of said at least one micro-resonator devices a sensor, said means including a light source, wherein the change in position of wavelength is determined by tuning said micro-resonator device and keeping the frequency of said light sourced fixed.